不同B/C摩尔比碳化硼薄膜的光学性能

doi:10.11896/cldb.20040077

材料导报

2021, Vol. 35

Issue (2): 2006-2011 https://doi.org/10.11896/cldb.20040077

无机非金属及其复合材料

不同B/C摩尔比碳化硼薄膜的光学性能

郦其乐^1,2, 杨勇¹, 魏玉全^1,2, 刘盟¹, 周洪军³, 霍同林³, 黄政仁¹

1 中国科学院上海硅酸盐研究所,上海 200050;
2 中国科学院大学,北京 100049;
3 中国科学技术大学,国家同步辐射实验室,合肥 230029

Optical Properties of Boron Carbide Thin Films with Different B/C Molar Ratio

LI Qile^1,2, YANG Yong¹, WEI Yuquan^1,2, LIU Meng¹, ZHOU Hongjun³, HUO Tonglin³, HUANG Zhengren¹

1 Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China;
2 University of Chinese Academy of Sciences, Beijing 100049, China

摘要
参考文献
相关文章
推荐阅读
Metrics

下载:

全文 ( PDF ) ( 4744KB )
输出: BibTeX | EndNote (RIS)

摘要多层膜反射镜是X射线波段和极紫外波段的重要光学部件。碳化硼作为常见的反射膜材料,其薄膜成分及光学常数计算的准确性对反射镜的反射性能具有明显影响。本研究使用直流磁控溅射技术制备碳化硼薄膜,利用X射线光电子能谱(XPS)、X射线全反射(XRR)、原子力显微镜(AFM)和同步辐射光源等对试样进行了表征,利用改进的拟合函数拟合了基底和薄膜的反射率曲线。结果表明,非晶碳化硼薄膜的元素化学状态相同,其基本成分包含碳化硼和含氧碳化硼;在5~45 nm波段,薄膜B/C摩尔比为4.23时,反射性能最好,同时其基底与薄膜的电子密度差值最大,试样反射性能变化与试样电子密度差值变化基本一致;与原始拟合函数相比,改进的拟合函数提高了薄膜光学常数计算的准确性。

	服务
	把本文推荐给朋友
	加入引用管理器
	E-mail Alert
	RSS
	作者相关文章
	郦其乐
	杨勇
	魏玉全
	刘盟
	周洪军
	霍同林
	黄政仁

关键词: 碳化硼磁控溅射反射电子密度光学常数

Abstract: Multilayer mirrors are essential optical components in X-ray and extreme ultraviolet regions. As a common reflective coating material, the composition of boron carbide thin film and the accuracy of the optical constants calculation have great effect on the reflection performance of the mirror. Boron carbide thin films were grown with DC magnetron sputtering and characterized by XPS, XRR, AFM, synchrotron radiation, et al. The reflectance curves of the substrate and the film were fitted with the improved curve fitting function. Results show that amorphous boron carbide thin films consist of boron carbide and oxy-boron carbide, the chemical states of the elements are the same. Sample with B/C molar ratio of 4.23 shows the best reflection performance in the wavelength range from 5 nm to 45 nm, and it has the largest value of the electronic density difference between the substrate and the film. The change of the reflection property is basically the same as that of the electronic density diffe-rence of the samples. Compared with the original fitting function, the improved fitting function improves the accuracy of the optical constants calculation.

