Abstract: Two methods of magnetron sputtering and screen printing were used to prepare conductive Au films on the Al2O3 ceramics surface. Under different parameters, Au films with different thicknesses were prepared by the controlled variable method. A systematic and in-depth study of the two preparation processes was carried out. Through the high-precision resistance measuring instrument, scanning electron microscope (SEM), and energy dispersive spectrometer (EDS), the conductive properties and micro-morphology of Au film before and after heat treatment were studied. The roughness of Au film surface was characterized by Confocal laser scanning microscope (CLSM). The results show that the nano-Au prepared by magnetron sputtering has a conductive film thickness threshold of 30 nm, and its film has a small change in the roughness of the substrate surface. After the nano-Au film is heat-treated at 600 ℃, Au undergoes solid state wetting, resulting in a sharp increase in its resistance value and a decrease in its electrical conductivity. By the method of screen printing, the conductive Au film is obtained by screen printing with a 200-mesh and the Au content of 40wt%, and the cost can be significantly reduced.
刘炘城, 邵海成, 乔冠军, 陆浩杰, 于刘旭, 张相召, 刘桂武. 氧化铝陶瓷表面连续导电金膜的制备工艺及性能[J]. 材料导报, 2021, 35(8): 8076-8081.
LIU Xincheng, SHAO Haicheng, QIAO Guanjun, LU Haojie, YU Liuxu, ZHANG Xiangzhao, LIU Guiwu. Preparation Process and Performance of Continuous Conductive Au Film on Surface of Al2O3 Ceramic. Materials Reports, 2021, 35(8): 8076-8081.
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2021, Vol. 35 
