Abstract: Quartz glass microfluidic chips have broad application prospects in the fields of medical diagnosis, biochemical analysis and drug screening. The processing quality of high-performance quartz microchannel directly determines the performance of microfluidic chips. In this work, the ultrasonic vibration grinding technology was used to process the quartz glass microchannel efficiently and precisely. First, the effects of the spindle speed N, feed speed vf, grinding depth ap and the ultrasonic power P on the surface quality and shape accuracy of the microchannel were studied. Then the ultrasonic vibration grinding process parameters were optimized. Finally, the water flow resistance of the microchannel was tested to study the influences of the hydraulic diameter of the microchannel on flow resistance characteristics. The experimental results of ultraso-nic vibration grinding show that the surface roughness Ra of the quartz glass microchannel can reach a minimum value of 0.191 μm, the shape accuracy RMS value and PV value can reach 3.332 μm and 23.783 μm, respectively. The surface morphology of microchannel is integrated with smooth bottom microscopic surface and regular edges without obvious breakage. The experimental results of the fluidity test show that the frictio-nal resistance coefficient of the flow in the quartz glass microchannel decreases with the increase of Reynolds number and hydraulic diameter. Therefore, when designing the microchannel, a larger hydraulic diameter should be selected and the flow rate should be appropriately increased.
通讯作者:
*鲁艳军,深圳大学机电与控制工程学院副研究员、硕士研究生导师。本科和硕士就读于武汉工程大学机电工程学院,2015年6月在华南理工大学机械制造及其自动化专业取得博士学位。主要研究方向为精密/超精密加工工艺与装备、磨削加工、微纳结构加工及应用。主持和完成国家自然科学基金、中国博士后科学基金、广东省科技计划项目、深圳市国际科技合作项目、企业横向项目等15项,在International Journal of Machine Tools and Manufacture、《机械工程学报》等期刊发表论文20余篇,获授权发明专利15项、PCT专利5项。luyanjun@szu.edu.cn; luyanjun_szu@163.com
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2023, Vol. 37 
