宽谱增透双层TiO2-SiO2/SiO2薄膜的制备与性能

材料导报

2019, Vol. 33

Issue (Z2): 161-164

无机非金属及其复合材料

宽谱增透双层TiO₂-SiO₂/SiO₂薄膜的制备与性能

马立云, 汤永康, 鲍田, 金良茂, 甘治平, 李刚

中建材蚌埠玻璃工业设计研究院有限公司,浮法玻璃新技术国家重点实验室,蚌埠 233000

Preparation and Performance Study of Double Layer TiO₂-SiO₂/SiO₂Anti-reflection Films in Wide Optical Wavelength

MA Liyun, TANG Yongkang, BAO Tian, JIN Liangmao, GAN Zhiping, LI Gang

State Key Laboratory of Advanced Technology for Float Glass, Bengbu Design & Research Institute for Glass Industry, Bengbu 233000

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摘要采用溶胶-凝胶法制备了双层TiO₂-SiO₂/SiO₂薄膜,调控了底层薄膜的折射率及双层薄膜不同的厚度匹配,研究了在不同厚度匹配下薄膜的光学性能。通过场发射扫描电子显微镜、椭偏仪、紫外-可见-红外分光光度计研究了薄膜的微观结构、厚度、折射率和光学透过率。研究表明:以TiO₂与SiO₂混合溶胶镀膜获得了折射率可调(1.5～2.0)的薄膜,在TiO₂-SiO₂层与SiO₂层的厚度分别约为160 nm、90 nm时获得了光学性能较优的薄膜,薄膜在光学宽谱380～1 100 nm范围内表现出明显的增透效果,可见光最高透过率可达97.5%,宽谱平均透过率为93.9%。

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关键词: 宽谱增透 TiO₂-SiO₂/SiO₂双层薄膜折射率厚度调控

Abstract: Double layer TiO₂-SiO₂/SiO₂ composite anti-reflective thin films were prepared by sol-gel method. The refractive index and thickness of the layer was regulated, then optical performance of the films prepared were researched. The film morphology, film thickness, refractive index and transmittance of the films were investigated by field emission scanning electron microscopy (FESEM), ellipsometer and ultraviolet-visible-infrared spectrophotometer, respectively. The results show that the refractive index of TiO₂-SiO₂ thin film prepared is about 1.5—2.0. Better optical performance of the double layer is obtained when the thickness of TiO₂-SiO₂ and SiO₂ are 160 nm and 90 nm, The films show significant transmittance improvement in wide light wavelength of 380—1 100 nm, the maximum transmittance in visible light can reach to 97.5%, and the average transmittance is 93.9%.

Key words: wide optical wavelength anti-reflection TiO₂-SiO₂/SiO₂ double layer refractive index and thickness

出版日期: 2019-11-25 发布日期: 2019-11-25

ZTFLH:

TB34

基金资助: 安徽省科技重大专项(17030901085);安徽省重点研究与开发计划 (1804a09020061)

通讯作者: ykantang@163.com

作者简介: 马立云,教授级高级工程师,长期从事玻璃新技术研发、成果产业化与科技管理工作,先后承担完成“国家科技支撑计划”、“973”、“863”计划等在内的多项国家、省部级课题,组织建设多个国家级、省级科研平台,为玻璃领域的发展和自主创新成果的转化做出了突出贡献。
汤永康, 中建材蚌埠玻璃工业设计研究院有限公司、浮法玻璃新技术国家重点实验室材料研发工程师。先后参与了多项玻璃材料及玻璃表面功能薄膜与涂层制备技术等课题研究,目前主要专注于玻璃功能膜研究。

引用本文:

马立云, 汤永康, 鲍田, 金良茂, 甘治平, 李刚. 宽谱增透双层TiO₂-SiO₂/SiO₂薄膜的制备与性能[J]. 材料导报, 2019, 33(Z2): 161-164.
MA Liyun, TANG Yongkang, BAO Tian, JIN Liangmao, GAN Zhiping, LI Gang. Preparation and Performance Study of Double Layer TiO₂-SiO₂/SiO₂Anti-reflection Films in Wide Optical Wavelength. Materials Reports, 2019, 33(Z2): 161-164.

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