Research Progress on Preparation, Properties and Application of Precious Metal Ruthenium
ZHANG Renyao, GUO Junmei, WEN Ming, GUAN Weiming
State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Kunming Institute of Precious Metals, Kunming 650106, China
Abstract: Ruthenium (Ru),precious metal, is widely used in modern industry. In present paper, the preparation methods of Ru bulk materials are introduced firstly. Moreover, the plasticity, machinability, and influence factors are analyzed. The X-ray diffraction used to measure the internal stress is presented. Secondly, the preparation methods of Ru thin films are reviewed. We also present the application of Ru films such as the bonding layer/diffusion barrier layer for copper in integrated circuits, the intermediate layer/seed layer in magnetic recording media, anti-oxidation protective layer materials and electrical contact materials, etc. In the end, the present research shortcomings of Ru are summarized and a vision of its future research trends is made.
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2021, Vol. 35 
