Microstructure of the Second Phase In4Sn3O12 and Its Effect on Properties ofITO Target Materials
XIE Bin1, YANG Shuo1, WANG Weining2, XI Yulin1
1 Luoyang Ship Material Research Institute, Luoyang 471023, China; 2 School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China
Abstract: ITO target materials with different SnO2 content were prepared by injection molding using self-made nano ITO gasification powder as raw mate-rial. The target materials with 10% (mass fraction) SnO2 content were sintered at different sintering temperatures. The microstuctuer of ITO target materials with different SnO2 content and the quantity, morphology and distribution of the second phase in the target materials were analyzed by SEM. The results show that at the sintering temperature of 1 575 ℃, with the increased SnO2 content, the target grains were refined, and the number of the second phase at the intersection of grain boundaries was significantly increased; as the sintering temperature increased to 1 600 ℃, the second phase at the boundary decomposed and transfered to the parent phase. The target with 10% SnO2 content sintered at 1 575 ℃ was corroded by aqua regia to extract the second phase. The composition, phase structure and thermogravimetry of the second phase were analyzed by EDS, XRD, TEM and TGA. The research indicates that the second phase formed at the intersection of grain boundary of ITO target with 10% SnO2 content is the hexagonal In4Sn3O12 phase, and the oxygen content of target is related to In4Sn3O12. Based on the analysis of density, resistivity and thermal diffusivity of ITO target with different SnO2 content, the influence of the second phase on the target performance was indirectly studied. It was found that the increase of SnO2 content was beneficial to the increase of target density, while the increase of target resistivity, the increase of oxygen content and the decrease of thermal diffusivity.
谢斌, 杨硕, 王伟宁, 郗雨林. ITO靶材第二相In4Sn3O12的结构及其对靶材性能的影响[J]. 材料导报, 2020, 34(Z1): 29-33.
XIE Bin, YANG Shuo, WANG Weining, XI Yulin. Microstructure of the Second Phase In4Sn3O12 and Its Effect on Properties ofITO Target Materials. Materials Reports, 2020, 34(Z1): 29-33.
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2020, Vol. 34 
