底部保温结构对大尺寸蓝宝石晶体生长影响的数值模拟及实验研究

材料导报

2019, Vol. 33

Issue (z1): 37-40

无机非金属及其复合材料

底部保温结构对大尺寸蓝宝石晶体生长影响的数值模拟及实验研究

于海群^1,2

1 浙江昀丰新材料科技股份有限公司,金华 321015
2 上海昀丰光电技术有限公司,上海 201201

Simulation and Experimental Research on the Effect of Bottom Shield Structure on the Large-size Sapphire Crystal Growth

YU Haiqun^1,2

1 Zhejiang Yunfeng New Material Technology Co., Ltd., Jinhua 321015
2 Shanghai Yunfeng Optoelectronictech Co., Ltd., Shanghai 201201

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摘要底部保温结构决定了坩埚底部径向温差的大小,底部径向温差的大小决定了晶体收尾生长的形态,合适的底部径向温差可以保证良好的晶体收尾生长,抑制界面翻转。利用CFD软件模拟底部保温结构对长晶功率、坩埚底部径向温差及界面凸出度的影响。结果表明,利用分体式底部保温结构,在扩肩及收尾阶段均可以获得最小的长晶功率、最大的底部径向温差、最大的晶体界面凸出度。依据优化的结果,采用分体式底部保温结构进行长晶实验,生长出的晶体底部表面呈现年轮状,晶体品质良好。

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关键词: 蓝宝石保温屏数值模拟实验研究

Abstract: The radial temperature difference at the bottom of crucible is determined by the bottom shield structure. The morphology of crystal tailing growth is determined by the radial temperature difference at the bottom of crucible. The suitable radial temperature difference at the bottom of crucible can ensure good crystal tail growth and inhibit interface inversion. CFD software was used to simulate the effects of different bottom shield structure on the crystal power, the radial temperature difference at the bottom of crucible and the convexity. The results show that the smallest crystal power, the largest radial temperature difference at the bottom and the largest convexity can be obtained by using the splitting bottom shield structure whenever the shouldering and the tailing stage. According to the optimized results, the splitting bottom shield structure was used to carry out the experiment of crystal growth. The bottom surface of the crystal showed annual rings and the crystal quality was good.

Key words: sapphire heat shield numerical simulation experimental research

出版日期: 2019-05-25 发布日期: 2019-07-05

ZTFLH:

O78

作者简介: 于海群,上海昀丰光电技术有限公司,中级工程师。2012年6月毕业于江苏大学,工学博士,同年加入上海昀丰光电技术有限公司至今。主要从事蓝宝石晶体生长的热场设计及长晶工艺研发。在国内外重要期刊发表文章10多篇,申报发明专利10余项。hiqun@sina.cn

引用本文:

于海群. 底部保温结构对大尺寸蓝宝石晶体生长影响的数值模拟及实验研究[J]. 材料导报, 2019, 33(z1): 37-40.
YU Haiqun. Simulation and Experimental Research on the Effect of Bottom Shield Structure on the Large-size Sapphire Crystal Growth. Materials Reports, 2019, 33(z1): 37-40.

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http://www.mater-rep.com/CN/ 或 http://www.mater-rep.com/CN/Y2019/V33/Iz1/37

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