Microstructure Evolution of Polystyrene Nanosphere Template and Si Substrate with the Exposure Time Under Ion Beam Bombardment
LI Dongze1, ZHANG Mingling1, YANG Jie1,2, WANG Chong1,2, YANG Yu2,3
1 School of Materials Science and Engineering, Yunnan University, Kunming 650091, China 2 International Joint Research Center for Optoelectronic and Energy Materials, Yunnan University, Kunming 650091, China 3 School of Energy, Yunnan University, Kunming 650091, China
Abstract: Aself-assembled monolayer film of polystyrene (PS) nanospheres with close-packed arrays on Si substrate was bombarded at normal incidence by Ar+ ion beam. The systematic study of non-selected etching of PS nanospheres and Si substrate were performed through the investigation on their microstructure evolution with the exposure time. With an increase in exposure time, the diameter and height of PS nanoparticles decreased monotonically, while the etching rate of nanoparticle height was higher. In this process, the shapes of PS nanoparticles were transformed from symmetrical sphere to asymmetric sphere and then cone. The reason for the first step of shape transition was the anisotropic etching of PS nanoparticles during physical sputtering process. For the second shape transition, it was attributed to the thermal energy accumulated gradually in a long-time bombardment of ion beam. At the same time, the surface structure of Si substrate was also changed. When the exposure time was 4 min, Si mesas with cylindrical morphology were observed under the PS nanoparticles. The change of the bottom diameter of Si mesas showed a trend of first stabilizing and then decreasing with the increase of exposure time. While, the height of Si mesas was continually enhanced. Simultaneously, the transition of Si mesa shapes also occurred. In the first step, cylindrical Si mesas were transformed to ones with truncated cone shape, leading to the stabilization of bottom diameter at the beginning of ion beam bombardment. Secondly, the shapes of Si mesas were transformed from truncated cone to cone after PS nanoparticles disappeared. And then ordered array of Si nanocones with a diameter range of 65—100 nm have been obtained. Combined with the suitable non-close-packed PS nanoparticle arrays and metal-assisted chemical etc-hing technology, ordered array of Si nanowires with a diameter range of 70—124 nm was prepared. These results lay a foundation and provide an alternative method for the development of novel ordered nanomaterials.
李东泽, 张明灵, 杨杰, 王茺, 杨宇. 聚苯乙烯纳米球模板和Si衬底的微结构随离子束轰击时间的演变规律[J]. 材料导报, 2020, 34(24): 24155-24159.
LI Dongze, ZHANG Mingling, YANG Jie, WANG Chong, YANG Yu. Microstructure Evolution of Polystyrene Nanosphere Template and Si Substrate with the Exposure Time Under Ion Beam Bombardment. Materials Reports, 2020, 34(24): 24155-24159.
1 McAlpine M C, Ahmad H, Heath J R, et al. Nature Materials, 2007, 6, 379. 2 Huang S F, Jiang Z M, Cheng C W, et al. ACS Applied Materials Interfaces, 2014, 6, 12111. 3 Wu Z L,Fan Y L, Zhong Z Y, et al. Nanotechnology, 2014, 25, 055204. 4 Cheng F L, Dai X C, Xu C W, et al. Electrochimica Acta, 2010, 55, 2295. 5 Ghosh S, Satyanarayana V S V, Gonsalves K E, et al. Scientific Reports, 2016, 6, 22664. 6 Cai H G, Wind S J. Langmuir, 2016, 32, 10034. 7 Kuo C W, Shiu J Y, Chen P, et al. Advanced Materials, 2003, 15, 1065. 8 Lee D, Lee J W, Yoon E, et al. Applied Physics Letters, 2017, 110, 191103. 9 Yeom J, Ratchford D, Pehrsson P E, et al. Advanced Functional Mate-rials, 2014, 24, 106. 10 Weng X K, Yang J, Wang C, et al. Nano, 2019, 14, 1930004. 11 Gao M, Cho M, Park I, et al. Small, 2018, 14, 1703691. 12 Jiang Y W, Fan Y L, Jiang Z M, et al. Nanoscale Research Letters, 2016, 11, 102. 13 Ma Y J, Zhong Z Y, Jiang Z M, et al. Optics Express, 2013, 21, 6053. 14 Asoh H, Fujihara K, One S. Nanoscale Research Letters, 2012, 7, 406. 15 Tan B J Y, Sow C H, Ong C K, et al. Journal of Physical Chemistry B, 2004, 108, 18575. 16 Zhang D, Qin X M, Shi W Z, et al. Journal of Nanoscience and Nanotechnology, 2017, 17, 4989. 17 Hanarp P, Sutherland D S, Kasemo B, et al. Colloids and Surface A, 2003, 214, 23. 18 Yan L L, Wang K, Ye L. Journal of Physical Chemistry B, 2006, 110, 11241. 19 Gao H X, Li X H, Wang Y Q, et al. Nanoscale Research Letters, 2017, 12, 105. 20 Yang J, Wang C, Yang Y, et al. Nanoscale Research Letters, 2018, 13, 177. 21 Wang L M, Zhong Z Y, Jiang Z M, et al. Nanotechnology, 2016, 27, 405705. 22 Plettl A, Enderle F, Ziemann P, et al. Advanced Functional Materials, 2009, 19, 3279. 23 Pokroy B, Kang S H, Aizenberg J, et al. Science, 2009, 323, 237. 24 Chun D W, Kim T K, Chen R, et al. Nanotechnology, 2016, 27, 455302.