Effects of Oxygen Flow Rate and Sintering Holding Time on the Phase Content and Resistivity of ITO Target
CHI Minghao1, WENG Weixiang2, LI Qiang1
1 School of Materials Science and Engineering, University of Fuzhou, Fuzhou 350100, China 2 College of Physics and Information Engineering, University of Fuzhou, Fuzhou 350100, China
Abstract: The ITO target was prepared by the grouting method at different sintering parameters, and the effects of different oxygen flow and sintering holding time on the phase content and resistivity of the ITO target were studied. The phase composition and microstructure morphology of the ITO target were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM), and the XRD data of the sample was refined by the Rietveld method to calculate its phase content. The results show that the targets are composed of In2O3 phase and In4Sn3O12 phase. When the oxygen flow increases from 40 L/min to 160 L/min, the In4Sn3O12 phase content gradually increases from 19.82wt% to 25.83wt%. When the holding time increases from 6 h to 12 h, the In4Sn3O12 phase content gradually increased from 19.79wt% to 31.27wt%. The relative density and resistivity of samples prepared under different oxygen flow and sintering holding time were measured. The results showed that the target density is the most important factor affecting its resistivity, and the resistivity of the target decreases as the density increases. When the density of the target is similar, the phase content of the target influence its electrical performance. At this time, the resistivity of the target increases as the second phase increases.
池铭浩, 翁卫祥, 李强. 氧气流量及烧结保温时间对ITO靶材的相含量与电阻率的影响[J]. 材料导报, 2022, 36(5): 20120167-5.
CHI Minghao, WENG Weixiang, LI Qiang. Effects of Oxygen Flow Rate and Sintering Holding Time on the Phase Content and Resistivity of ITO Target. Materials Reports, 2022, 36(5): 20120167-5.
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2022, Vol. 36 
