Abstract: SiC nanowires have been widely used in various fields such as photoelectric devices, photocatalysis, energy storage and structural ceramics, owing to their excellent physical, chemical, electrical and optical properties. Among various fabricated methods, the chemical vapor deposition (CVD) method is attracting increasingly attention on account of its simple process, controllable composition and good repeatability. In recent years, impressive strides have been made in fabrication of SiC nanowires by CVD method and optimizing the microstructure of SiC nanowires. SiC nanowires with various morphologies such as wire-like, chain-bead, bamboo-like, spiral-like and core-shell structures have been fabricated via CVD method using low-cost Si, graphite and resin powders, and adopting advanced fluid-bed equipment. And the fabricated SiC nanowires have excellent luminous properties, field emission properties and wave absorbing properties. The previous works have established a new avenue for fabrication of SiC nanowires with desirable structures and morphologies as well as the development of newly functional SiC nano devices. At present, though the purity of SiC nanowires fabricated by CVD via catalyst-free method is high, many drawbacks including poor controllability of morphology, size and crystallization direction as well as high fabrication temperature and low yield restrict its development. The catalysts, molten salts and oxides assisted CVD method can significantly reduce the fabrication temperature, increase the reaction rate and yield of SiC nanowires, but it is difficult to eliminate the introduced impurities in SiC nanowires. Therefore, the systematic study should be focused on increa-sing the purity of SiC nanowires and removing impurities in the future; attention should also be paid to develop new routes for low-cost and large-scale fabrication of SiC nanowires, and the microstructure of SiC nanowires should be further optimized in order to expand their application fields. This review offers a retrospection of the research efforts with respect to SiC nanowires fabrication by CVD method both at home and abroad, and provides elaborate descriptions about the advantages and disadvantages of various preparation methods such as catalysts-free, catalysts-assisted, molten salts assisted and oxide-assisted. The key issues and effective research methods are proposed to provide reference for low-cost, large-scale production and application of SiC nanowires.
刘显刚, 安建成, 孙佳佳, 张骞, 秦艳濛, 刘新红. 化学气相沉积法制备SiC纳米线的研究进展[J]. 材料导报, 2021, 35(11): 11077-11082.
LIU Xiangang, AN Jiancheng, SUN Jiajia, ZHANG Qian, QIN Yanmeng, LIU Xinhong. Research Progress in Fabrication of SiC Nanowires via Chemical Vapor Deposition Method. Materials Reports, 2021, 35(11): 11077-11082.
Guo C C, Cheng L F, Ye F. Materials China,2019,38(9),831(in Chinese).
郭楚楚,成来飞,叶昉.中国材料进展,2019,38(9),831.
2
Wei J, Zhang Q, Zhao L L, et al. Journal of Nanoscience and Nanotech?nolgy,2018,18(2),1224.
3
Kim J H, Choi S C. Journal of the Korean Ceramic Society,2018,55(3),285.
4
Wang F, Qin X F, Zhu D D, et al. Materials Science in Semiconductor Processing,2015,29(1),155.
5
Li Z J, Gao W D, Meng A L, et al. The Journal of Physical Chemistry C,2009,113(1),91.
6
Zhang Y F, Sheng L M, FangY H, et al. Chemical Physics Letters,2017,678(1),17.
7
Liu S, Wang J G. Physica E: Low?dimensional Systems and Nanostructures,2016,81(1),268.
8
Liu H T, Huang Z H, Fang M H, et al. Journal of Crystal Growth,2015,419(1),20.
9
Zhou X T, Wang N, Lai H L, et al. Applied Physics Letters,1999,74(26),3942.
10
Yang G Z, Cui H, Sun Y, et al. Rural Economy,2009,113(36),15969.
11
Wei J, Li K Z, Chen J, et al. Journal of Crystal Growth,2011,335(1),160.
12
Chen J J, Shi Q, Xin L P, et al. Current Nanoscience,2012,8(2),226.
13
Wu R B, Pan Y, Yang G Y, et al. The Journal of Physical Chemistry C,2007,111(17),6233.
14
Li B B, Mao B X, Huang H Q, et al. International Journal of Applied Ceramic Technology,2020,00(1),1.
15
Li J, Zhu X L, Ding P, et al. Nanotechnology,2009,20(14),145602.
16
Wei J, Li K Z, Chen J, et al. Journal of the American Ceramic Society,2013,96(2),627.
17
Duan X F, Lieber C M. Journal of the American Chemical Society,2000,122(1),188.
18
Zhang B C, Wang H, He L, et al. Nano Letters,2017,17(12),7323.
19
Wu S T, Wang L C, Yi X Y, et al. Journal of Applied Physics,2017,122(20),205302.
20
Amnon R, Tamir F,Yarden D, et al. The Journal of Physical Chemistry C,2018,122(23),12413.
21
Huang M H, Wu Y Y, Feick H N, et al. Advanced Materials,2001,13(2),113.
