Abstract: In order to test the hardness characteristic of echelle grating thick Al film, so as to building blocks for the design of rulling tool, we test the echelle grating thick Al film by nanoindentation, and characteristic hardness about echelle grating thick Al film. First, we test hardness by using nanoindentation, and use the method of O&P to calculate hardness. Second, through the fitting and analysis of nanoindentation data, we know the hardness change rule and macroscopical hardness value of thick Al film. Estimates show that echelle grating thick Al film will occur indentation size effect in the nanoindentation testing (0—0.2 μm), and this phenomenon will show three regions, it do not decreases as the depth of compression increases.We use the method of Almasri & Voyiadji to characteristic this phenomenon that indentation size effect in the nanoindentation testing(0—0.2 μm). The hardness reappear change in 10—15 nm region, so we make contact analysis and metallographic test for thick Al film. Estimates show that thick Al film crystals is yield. In this paper, the indentation size effect of echelle grating thick Al film is characterized, and the reason of hardness change is explained from the perspective of crystal mechanics.
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