Abstract: In order to systematically study the characterization and formation mechanism of surface morphology on diamond etched by Fe2O3 powder at different temperatures, using synthetic diamond as etching material and Fe2O3 powder as etching agent, the diamond was washed first, then Fe2O3 was mixed with diamond in a weight ratio of 5∶1 by milling in a ball-mill and tightly compacted, finally, the surface of diamond single crystal was etched by Fe2O3 at 650—850 ℃ with nitrogen as protective atmosphere respectively. The surface morphology, surface roughness, phase composition and etching mechanism of etched diamond single crystals were characterized and analyzed by means of scanning electron microscope and 3D reconstruction, thermogravimetric analysis, X-ray diffraction and Raman spectroscopy. Moreover, the morphology of different crystal planes of etched diamond was observed by 3D rescontruction technique for the first time, and the bending strength of Cu-matrix bonded diamond sample was prepared to evaluate the effect of etching on the bonding force between diamond and metal matrix. The results show that Fe2O3 can etch diamond single crystal well at different temperatures, and the degree and morphology of etching on different crystal planes are anisotropic, and when the etching temperature is 650 ℃, Fe2O3 has etched diamond single crystal to a certain extent. The etching rate of {100} and {111} plane increases as the temperature increasing,and that {100} plane was etched more severely than {111} plane under the same conditions.The surface roughness Sa of {100} plane increases from 0.84 μm to 3.73 μm, while the surface roughness Sa of {111} plane increases from 0.77 μm to 2.01 μm. After etching, the surface morphology of the etched diamond reflect the arrangement of carbon atoms on the corresponding plane. When the etching temperature rises from 650 ℃ to 850 ℃, the etched pit of {100} plane changes from quadrilateral to octagonal, and the {111} plane is slightly punctate into a triangular conical bulge. The mechanism of Fe2O3 etching diamond single crystal is the oxidation process of diamond. Furthermore, after etching, the flexural strength of Cu-matrix bonded diamond sample is greatly improved.
作者简介: 肖长江,河南工业大学材料学院副教授、硕士研究生导师。1994年7月本科毕业于郑州大学材料学院,2007年3月在中国科学院物理研究所凝聚态物理专业取得博士学位,主要从事功能材料和高压合成新材料研究。近年来,在功能材料和超硬材料领域相关期刊发表论文30余篇,包括Materials Chemistry and Physics、Physica Status Solidis A、Journal of Physics and Che-mistry of Solids、International Journal of Thermophysics、International Journal of Materials Research和Journal of Materials Processing Technology、Surface Engineering等。
引用本文:
肖长江, 窦志强, 朱振东. 氧化铁刻蚀金刚石表面形貌的表征及形成机理[J]. 材料导报, 2020, 34(14): 14045-14050.
XIAO Changjiang, DOU Zhiqiang, ZHU Zhendong. Characterization and Formation Mechanism of Surface Morphology on Diamond Etched by Fe2O3 Powder. Materials Reports, 2020, 34(14): 14045-14050.
1 Zhu X Y, Kwok S Y, Yuen M F, et al. Journal of Materials Science, 2015, 50(23), 7800. 2 Scorsone E, Gattout N, Rousseau L, et al. Diamond and Related Mate-rials, 2017, 76, 31. 3 Khanaliloo B, Mitchell M, Hryciw A C, et al. Nano Letters, 2015, 15(8), 5131. 4 Li Y Y, Wan L, Wang J S, et al. Materials Reports B: Research Papers, 2017, 31(7), 116(in Chinese). 李颖颖, 万隆, 王俊沙, 等. 材料导报:研究篇, 2017, 31(7),116. 5 Mehedi H A, Arnault J C, Eon D, et al. Carbon, 2013, 59(4), 448. 6 Mehedi H A, Hebert C, Ruffinatto S, et al. Nanotechnology, 2012, 23(5), 455302. 7 Li L Y, Chen X, Zhang W, et al. International Journal of Refractory Metals and Hard Materials, 2018, 71, 129. 8 Tsubouchi N, Mokuno Y, Shikata S. Diamond & Related Materials, 2016, 63(10), 43. 9 Ichikawa K, Kodama H, Suzuki K, et al. Thin Solid Films, 2016, 600(1), 142. 10 Kuroshima H, Makino T, Yamasaki S, et al. Applied Surface Science, 2017, 422, 452. 11 Wang J S, Wan L, Chen J, et al. Journal of Materials Science, 2017, 52(2), 709. 12 Wang J S, Wan L, Chen J, et al. Applied Surface Science, 2015, 346, 388. 13 Wang J S, Wan L, Chen J, et al. Diamond & Related Materials, 2016, 66, 206. 14 Mul G, Kapteijn F, Doornkamp C, et al. Journal of Catalysis, 1998, 179(1), 258. 15 Hisao N. Wang S L. Artificial Crystal, 1981, 9(3), 34(in Chinese). Hisao N, 王诗麟. 人工晶体, 1981, 9(3), 34. 16 Chen H L, Kang G W, Ren W W. Application Research of Computers, 2008, 10(2), 498(in Chinese). 陈亨利, 康戈文, 任文伟. 计算机应用研究, 2008, 10(2), 498. 17 Li H S, Qi Y X, Li M S. Diamond & Abrasives Engineering, 2008, 167(5), 7(in Chinese). 李和胜, 亓永新, 李木森. 金刚石与磨料磨具工程, 2008, 167(5), 7. 18 Wang J S. Study on etching of synthetic diamond crystallites by iron group metals and iron-group metal salts. Ph.D. Thesis, Henan University, China, 2016. 王俊沙. 铁族金属及其盐对人造金刚石单晶腐蚀研究.博士学位论文, 湖南大学, 2016. 19 Smirnov W, Hees J J, Brink D,et al. Applied Physics Letters, 2010, 97, 073117 20 Veres M, Tóth S, Perevedentseva E, et al. Raman Spectroscopy of Uncd Grain Boundaries, NATO Security through Science Series, Germany, 2009. 21 Chen J, Wan L, Wang J S, et al. Journal of Synthetic Crystals, 2015, 44(6), 31(in Chinese). 陈静, 万隆, 王俊沙, 等. 人工晶体学报, 2015, 44(6), 31. 22 Luo X, Jean R C. Nuclear Engineering & Design, 2004, 227(3), 273.