磁控溅射沉积制备Al掺杂ZnO薄膜的棒状晶粒生长

材料导报

2019, Vol. 33

Issue (z1): 112-115

无机非金属及其复合材料

磁控溅射沉积制备Al掺杂ZnO薄膜的棒状晶粒生长

赵笑昆^1,2, 李博研^1,2, 张增光^1,2

1 神华(北京)光伏科技研发有限公司,北京 102211
2 北京市纳米结构薄膜太阳能电池工程技术研究中心,北京 102211

Rod-like Grain Growth in Al-doped ZnO Thin Films Deposited by RF Magnetron Sputtering

ZHAO Xiaokun^1,2, LI Boyan^1,2, ZHANG Zengguang^1,2

1 NICE Solar Energy Ltd, Beijing 102211
2 Beijing Engineering Research Center of Nano-structured Thin Film Solar Cell, Beijing 102211

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摘要 Al掺杂ZnO (AZO)薄膜由于电导率高、光学透过率高、原料储量丰富、成本低廉而成为最具潜力的透明导电薄膜。本实验采用射频磁控溅射法沉积制备了30 cm×30 cm 的AZO薄膜,研究了溅射压强对晶体结构、微观结构、电学和光学性能的影响,实现微观结构和性能的调节。结果表明,溅射压强增大,薄膜沉积速率降低,晶体c轴择优取向生长变弱,晶粒尺寸变大且存在长度大于100 nm的棒状晶粒。0.933 Pa时薄膜电阻率降至最低(1.01×10^-3 Ω·cm),可见光透过率为79.7%,禁带宽度E_g=3.82 eV,有利于透明导电膜的应用。

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关键词: Al掺杂ZnO 射频磁控溅射压强晶粒生长

Abstract: Al-doped ZnO (AZO) has been considered to be one of the most potential transparent conductive oxide (TCO) films due to its high conductivity, light transmittance, abundant and low cost feature. The 30 cm×30 cm AZO films were deposited by RF magnetron sputtering in this work. The influence of working pressure on the phase structure, microstructure, electrical properties as well as optical properties of AZO films were studied, and the modification of the microstructure and properties were achieved. The film deposition rate was lowered by increasing the working pressure. The c-axis orientation preferred grain growth was weakened by increasing the working pressure. The grain size grown up by increasing the working pressure and rod-like grain growth appeared with a length of >100 nm. The minimum resistivity of 1.01×10^-3 Ω·cm was achieved at 0.933 Pa, the corresponding average transmittance and E_g were 79.7% and 3.82 eV. The AZO films in this work were beneficial to the TCO application.

Key words: Al-doped ZnO RF magnetron sputtering working pressure grain growth

出版日期: 2019-05-25 发布日期: 2019-07-05

ZTFLH:

TB34

基金资助: 国家重点研发计划项目(2018YFB1500200);北京市科技计划项目(Z181100005118003)

作者简介: 赵笑昆,博士,工程师,国家能源投资集团下属神华(北京)光伏科技研发有限公司。2009年6月毕业于中国地质大学(北京)材料科学与工程专业,获得学士学位。2014年6月毕业于北京科技大学材料科学与工程专业,获得工学博士学位。目前主要研究领域为功能材料、新能源材料。李博研,博士,神华(北京)光伏科技研发有限公司,研发部经理。2012年毕业于南开大学,微电子学与固体电子学专业,获得工学博士学位。目前主要研究领域为薄膜光伏技术,liboyan@nicenergy.com。张增光,博士,工程师,神华(北京)光伏科技研发有限公司。2011年1月毕业于中国科学院研究生院,物理化学专业,获得理学博士学位。现从事铜铟镓硒薄膜太阳能电池研发与应用相关工作。

引用本文:

赵笑昆, 李博研, 张增光. 磁控溅射沉积制备Al掺杂ZnO薄膜的棒状晶粒生长[J]. 材料导报, 2019, 33(z1): 112-115.
ZHAO Xiaokun, LI Boyan, ZHANG Zengguang. Rod-like Grain Growth in Al-doped ZnO Thin Films Deposited by RF Magnetron Sputtering. Materials Reports, 2019, 33(z1): 112-115.

链接本文:

http://www.mater-rep.com/CN/ 或 http://www.mater-rep.com/CN/Y2019/V33/Iz1/112

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