State Key Laboratory of Marine Resource Utilization in South China Sea & Special Glass Key Laboratory of Hainan Province,Hainan University,Haikou 570228,China
Abstract: This work carried out an alternative deposition of W/Al2O3 nano-multilayers with various periodic thickness on the surface of soda-lime-silica glass by means of magnetron sputtering at room temperature, taking W and Al2O3 as targets. Under the condition of the same total thickness of W/Al2O3nano-multilayers, the effects of various periodic thickness on thermal insulation performance of W/Al2O3 were investigated. Step profiler, scanning electron microscope (SEM), X-ray diffraction (XRD) and transmission electron microscope (TEM) were employed to characterize the morphology and structure of W/Al2O3 nano-multilayers. Transient thermoreflectance (TTR) technique and nano indentation instrument were adopted to measure the thermal and mechanical properties of W/Al2O3 nano-multilayers. It was found that the individual layer in the nano-multilayers was uniform and continuous, no fault could be observed and interface between the layers was clear. The deposited Al2O3 layer exhibited an amorphous morphology, and the W layer held a metastable β-W (210) preferred orientation and showed an obvious amorphous state under the periodic thickness of 5 nm. The increase of interface density would bring about the enhancement in thermal resistance and hardness, and the decline in thermal conductivity of W/Al2O3 nano-multilayers. The W/Al2O3 nano-multilayers with 41 layers and periodic thickness of 5 nm exhibited an exceptional thermal insulation and mechanical properties, presenting the thermal resistance of 3.14×10-7m2·K·W-1, effective thermal conductivity of 0.36 W·m-1·K-1, hardness up to 8.53 GPa, binding force between multilayers and substrate of 42.20 mN. The prepared W/Al2O3 nano-multilayers possess a satisfactory thermal stability in the range of room temperature to 500 ℃.
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2020, Vol. 34 