Key words: boron carbide magnetron sputtering reflection electron density optical constant

出版日期: 2021-01-25 发布日期: 2021-01-28

ZTFLH:

O484

基金资助: 国家重点研发计划(2017YFB0310600)

通讯作者: yangyong@mail.sic.ac.cn; zhrhuang@mail.sic.ac.cn

作者简介: 郦其乐,中国科学院上海硅酸盐研究所硕士研究生,研究方向为磁控溅射碳化硼薄膜在X射线和极紫外波段的光学性能。
杨勇,中国科学院上海硅酸盐研究所高性能陶瓷和超微结构国家重点实验室研究员,博士研究生导师。研究方向为:(1)用于能源和环境的纳米材料与纳米传感器件,包括贵金属和半导体纳米材料以及结构的设计和制备,纳米材料的光学和催化特性研究;(2)光学薄膜及其应用;(3)陶瓷及无机材料表面改性。主持研制了国内第一套太空激光雷达用碳化硅光学部件,研发的陶瓷表面改性和光学镀膜技术已经成功应用于北斗导航及实践17号卫星。迄今已在国内外学术刊物如Advanced Science, npj Computational Materials, Nano Energy等刊物上发表SCI收录论文100多篇。作为课题负责人承担国家自然科学基金、国家重点研发计划和北斗导航激光通信光学器件等重大项目,以及上海市浦江人才计划等项目,并主持和参与多项国防军工科研项目。
黄政仁,中国科学院上海硅酸盐研究所高性能陶瓷和超微结构国家重点实验室研究员,博士研究生导师。重点开展先进结构陶瓷材料的组成、结构、应力设计和制备科学等方面的研究。在碳化物、氧化物复相陶瓷和陶瓷基复合材料的强化与增韧、非氧化物陶瓷湿法成型、非氧化物纳米粉体和金属-陶瓷纳米复合粉体制备及性能研究等方面取得了一系列重要研究成果和创新性制备工艺技术;在陶瓷部件先进成形、制备技术研究,先进陶瓷材料的表面改性技术研究,陶瓷材料的连接技术研究,陶瓷材料和部件的无损检测技术研究,超高温陶瓷材料研究等方面取得了重要突破性进展。主持和完成了国家自然科学基金、863、973项目、各类国家重点项目、中科院知识创新方向性项目、上海市基础研究项目、上海市科技攻关项目等重要科研项目近30项。

引用本文:

郦其乐, 杨勇, 魏玉全, 刘盟, 周洪军, 霍同林, 黄政仁. 不同B/C摩尔比碳化硼薄膜的光学性能[J]. 材料导报, 2021, 35(2): 2006-2011.
LI Qile, YANG Yong, WEI Yuquan, LIU Meng, ZHOU Hongjun, HUO Tonglin, HUANG Zhengren. Optical Properties of Boron Carbide Thin Films with Different B/C Molar Ratio. Materials Reports, 2021, 35(2): 2006-2011.

链接本文:

http://www.mater-rep.com/CN/10.11896/cldb.20040077 或 http://www.mater-rep.com/CN/Y2021/V35/I2/2006

