1 Hunan Provincial Key Laboratory of Geotechnical Engineering for Stability Control and Health Monitoring,Hunan University of Science & Technology,Xiangtan 411201,China 2 School of Civil Engineering,Hunan University of Science & Technology,Xiangtan 411201,China 3 School of Mechanical Engineering,Tianjin University,Tianjin 300072,China
Abstract: The composite structure of thin metal films deposited on flexible polymer substrates has advantages of both polymers and metals, including flexibility and lightness of polymers, as well as excellent conductivity and electromagnetic shielding of metals. Flexible substrates-metal film systems are favored for their high ductility, high flexibility, high production efficiency, good electrical properties, biocompatibility, and other advantages. In all applications, the performance, reliability and durability are directly related to the good interfacial adhesion between the film and the substrate. The mechanical properties and interface bonding properties of film-substrate structures play an important role in the service life of rela-ted devices. However, in practical applications, thin film-substrate composite structures suffer from complex loads, such as stretching, torsion, bending, etc. Although flexible substrates can bear large deformation, metal films cannot, which may lead various forms of damage to the film-substrate structures, including three main failure modes: interfacial delamination, film buckling and film fracture. On the one hand, these damages will se-riously affect the electrical, magnetic, optical and other physical properties of the film, and the interface adhesion between the film and substrate plays a key role in the occurrence and development of the film failure. On the other hand, for different failure modes, it can be fully used to test the mechanical properties and interface adhesion energy of thin films. In recent years, the failure behavior and interfacial adhesion test of monolayer, bilayer and multilayer membrane systems on flexible substrates have attracted wide attention. Forsingle-layer film systems on flexible substrates, the failure behaviors and fracture mechanisms of films and interfaces have been studied deeply. For multilayer metal film systems, the combination of metal layers with different properties can improve adhesion, corrosion resistance or thermal stability. The influence mechanism of size effect of multilayer, the interlayer combination of different materials and the mechanical response of interface have become the focus of scholars in recent years. In the past, as to the interface adhesion energy between thin films and substrates, researches mainly focused on rigid substrates. While in recent years, scholars have proposed new and effective methods to determine the interface adhesion energy of flexible substrates-metal film systems. This paper reviews the latest research progress on the failure behavior and interface failure of micro-nano metal films on flexible substrates. In particular, how to use the buckling failure of thin films to measure the properties of thin films and determine the interface adhesion energy is discussed. Finally, the problems and prospects of the research in this field are prospected, so as to provide references for material selection and structural design of new flexible film-substrate systems.
作者简介: 薛秀丽,湖南科技大学,副教授,硕士研究生导师。2014年6月于天津大学固体力学专业取得博士学位,导师为王世斌教授。主要从事薄膜和智能材料的力学性能及表征研究。近年来,在Surface & Coatings Technology、Surface and Interface Analysis、Journal of Hydrology等国内外重要期刊发表文章20多篇。 曾超峰,博士(后),湖南科技大学“奋进学者”特聘副教授,英国南安普顿大学客座研究员,主要从事软土力学与智能材料特性等方面的研究工作。2018年获“Elsevier出版集团Computers and Geotechnics期刊杰出审稿人奖”。目前主持国家自然科学基金、中国博士后科学基金特别资助项目等10余项课题。近年来,在Surface & Coatings Technology、Surface and Interface Analysis、Journal of Hydrology等国内外高水平刊物发表论文50余篇。
引用本文:
薛秀丽,王世斌,曾超峰,李林安,王志勇. 柔性基底上金属薄膜的失效行为及界面能测试方法研究进展[J]. 材料导报, 2020, 34(1): 1050-1058.
XUE Xiuli,WANG Shibin,ZENG Chaofeng,LI Lin'an,WANG Zhiyong. Failure Behavior and Test Method of Interface Energy of Thin Metal Films on Flexible Substrates: a Review. Materials Reports, 2020, 34(1): 1050-1058.