22
Kenry, Lim C T. Progress in Materials Science,2013,58(5),705.
23
Prakash J. Silicon?based Nanomaterials,2013,187(1),179.
24
Krishnan B, Kotamraju S P, Sundaresan S G, et al. Materials Science Forum,2010,645?648(1),187.
25
Panda S K, Sengupta J, Jacob C. Journal of Nanoscience and Nanotech?nology,2010,10(5),3046.
26
Zhang Y F, Nishitani?Gamo M, Xiao C Y, et al. Journal of Applied Phy?sics,2002,91(9),6066.
27
Lopez?Camacho E, Fernandez M, Gomez?Aleixandre C. Journal of Phy?sics D: Applied Physics,2009,42(4),45302.
28
Nazarudin N F F B, Azizan S N A B, Rahman S A, et al. Thin Solid Films,2014,570(Part B),243.
29
Goh B T, Abdul R S. Journal of Crystal Growth,2014,407(1),25.
30
Zhang H F, Wang C M, Wang L S. Nano Letters,2002,2(9),941.
31
Sun Y, Cui H, Yang G Z, et al. CrystEngComm,2010,12(4),1134.
32
Kohno H, Yagi K, Niioka H. Japanese Journal of Applied Physics,2011,50(1),18001.
33
Zheng H W, Zhao T T, Tian Y, et al. Materials Letters,2014,120(1),13.
34
Yu J S, Liu H S, Zhou X G, et al. IOP Conference Series: Materials Science and Engineering,2019,504(1),12039.
35
Wang X C, Tang B, Gao F M, et al. Journal of Physics D: Applied Phy?sics,2011,44(24),245404.
36
Kim H Y, Bae S Y, Kim N S, et al. Chemical Communications,2003,9(20),2634.
37
Zhang M, Zhao J, Li Z J, et al. Journal of Solid State Chemistry,2016,243(1),247.
38
Wang J K, Zhang Y Z, Li J Y, et al. Powder Technology,2017,317(1),209.
39
Li Z J, Ma F L, Zhang M, et al. The Journal of Chemical Physics,2015,31(6),1191(in Chinese).
李镇江,马凤麟,张猛,等.物理化学学报,2015,31(6),1191.
40
Wu R B, Zhou K, Wei J, et al. The Journal of Physical Chemistry C,2012,116(23),12940.
41
Zhang J, Liu X H, Jia Q L, et al. Ceramics International,2015,42(3),4600.
42
Zhang J, Jia Q L, Zhang S M, et al. Ceramics International,2015,42(2),2227.
43
Zhang D Q, Alkhateeb A, Han H M, et al. Nano Letters,2003,3(7),983.
44
Ho G W, Wong A S W, Kang D J, et al. Nanotechnology,2004,15(8),996.
45
Li L, Chu Y H, Li H J, et al. Ceramics International,2014,40(3),4455.
46
Ke K C, Jiang M, Ding L J, et al. Journal of the American Ceramic Society,2019,102(6),3070.
47
Li H J, He Z B, Chu Y H, et al. Materials Letters,2013,109(1),275.
48
Hu P, Dong S, Zhang D Y, et al. Ceramics International,2016,42(1,Part B),1581.
49
Arendt R H. Journal of Applied Physics,1973,44(7),3300.
50
Zhang J. Study on SiC nanowires assisted by molten salt and their photoluminescence properties. Master's Thesis, Zhengzhou University, China,2016(in Chinese).
张举.熔盐辅助制备SiC纳米线及其光致发光性能研究.硕士学位论文,郑州大学,2016.
51
Xie W, Moebus G, Zhang S W. Journal of Materials Chemistry,2011,21(45),18325.
52
Wu R B, Zhou K, Yang Z H, et al. CrystEngComm,2013,15(3),570.
53
Sun Z G, Qiao X J, Ren Q G, et al. Advanced Powder Technology,2016,27(4),1552.
54
Liu R Z, Liu M L, Chang J X, et al. Chemical Vapor Deposition,2015,21(7?9),196.
55
Longkullabutra H, Nhuapeng W, Thamjaree W. Current Applied Physics,2012,12(S2),S112.
56
Chen X Y, Qin Y M, Jia Q L, et al. Materials Letters,2019,234(1),187.
57
Chen X Y, Zhang Q, Zhou Y, et al. Ceramics International,2018,44(18),22890.
58
Chen X Y, Liu X H, Geng X J, et al. Ceramics International,2018,44(10),11204.
59
Chang J X, Liu R Z, Liu M L, et al. Key Engineering Materials,2016,697(1),841.
60
Yu W P, Zheng Y, Yang E, et al. Journal of Rare Earths,2010,28(3),365.
61
Han W Q, Redlich P, Ernst F, et al. Applied Physics Letters,1999,75(13),1875.
62
Jintakosol T, Singjai P. Key Engineering Materials,2007,353?358(1),2171.