Research Progress on Preparation Technology of High Purity Phosphorus
JIANG Zongkui1,2,3, TIAN Yang1,2,3,4,*, XU Baoqiang1,2,3,4, YANG Bin1,2,3,4, KONG Lingxin1,2,3,4, LIANG Dong1,2,3, WANG Lipeng1,2,3, ZHANG Jiapeng1,2,3
1 National Engineering Research Center of Vacuum Metallurgy, Kunming University of Science and Technology, Kunming 650093, China 2 Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology, Kunming 650093, China 3 Key Laboratory for Nonferrous Vacuum Metallurgy of Yunnan Province, Kunming University of Science and Technology, Kunming 650093, China 4 State Key Laboratory of Clean Utilization of Complex Nonferrous Metal Resources, Kunming University of Science and Technology, Kunming 650093, China
Abstract: With the rapid development of key industries such as semiconductors and electronic instruments, the demand for high-purity phosphorus in China has sharply increased. High-purity phosphorus is an important raw material in these fields, especially playing a crucial role in the manufacturing of second-generation semiconductor materials. However, in China, the high purity phosphorus of 6N and above is mainly prepared by wet method, and there are some problems such as long process flow and low phosphorus yield. Which significantly constrain China’s compe-titiveness in the global high-purity phosphorus market. Therefore, research on the preparation technology of high-purity phosphorus is of great significance and has enormous economic potential. Considering the preparation methods of high-purity phosphorus as the main focus, this paper introduces the principles and research progress of both high-purity phosphorus pyrometallurgy and wet preparation processes, compares the respective process flows and advantages and disadvantages, and discusses the development direction of high-purity phosphorus purification technology.
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