1 Nathan A, Ahnood A, Cole M T, et al. Proceedings of the IEEE, 2012, 100(Special Centennial Issue), 1486. 2 Guo R, Yu Y, Xie Z, et al.Advanced Materials, 2013, 25(24), 3343. 3 Yao S, Zhu Y.Advanced Materials, 2015, 27(9), 1480. 4 Rim Y S, Bae S H, Chen H, et al.Advanced Materials, 2016, 28(22), 4415. 5 Naghdi S, Rhee K Y, Hui D, et al.Coatings, 2018, 8(8), 278. 6 Linnet J, Walther A R, Wolff C, et al.Optical Materials Express, 2018, 8(7), 1733. 7 Hutchinson J W, Suo Z.Advances in Applied Mechanics, 1992, 29, 63. 8 Freund L B, Suresh S.Thin film materials—Stress, defect formation and surface evolution. Cambridge University Press, 2004. 9 Xiang Y, Li T, Suo Z, et al.Applied Physics Letters, 2005, 87(16), 161910. 10 Lu N, Wang X, Suo Z, et al.Applied Physics Letters, 2007, 91(22), 221909. 11 Chen J, Bull S J.Journal of Physics D, Applied Physics, 2011, 44(3), 034001. 12 Xue X, Wang S, Zeng C, et al.Surface and Interface Analysis, 2018, 50(2), 180. 13 Zhou H, Ma L, Yu S J, et al.Thin Solid Films, 2018, 651, 131. 14 Yu S J, Chen M G, Si P Z, et al.Thin Solid Films, 2014, 550, 480. 15 Jia H, Wang S, Goudeau P, et al.Journal of Micromechanics and Microengineering, 2013, 23(4), 045014. 16 Ruffini A, Durinck J, Colin J, et al.Acta Materialia, 2013, 61(12), 4429. 17 Colin J, Coupeau C, Durinck J, et al.EPL (Europhysics Letters), 2009, 86(5), 54002. 18 Boijoux R, Parry G, Coupeau C.Thin Solid Films, 2018, 645(Supplement C), 379. 19 Coupeau C, Boijoux R, Ni Y, et al.Journal of the Mechanics and Physics of Solids, 2019, 124, 526. 20 Zhang Q, Yin J.Journal of the Mechanics and Physics of Solids, 2018, 118, 40. 21 Toth F, Rammerstorfer F G, Cordill M J, et al.Acta Materialia, 2013, 61(7), 2425. 22 Yin J, Chen X.Journal of Physics D, Applied Physics, 2011, 44(4), 045401. 23 Parry G, Coupeau C, Colin J, et al.Acta Materialia, 2004, 52(13), 3959. 24 Wu K, Xia Y, Yuan H Z, et al.Materials Science and Engineering, A, 2019, 744, 746. 25 Wu K, Wang Y Q, Yuan H Z, et al.Materials Letters, 2019, 237, 118. 26 Faou J Y, Parry G, Grachev S, et al.Physical Review Letters, 2012, 108(11), 116102. 27 Ren H, Xiong Z, Wang E, et al.ACS Nano, 2019, 13(3), 3106. 28 Li B, Cao Y P, Feng X Q, et al.Soft Matter, 2012, 8(21), 5728. 29 Chen X, Hutchinson J W.Journal of Applied Mechanics, 2004, 71(5), 597. 30 Yu S J, Du Y P, Sun Y D, et al.Thin Solid Films, 2017, 638(Supplement C), 230. 31 Sarkar B, Satapathy D K, Jaiswal M.Soft Matter, 2017, 13(32), 5437. 32 Zhang C, Li B, Tang J Y, et al.Soft Matter, 2017, 13(40), 7389. 33 Pocivavsek L, Dellsy R, Kern A, et al.Science, 2008, 320(5878), 912. 34 Huang J, Juszkiewicz M, de Jeu W H, et al.Science, 2007, 317(5838), 650. 35 Pan K, Ni Y, He L, et al.International Journal of Solids and Structures, 2014, 51(21-22), 3715. 36 Jin L, Takei A, Hutchinson J W.Journal of the Mechanics and Physics of Solids, 2015, 81, 22. 37 Rogers J A, Someya T, Huang Y.Science, 2010, 327(5973), 1603. 38 Ouchi T, Yang J, Suo Z, et al.ACS Applied Materials & Interfaces, 2018, 10(27), 23406. 39 da Costa M V T, Bolinsson J, Neagu R C, et al.Surface and Coatings Technology, 2019, 370, 374. 40 Xia A, Glushko O, Cordill M J, et al.Journal of Vacuum Science & Technology A, 2019, 37(1), 010601. 41 Li T, Huang Z Y, Xi Z C, et al.Mechanics of Materials, 2005, 37(2-3), 261. 42 Andersons J, Leterrier Y, Tornare G, et al.Mechanics of Materials, 2007, 39(9), 834. 43 Handge U A.Journal of Materials Science, 2002, 37(22), 4775. 44 Wu K, Wang Y Q, Yuan H Z, et al.Journal of Alloys and Compounds, 2019, 783, 841. 45 Merabtine S, Zighem F, Faurie D, et al.Nano Letters, 2018, 18(5), 3199. 46 Marthelot J, Roman B, Bico J, et al.Physical Review Letters, 2014, 113(8), 085502. 47 Faurie D, Zighem F, Godard P, et al.Acta Materialia, 2019, 165, 177. 48 Cordill M J, Fischer F D, Rammerstorfer F G, et al.Acta Materialia, 2010, 58(16), 5520. 49 Dan W, Huimin X, Yajun Y, et al.Journal of Micromechanics and Microengineering, 2013, 23(3), 035040. 50 Xue X, Wang S, Zeng C, et al.Surface and Coatings Technology, 2014, 244, 151. 