Effects of Acetylene Flow Rate on the Structure,Mechanical Properties and Atmospheric Tribological Performances of ta-C:H Films
LI Jian1, HAO Hong1, ZHOU Zhiyong2, WANG Keliang1, ZHENG Yugang1, ZHAO Meng1, ZHOU Hui1,*, ZHANG Kaifeng1,*
1 National Key Laboratory on Vacuum Technology and Physics, Lanzhou Institute of Physics, Lanzhou 730000, China 2 Beijing Institute of Spacecraft System Engineering, Beijing 100094, China
Abstract: The tetrahedral hydrogenated amorphous carbon (ta-C:H) films were prepared by pulsed laser-induced cathodic vacuum arc (PLICVA) technique in acetylene atmosphere, and the effects of acetylene flow rate (0—40 sccm) on the structure, mechanical properties and atmospheric tribological performances of the films were systematically investigated. The results show that with increasing acetylene flow rate, a reduction in the density of large-size particles on the film surface is observed, accompanied by effective improvement of its quality. The sp3 C content shows a gradient decreasing trend, together with a decline of nanohardness from 57.95 GPa for ta-C films (0 sccm acetylene flow) to 44.71 GPa for ta-C:H films (40 sccm acetylene flow). Conversely, the film-substrate adhesion force demonstrates an initial increase followed by subsequent decrease. Atmospheric tribological tests reveal a progressive decrease in friction coefficient and increase in wear rate with increasing acetylene flow rate. Under a load of 5 N, the acetylene-free ta-C film exhibits a friction coefficient of 0.156 and a low wear rate of 3.22×10-16 m3·N-1·m-1, whereas the ta-C:H film deposited with 40 sccm acetylene flow shows a reduced friction coefficient of 0.128 but an elevated wear rate of 7.92×10-16 m3·N-1·m-1. Mechanism analysis reveals that hydrogen incorporation enhances dangling bond passivation, which takes synergistic lubricating effects with transfer film formation and sliding-induced interfacial graphitization, collectively reducing the friction coefficient. This study may provide critical experimental and theoretical insights for optimizing ta-C:H films.
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2025, Vol. 39 