1 Wang Z S, Cao J L, Michette A G. Optics Communications, 2000, 177(1-6),25.
2 Kim C K, Park Y S, Han S J, et al. Journal of Chemical Engineering, 2015, 32(10), 2124.
3 Spiller E. Applied Physics Letters, 1972, 20(9), 365.
4 Bute A, Jena S, Bhattacharya D, et al. Materials Research Bulletin, 2019, 109, 175.
5 Yanagihara M, Cao J, Yamamoto M, et al. Review of Scientific Instruments, 1989, 60(7), 2014.
6 Yao Y W, Kunieda H, Matsumoto H, et al. Applied Optics, 2013, 52(27), 6824.
7 Carrard M, Emin D, Zuppiroli L. Physical Review B, 1995, 51(17), 11270.
8 Bouchacourt M, Thevenot F. Journal of the Less-Common Metals, 1981, 82(1-2), 227.
9 Aquila A, Sobierajski R, Ozkan C, et al. Applied Physics Letters, 2015, 106(24), 241905-1.
10 Pradhan P C, Majhi A, Nayak M. Journal of Applied Physics, 2018, 123(9), 095302-1.
11 Pivovaroff M J, Bionta R M, Mccarville T J, et al. In: Conference Record of the Conference on Advances in X-Ray/EUV Optics and Components II. San Diego, 2007, 6705, 67050O-1.
12 Rao P N, Gupta R K, Saravanan K, et al. Surface & Coatings Technology, 2018, 334, 536.
13 Monaco G, Garoli D, Frison R, et al. In: Conference Record of the Conference on Advances in X-Ray/EUV Optics, Components and Applications. San Diego, 2006, 6317, 631712-1.
14 Zemsky D, Shneck R, Dagdigian P J, et al. Journal of Applied Physics, 2007, 102(10), 104309-1.
15 Schmidt S, Hoglund C, Jensen J, et al. Journal of Materials Science, 2016, 51(23), 10418.
16 Cao J L, Yanagihara M, Yamamoto M, et al. Applied Optics, 1994, 33(10), 2013.
17 Yang Y, Zhang J W, Fu C L, et al. Materials & Design, 2016, 107, 1.
18 Comisso A, Nardello M, Giglia A, et al. Optical Engineering, 2016, 55(9), 095102-1.
19 Jacobsohn L G, Schulze R K, Da C M, et al. Surface Science, 2004, 572(2-3), 418.
20 Zhou M J, Wong S F, Ong C W, et al. Thin Solid Films, 2007, 516(2-4), 336.
21 Shirai K, Emura S, Gonda S I, et al. Journal of Applied Physics, 1995, 78(5), 3392.
22 Bao R Q, Chrisey D B. Thin Solid Films, 2010, 519(1), 164.
23 Evans B L, Aldabbagh J, Kent B J. Journal of Modern Optics, 1989, 36(4), 471.

[1]	叶帆, 马壮, 高丽红, 李文智, 马琛. 成分与致密度对陶瓷材料近红外反射率影响的数值模拟[J]. 材料导报, 2020, 34(6): 6049-6056.
[2]	余登德, 张仁耀, 沈月, 闻明, 刘洪喜1,. 混合表面纳米化制备钛表面Ru/Ti薄膜的结构及耐蚀性能[J]. 材料导报, 2020, 34(24): 24086-24091.
[3]	蒋招绣, 高光发. 碳化硼陶瓷的力学特性和破坏行为研究进展[J]. 材料导报, 2020, 34(23): 23064-23073.
[4]	吴珊妮, 赵远, 姜宏, 文峰, 熊春荣. 具有优良隔热和力学性能的低热导率W/Al₂O₃纳米多层功能膜的构建[J]. 材料导报, 2020, 34(2): 2023-2028.
[5]	汪国军, 白煜, 胡少杰, 张敏, 王书蓓, 万飞. 退火工艺对磁控溅射生长的Pt薄膜微观结构及电性能的影响[J]. 材料导报, 2019, 33(Z2): 56-60.
[6]	赵笑昆, 李博研, 张增光. 磁控溅射沉积制备Al掺杂ZnO薄膜的棒状晶粒生长[J]. 材料导报, 2019, 33(z1): 112-115.
[7]	龙亮, 刘炳刚, 罗昊, 鲜亚疆. 碳化硼的研究进展[J]. 材料导报, 2019, 33(z1): 184-190.
[8]	周超, 李得天, 周晖, 张凯锋, 曹生珠. MEMS器件真空封装用非蒸散型吸气剂薄膜研究概述[J]. 材料导报, 2019, 33(3): 438-443.
[9]	季鑫, 张朝民. CIGS叠层太阳能电池的中间层及稳定性的研究进展[J]. 材料导报, 2019, 33(23): 3915-3920.
[10]	林昇华, 张景, 艾玲, 鲁越晖, 王林军, 宋伟杰. 光伏玻璃减反射膜的研究进展[J]. 材料导报, 2019, 33(21): 3588-3595.
[11]	杨秀钰, 陈诺夫, 张航, 陶泉丽, 徐甲然, 陈梦, 陈吉堃. 对非晶硅薄膜进行快速磷扩散以获得本征薄层异质结[J]. 材料导报, 2019, 33(20): 3353-3357.
[12]	曹雷刚, 王晓荷, 崔岩, 杨越, 刘园. 碳化硼粒度对无压浸渗高体分铝基复合材料微观组织和力学性能的影响[J]. 材料导报, 2019, 33(20): 3472-3476.
[13]	种小川,肖国庆,丁冬海,白冰. 碳化硼粉体合成方法的研究进展[J]. 材料导报, 2019, 33(15): 2524-2531.
[14]	孙科学, 常月欣, 成谢锋. xBiInO₃-(1-x)PbTiO₃薄膜的横向压电特性[J]. 材料导报, 2019, 33(14): 2299-2304.
[15]	白园蕊, 马建中, 刘俊莉, 鲍艳, 崔万照, 胡天存, 吴朵朵. 基于胶体晶体构筑银纳米薄膜及其抑制微放电性能研究[J]. 《材料导报》期刊社, 2018, 32(4): 515-519.

