xBiInO3-(1-x)PbTiO3薄膜的横向压电特性

doi:10.11896/cldb.18060105

材料导报

2019, Vol. 33

Issue (14): 2299-2304 https://doi.org/10.11896/cldb.18060105

无机非金属及其复合材料

xBiInO₃-(1-x)PbTiO₃薄膜的横向压电特性

孙科学^1,2, 常月欣¹, 成谢锋^1,2

1 南京邮电大学电子与光学工程学院,南京 210023;
2 江苏省射频集成与微组装工程实验室, 南京 210023

Transverse Piezoelectric Properties of xBiInO₃-(1-x)PbTiO₃ Thin Films

SUN Kexue^1,2, CHANG Yuexin¹, CHENG Xiefeng^1,2

1 College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023;
2 Jiangsu Province Engineering Laboratory of RF Integration & Micropackage, Nanjing 210023

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摘要近年来,压电薄膜在表面声波及压电器件等领域的应用得到了广泛关注和研究。有效横向压电系数(e31,f)是压电薄膜材料的一个重要性能指标,本工作重点研究xBiInO₃-(1-x)PbTiO₃ 薄膜的有效横向压电系数。在优化xBiInO₃-(1-x)PbTiO₃薄膜的基础上,通过多层悬臂梁研究xBiInO₃-(1-x)PbTiO₃薄膜的有效横向压电系数,当压电薄膜悬臂梁在交变电压作用下产生弯曲振动时,利用激光多普勒测振仪测量多层悬臂梁自由端的振动振幅,并根据悬臂梁法评估横向压电系数的基本原理,计算薄膜的有效横向压电系数,进而研究xBiInO₃-(1-x)PbTiO₃薄膜的横向压电性能。通过调控La的掺量,可优化压电薄膜的性能。

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关键词: 射频磁控溅射沉积薄膜有效横向压电特性悬臂梁

Abstract: In recent years, the application of piezoelectric films in surface acoustic waves and piezoelectric devices has received extensive attention and research. This paper focuses on the transverse piezoelectric properties of La doping xBiInO₃-(1-x)PbTiO₃ thin films. The effective transverse piezoelectricities of xBiInO₃-(1-x)PbTiO₃ films were studied experimentally by multilayer cantilevers. Under the applied sinusoidal voltage, the tip vibration amplitudes of the xBiInO₃-(1-x)PbTiO₃ multilayer cantilevers were measured experimentally by laser Doppler vibrometer, and the effective transverse piezoelectric coefficients of the films with different x and La doping can be evaluated according to the theory of Euler-Bernoulli cantilever and piezoelectric equations. Therefore, the optimized properties of the films can be obtained by properly controlling La doping contents.

Key words: RF magnetron sputtering deposition thin films effective transverse piezoelectricity cantilever

发布日期: 2019-06-19

ZTFLH:	TB34
	TB79
	O426.4

基金资助: 国家自然科学基金(11304160);南京邮电大学自然科学基金(NY215111)

通讯作者: sunkx@njupt.edu.cn

作者简介: 孙科学,博士,硕士生导师,南京邮电大学副教授。2018年在南京大学物理学院声学所获得博士学位。从事模拟电子技术、数字电路与系统、FPGA技术与应用、电工电子实验、光电信息材料与器件等方面的教学和研究工作。作为研究人员主持和参与完成了国家自然科学基金,江苏省高校自然科学基金面上项目等纵向课题10余项,在国际国内学术刊物和学术会议上发表论文50余篇,申请国家发明专利12项,其中授权3项。

引用本文:

孙科学, 常月欣, 成谢锋. xBiInO₃-(1-x)PbTiO₃薄膜的横向压电特性[J]. 材料导报, 2019, 33(14): 2299-2304.
SUN Kexue, CHANG Yuexin, CHENG Xiefeng. Transverse Piezoelectric Properties of xBiInO₃-(1-x)PbTiO₃ Thin Films. Materials Reports, 2019, 33(14): 2299-2304.

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http://www.mater-rep.com/CN/10.11896/cldb.18060105 或 http://www.mater-rep.com/CN/Y2019/V33/I14/2299

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