空间太阳电池玻璃盖板表面超薄ITO防静电层的设计及制备工艺*

doi:10.11896/j.issn.1005-023X.2017.017.023

《材料导报》期刊社

2017, Vol. 31

Issue (17): 158-162 https://doi.org/10.11896/j.issn.1005-023X.2017.017.023

太阳能电池材料

空间太阳电池玻璃盖板表面超薄ITO防静电层的设计及制备工艺^*

金鹤¹, 周灵平^1,2, 朱家俊^1,2, 符立才¹, 杨武霖¹, 李德意¹

1 湖南大学材料科学与工程学院,长沙 410082;
2 湖南省喷射沉积技术重点实验室,长沙 410082

The Design and Preparation Technique of Anti-static Layer Made of Ultra-thin ITO Film and Coated on Glass Cover of Space Solar Cell

JIN He¹, ZHOU Lingping^1,2, ZHU Jiajun^1,2, FU Licai¹, YANG Wulin¹, LI Deyi¹

1 College of Materials Science and Engineering, Hunan University, Changsha 410082;
2 Key Laboratory of Spray Deposition Technology of Hunan Province, Changsha 410082

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摘要 ITO/MgF₂复合薄膜既具有较好的表面导电性能又具有较高的透过率,可应用于空间太阳电池玻璃盖板表面。文章主要对ITO/MgF₂复合薄膜中表层的超薄ITO薄膜进行了研究。利用TFCalc软件模拟了ITO薄膜厚度对ITO/MgF₂复合薄膜光学性能的影响,根据模拟结果采用电子束蒸发法在衬底上依次沉积MgF₂薄膜和氧化铟锡(ITO)薄膜,研究了ITO薄膜工艺参数(沉积速率、沉积温度和工作气压)和ITO薄膜厚度对ITO/MgF₂复合薄膜光电性能及微观结构的影响。当ITO薄膜沉积速率为0.05 nm/s、沉积温度为400 ℃、工作气压为2.3×10^-2 Pa、厚度为10 nm时,表层ITO薄膜基本连续,其方块电阻(1.94 kΩ/□)已符合设计需求,ITO/MgF₂复合薄膜在可见光区间(400~800 nm)的平均透过率达到89.00%。

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关键词: 氧化铟锡(ITO)薄膜防静电空间太阳电池 MgF₂薄膜电子束蒸发玻璃盖板

Abstract: ITO/MgF₂ composite film has good surface conductivity and high transmittance, which can be applied to the anti-static & anti-reflection composite layer of space solar cell’s glass cover. This work mainly focused on the outerlayer (i.e. ultra-thin ITO film) of the ITO/MgF₂ composite film. We conducted a simulation upon the effect of ITO film’s thickness on the composite film’s optical properties via TFCalc software, premised on which an MgF₂ thin film and an ITO thin film were sequentially deposited on a glass substrate by electron beam evaporation. The influences of processing parameters (deposition rate, deposition temperature and working pressure) and thickness of ITO thin film on the optical, electrical properties and microstructure of ITO/MgF₂ composite thin film were studied. By applying 0.05 nm/s deposition rate, 400 ℃ deposition temperature, 2.3×10^-2 Pa working pressure and 10 nm ITO thickness, we obtained a substantial continuity and a satisfactory sheet resistance (1.94 kΩ/□) of the ITO layer with which the ITO/MgF₂ composite film’s average transmittance in the visible range (400—800 nm) reached 89.00%.

Key words: indium tin oxide (ITO) film anti-static space solar cell MgF₂ thin film electron beam evaporation glass cover

出版日期: 2017-09-10 发布日期: 2018-05-07

ZTFLH:

TB34

基金资助: 国家自然科学基金(51401080)

通讯作者: 周灵平:通讯作者,男,1964年生,博士,教授,博士研究生导师,研究方向为薄膜材料及电子封装材料 E-mail: lpzhou@hnu.edu.cn

作者简介: 金鹤:男,1991年生,硕士研究生,研究方向为薄膜材料 E-mail:1270645212@qq.com

引用本文:

金鹤, 周灵平, 朱家俊, 符立才, 杨武霖, 李德意. 空间太阳电池玻璃盖板表面超薄ITO防静电层的设计及制备工艺^*[J]. 《材料导报》期刊社, 2017, 31(17): 158-162.
JIN He, ZHOU Lingping, ZHU Jiajun, FU Licai, YANG Wulin, LI Deyi. The Design and Preparation Technique of Anti-static Layer Made of Ultra-thin ITO Film and Coated on Glass Cover of Space Solar Cell. Materials Reports, 2017, 31(17): 158-162.

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http://www.mater-rep.com/CN/10.11896/j.issn.1005-023X.2017.017.023 或 http://www.mater-rep.com/CN/Y2017/V31/I17/158

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