Research Progress of the Novel Ultra-precision Polishing Techniques and Composite Polishing Techniques for Sapphire Material Processing
HU Yangxuan1,2, DENG Zhaohui1,2, WAN Linlin1,2, LI Min1,2
1 Hunan Provincial Key Laboratory of High Efficiency and Precision Machining of Difficult-to-Cut Material, Hunan University of Science and Technology, Xiangtan 411201; 2 Intelligent ManufacturingInstitute of Hunan University of Science and Technology, Xiangtan 411201
Abstract: Ultra-precision polishing is a process that reduces surface roughness and achieves high surface quality and surface integrity. Sapphire is a typical hard and brittle materials with poor processability, and thereby the traditional polishing techniques are prone to cause damage such as surface fragmentation and surface scratches uncontrollable quality fluctuation, as well as low proces-sing efficiency. This paper summarizes the principles and characteristics and research status of the techniques of magnetorheological polishing, hydration polishing, chemical mechanical polishing and laser polishing which apply to sapphire materials and analyzes the advantages and disadvantages of each polishing technique from the perspectives of surface quality, polishing agent and polishing liquid, efficiency and cost. We also introduce the development of the composite polishing techniques for sapphire material, and outline the future prospect of the ultra-precision polishing techniques for sapphire material.
胡扬轩,邓朝晖,万林林,李 敏. 用于蓝宝石材料加工的新型超精密抛光技术及复合抛光技术研究进展[J]. 《材料导报》期刊社, 2018, 32(9): 1452-1458.
HU Yangxuan, DENG Zhaohui, WAN Linlin, LI Min. Research Progress of the Novel Ultra-precision Polishing Techniques and Composite Polishing Techniques for Sapphire Material Processing. Materials Reports, 2018, 32(9): 1452-1458.
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2018, Vol. 32 