[1]	Bingwei LUO,Dabo LIU,Fei LUO,Ye TIAN,Dongsheng CHEN,Haitao ZHOU. Research on the Two Typical Infrared Detection Materials Serving at Low Temperatures: a Review[J]. Materials Reports, 2018, 32(3): 398 -404 .
[2]	Huimin PAN,Jun FU,Qingxin ZHAO. Sulfate Attack Resistance of Concrete Subjected to Disturbance in Hardening Stage[J]. Materials Reports, 2018, 32(2): 282 -287 .
[3]	Xu LI,Ziru WANG,Li YANG,Zhendong ZHANG,Youting ZHANG,Yifan DU. Synthesis and Performance of Magnetic Oil Absorption Material with Rice Chaff Support[J]. Materials Reports, 2018, 32(2): 219 -222 .
[4]	XU Zhichao, FENG Zhongxue, SHI Qingnan, YANG Yingxiang, WANG Xiaoqi, QI Huarong. Microstructure of the LPSO Phase in Mg_98.5Zn_0.5Y₁ Alloy Prepared by Directional Solidification and Its Effect on Electromagnetic Shielding Performance[J]. Materials Reports, 2018, 32(6): 865 -869 .
[5]	WANG Tong, BAO Yan. Advances on Functional Polyacrylate/Inorganic Nanocomposite Latex for Leather Finishing[J]. Materials Reports, 2017, 31(1): 64 -71 .
[6]	HUANG Dajian, MA Zonghong, MA Chenyang, WANG Xinwei. Preparation and Properties of Gelatin/Chitosan Composite Films Enhanced by Chitin Nanofiber[J]. Materials Reports, 2017, 31(8): 21 -24 .
[7]	DU Wenbo, YAO Zhengjun, TAO Xuewei, LUO Xixi. High-temperature Anti-oxidation Property of Al₂O₃ Gradient Composite Coatings on TC11 Alloys[J]. Materials Reports, 2017, 31(14): 57 -60 .
[8]	ZHANG Le, ZHOU Tianyuan, CHEN Hao, YANG Hao, ZHANG Qitu, SONG Bo, WONG Chingping. Advances in Transparent Nd∶YAG Laser Ceramics[J]. Materials Reports, 2017, 31(13): 41 -50 .
[9]	ZHANG Yating, REN Shaozhao, DANG Yongqiang, LIU Guoyang, LI Keke, ZHOU Anning, QIU Jieshan. Electrochemical Capacitive Properties of Coal-based Three-dimensional Graphene Electrode in Different Electrolytes[J]. Materials Reports, 2017, 31(16): 1 -5 .
[10]	CHEN Bida, GAN Guisheng, WU Yiping, OU Yanjie. Advances in Persistence Phosphors Activated by Blue-light[J]. Materials Reports, 2017, 31(21): 37 -45 .

Viewed

Full text

Abstract

Cited

Shared

Discussed