51 Gao T X, Sun Y D, Feng Y F, et al.Philosophical Magazine, 2016, 96(28), 2943. 52 Yang L, Chen H S, Jiang H, et al.Chemical Communications, 2018, 54(32), 3997. 53 Yu S, Liu X, Sun Y, et al.Thin Solid Films, 2019, 669, 355. 54 Li S C, Yu S J, He L, et al.Journal of the Mechanics and Physics of Solids, 2018, 112, 637. 55 Choleridis A, Sao-Joao S, Ben-Mohamed J, et al.Surface and Coatings Technology, 2018, 352, 549. 56 Chen X, Pang X, Meng J, et al.Ceramics International, 2018, 44(6), 5874. 57 Yu S J, Li S C, Ni Y, et al.Acta Materialia, 2017, 127(Supplement C), 220. 58 Thouless M D.Journal of the American Ceramic Society, 1993, 76(11), 2936. 59 Cotterell B, Chen Z.International Journal of Fracture, 2000, 104(2), 169. 60 Colin J, Coupeau C, Durinck J, et al.Physical Review B, 2008, 78(15), 61 Yu S J, Xiao X F, Chen M G, et al.Acta Materialia, 2014, 64, 41. 62 Li S C, Yu S J, He L, et al.Journal of the Mechanics and Physics of Solids, 2018, 112, 637. 63 Faulhaber S, Mercer C, Moon M, et al.Journal of the Mechanics and Physics of Solids, 2006, 54(5), 1004. 64 Guo T, Pang X, He J, et al.Scripta Materialia, 2019, 163, 82. 65 Guo T, Chen Y, Cao R, et al.Acta Materialia, 2018, 152, 77. 66 Putz B, Schoeppner R L, Glushko O, et al.Scripta Materialia, 2015, 102, 23. 67 Marx V M, Toth F, Wiesinger A, et al.Acta Materialia, 2015, 89, 278. 68 Miyamura T, Koike J.Materials Science and Engineering, A, 2007, 445-446, 620. 69 Putz B, May-Miller C, Matl V, et al.Scripta Materialia, 2018, 145, 5. 70 Kreiml P, Rausch M, Terziyska V L, et al.Thin Solid Films, 2018, 665, 131. 71 Kreiml P, Rausch M, Terziyska V L, et al.Scripta Materialia, 2019, 162, 367. 72 Choa S H, Ko B H, Lee H S.Engineering Fracture Mechanics, 2018, 200, 283. 73 Aydiner C C, Brown D W, Mara N A, et al.Applied Physics Letters, 2009, 94(3), 031906. 74 Wu K, Zhang J Y, Li J, et al.Acta Materialia, 2015, 100, 344. 75 Wu K, Zhang J Y, Liu G, et al.Acta Materialia, 2013, 61(20), 7889. 76 Mohammed D W, Ameen R B, Sierros K A, et al.Thin Solid Films, 2018, 645, 241. 77 Wu K, Yuan H Z, Liang X Q, et al.Scripta Materialia, 2018, 146, 1. 78 Marx V M, Toth F, Wiesinger A, et al.Acta Mater, 2015, 89, 278. 79 Polyakov M N, Lohmiller J, Gruber P A, et al.Advanced Engineering Materials, 2015, 17(6), 810. 80 Cordill M J, Kleinbichler A, Völker B, et al.Materials Science and Engineering, A, 2018, 735, 456. 81 Fu K, Sheppard L, Chang L, et al.Tribology International, 2018, 126, 344. 82 Kleinbichler A, Zechner J, Cordill M J.Microelectronic Engineering, 2017, 167, 63. 83 Jörg T, Cordill M J, Franz R, et al.Thin Solid Films, 2016, 606, 45. 84 He W, Han M, Goudeau P, et al.Applied Surface Science, 2018, 434, 771. 85 He W, Han M, Wang S, et al.Acta Mechanica Sinica, 2018, 34(2), 381. 86 Cordill M J, Glushko O, Kleinbichler A, et al.Thin Solid Films, 2017, 644, 166. 87 Kleinbichler A, Pfeifenberger M J, Zechner J, et al.Materials & Design, 2018, 155, 203. 88 Vega-Morón R C, Rodríguez Castro G A, Melo-Máximo D V, et al.Surface and Coatings Technology, 2018, 349, 1137. 89 Gerberich W W, Cordill M J.Reports on Progress in Physics, 2006, 69(7), 2157. 90 Wu K, Wang Y Q, Yuan H Z, et al.Philosophical Magazine Letters, 2018, 98(10), 464. 91 Kim M, Kim D J, Ha D, et al.Nanoscale, 2016, 8(18), 9461. 92 Lacour S P, Chan D, Wagner S, et al.Applied Physics Letters, 2006, 88(20), 204103. 93 Moon M W, Chung S, Lee K R, et al.International Journal of Materials Research, 2007, 98(12), 1203. 94 Wang C, Kang J, Xue Z, et al.Composite Structures, 2017, 161(Supplement C), 8. 95 Cantarella G, Vogt C, Hopf R, et al.ACS Applied Materials & Interfaces, 2017, 9(34), 28750. 96 Park S J, Ko T J, Yoon J, et al.Applied Surface Science, 2018, 427, 1. 97 Etiemble A, Lopes C, Nkou Bouala G I, et al.Surface and Coatings Technology, 2019, 358, 646. 98 Cordill M J, Jörg T, Glushko O, et al.Materials Letters, 2019, 244, 47. 99 Dickey M D.Advanced Materials, 2017, 29(27), 1606425. 100 Li X, Li M, Zong L, et al.Advanced Functional Materials, 2018, 28(39), 1804197.