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材料导报  2022, Vol. 36 Issue (6): 20120259-4    https://doi.org/10.11896/cldb.20120259
  无机非金属及其复合材料 |
粉末靶磁控溅射ZnO/Cu/ZnO的制备及表征
李彤1,2, 赵卓1,2, 武俊生1,2, 方方1, 周艳文2
1 辽宁科技大学化学工程学院,辽宁 鞍山 114051
2 辽宁科技大学表面工程研究所,辽宁 鞍山 114051
Fabrication and Characterization of the ZnO/Cu/ZnO by Magnetron Sputtering Using Powder Targets
LI Tong1,2, ZHAO Zhuo1,2, WU Junsheng1,2, FANG Fang1, ZHOU Yanwen2
1 School of Chemistry Engineering, University of Science and Technology Liaoning, Anshan 114051, Liaoning, China
2 Institute of Surface Engineering, University of Science and Technology Liaoning, Anshan 114051, Liaoning, China
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摘要 室温下,采用射频磁控溅射氧化锌(ZnO)粉末靶和铜(Cu)靶,在玻璃衬底上制备ZnO/Cu/ZnO透明导电薄膜。通过改变Cu层厚度,研究其对ZnO/Cu/ZnO薄膜光电性能的影响。结果表明:ZnO/Cu/ZnO表面相对平整,结晶程度较好,在可见光范围内,当Cu厚度为11 nm和14 nm时,ZnO/Cu/ZnO薄膜的最高透光率分别为79%和74%;当Cu厚度为14 nm时,其载流子浓度及带电粒子运动能力分别为4.85×1021 cm-3和6.73 cm2·V-1·s-1。与ZnO/Ag/ZnO薄膜相比,ZnO/Cu/ZnO需要更厚的铜薄膜才能连续,而具有较薄Ag层的ZnO/Ag/ZnO有比ZnO/Cu/ZnO更优良的光电性能。
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李彤
赵卓
武俊生
方方
周艳文
关键词:  透明导电薄膜  粉末靶  射频磁控溅射  光电薄膜    
Abstract: At room temperature, ZnO/Cu/ZnO transparent conductive films were prepared on glass substrate by radio frequency magnetron sputtering of zinc oxide (ZnO) powder and copper (Cu) targets. The effect of the thickness of Cu layer on the photoelectric properties of ZnO/Cu/ZnO thin film were studied. The results showed that the surface of ZnO/Cu/ZnO films were relatively flat and had a good degree of crystallinity; in the visible light range, when the thicknesses of Cu are 11 nm and 14 nm, the achieved highest transmittance of ZnO/Cu/ZnO films were 79% and 74%; when the thickness of Cu is 14 nm, carrier concentration and the motion ability of charged particles are 4.85×1021 cm-3 and 6.73 cm2·V-1·s-1 respectively. Compared with ZnO/Ag/ZnO films, ZnO/Cu/ZnO required a thicker copper film to be continuous. ZnO/Ag/ZnO with a thinner Ag layer has better optoelectronic performance than ZnO/Cu/ZnO.
Key words:  transparent conductive film    powder target    RF magnetron sputtering    thin-film photovoltaics
出版日期:  2022-03-25      发布日期:  2022-03-21
ZTFLH:  0484.4  
  TM24  
基金资助: 国家自然科学基金(51672119;51972155)
通讯作者:  zhouyanwen@ustl.edu.cn   
作者简介:  李彤,2012年于辽宁科技大学获得学士学位,现为辽宁科技大学化工学院博士研究生,主要从事透明导电薄膜材料制备及性能方面的研究。
周艳文,1988年于东北大学金属物理专业获得学士学位,2005年于英国索尔福德大学获得博士学位。现任辽宁科技大学化工学院教授、博士研究生导师。主要从事薄膜材料制备及应用方面的研究。先后获批4项国家自然科学基金面上项目,发表 SCI、EI 检索论文50余篇,获专利授权10余项。
引用本文:    
李彤, 赵卓, 武俊生, 方方, 周艳文. 粉末靶磁控溅射ZnO/Cu/ZnO的制备及表征[J]. 材料导报, 2022, 36(6): 20120259-4.
LI Tong, ZHAO Zhuo, WU Junsheng, FANG Fang, ZHOU Yanwen. Fabrication and Characterization of the ZnO/Cu/ZnO by Magnetron Sputtering Using Powder Targets. Materials Reports, 2022, 36(6): 20120259-4.
链接本文:  
http://www.mater-rep.com/CN/10.11896/cldb.20120259  或          http://www.mater-rep.com/CN/Y2022/V36/I6/20120259
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