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材料导报  2018, Vol. 32 Issue (18): 3104-3109    https://doi.org/10.11896/j.issn.1005-023X.2018.18.002
  无机非金属及其复合材料 |
微应变诱导各向异性硅纳米晶形成及其光学特性
畅庚榕1, 刘明霞1, 马飞2, 徐可为1,2
1 西安文理学院陕西省再制造与表面工程技术重点实验室,西安 710065;
2 西安交通大学金属材料强度国家重点实验室,西安 710049
Formation of Microstrain-induced Anisotropic Silicon Nanostructure andIts Optical Property
CHANG Gengrong1, LIU Mingxia1, MA Fei2, XU Kewei1,2
1 Provincial Key Laboratory for Surface Engineering and Remanufacturing, Xi’an University, Xi’an 710065;
2 State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049
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摘要 通过磁控溅射技术制备了非晶态富硅的碳化硅锗(Si1-x-yGexCy)薄膜,经过后续高温热处理,形成各向异性硅纳米晶,其微结构和光学特性由高分辨电镜、光致发光及光吸收实验进行表征,研究了各向异性应变对硅纳米晶形态和光学特性的影响,阐述了各向异性硅纳米晶的形成机理。研究表明,在各向异性应变能的诱导下硅纳米晶沿着〈002〉、〈113〉和〈220〉取向择优生长,形成具有多形态的硅纳米晶,显著改变了其能级结构,在2.57 eV和2.64 eV的位置硅纳米晶存在PL发射光谱,光吸收波段明显增加,可以同时吸收从红外到紫外(2.57 eV,1.89 eV,1.2 eV和0.96 eV)的光子,且光吸收范围随硅锗(RS/G)比例可调,故有望提高光伏电池的光量子产额。
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畅庚榕
刘明霞
马飞
徐可为
关键词:  硅纳米晶  各向异性  微观结构  光致发光  光伏电池    
Abstract: Anisotropic silicon nanocrystals (Si Ncs) in amorphous Si1-x-yGexCy thin films were obtained by magnetron sputtering deposition and post-annealing process at high temperature. The microstructure and optical properties of anisotropic Si Ncs were analysed by high-resolution transmission electron microscopy, photoluminescence (PL) and UV-visible absorption. The morphology and optical properties were studied in this article, and the formation mechanism stated. The results showed that Si QDs preferentially grow along the directions with the lower strain energy, such as, 〈002〉, 〈113〉 and 〈220〉, forming polymorphic structures. The polymorphic characteristics affected the energy level configuration as indicated by a blue shift. There were two PL spectrums at 2.57 eV and 2.64 eV. UV-visible absorption measurements revealed an enhanced absorption in the energy range of 2.57 eV, 1.89 eV, 1.2 eV and 0.96 eV, which can be adjusted by changing RS/G. That was expected to improve the amount of light quantum yield of photovoltaic cell.
Key words:  silicon nanocrystals    anisotropy    microstructure    photoluminescence    photovoltaic cell
                    发布日期:  2018-10-18
ZTFLH:  TB321  
  O765  
基金资助: 陕西省教育厅项目(16JK2201;16JK2198);西安市科技计划项目(2017CGWL09;2016CXWL27;2017CGWL14)
作者简介:  畅庚榕:女,1979年生,博士,主要从事硅纳米晶生长、增材制造技术等研究 E-mail:gr_chang@163.com
引用本文:    
畅庚榕, 刘明霞, 马飞, 徐可为. 微应变诱导各向异性硅纳米晶形成及其光学特性[J]. 材料导报, 2018, 32(18): 3104-3109.
CHANG Gengrong, LIU Mingxia, MA Fei, XU Kewei. Formation of Microstrain-induced Anisotropic Silicon Nanostructure andIts Optical Property. Materials Reports, 2018, 32(18): 3104-3109.
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http://www.mater-rep.com/CN/10.11896/j.issn.1005-023X.2018.18.002  或          http://www.mater-rep.com/CN/Y2018/V32/I18/3104
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