Magnetron Sputtering Deposition of Magnesium-Gallium Co-doped Transparent Zinc Oxide Semiconductor Thin Films and Their Properties
KANG Huai1, LU Zhou1, ZHONG Zhiyou1,2, LONG Hao1
1 College of Electronic Information Engineering, South-Central University for Nationalities, Wuhan 430074; 2 Hubei Key Laboratory of Intelligent Wireless Communications, South-Central University for Nationalities, Wuhan 430074
Abstract: Magnesium and gallium co-doped zinc oxide (MGZO) thin films were deposited onto quartz glass substrates by magnetron sputtering technique using a sintered ceramic target of MgO∶Ga2O3∶ZnO (2wt%∶2wt%∶96wt%). The effects of sputtering pressure on structural, electrical and optical properties of the deposited films were investigated by XRD, SEM, spectrophotometer and Hall effect measurement system. The results showed that all the obtained films are polycrystalline with a hexagonal wurtzite structure and grow preferentially in the (002) orientation. The sputtering pressure significantly affects the microstructure and optoelectronic characteristics, but hardly the optical bandgaps of the deposited films. The most favorable optoelectronic performance was observed in the MGZO thin film deposited at the sputtering pressure of 3.5 Pa, as it possesses the best crystal quality, the minimum tensile stress (8.29×10-2 GPa), the lowest electrical resistivity (1.62×10-3 Ω·cm), the highest average visible transmittance (87.8%) and the maximum figure of merit (4.76×103 Ω-1·cm-1). In addition, the optical bandgaps of the produced thin films were evaluated by extrapolation method and determined to be in the range of 3.41—3.44 eV which are hardly affected by the sputtering pressure.
康淮,陆轴,钟志有,龙浩. 磁控溅射制备镁镓共掺氧化锌透明半导体薄膜及其性能研究[J]. 《材料导报》期刊社, 2018, 32(11): 1938-1942.
KANG Huai, LU Zhou, ZHONG Zhiyou, LONG Hao. Magnetron Sputtering Deposition of Magnesium-Gallium Co-doped Transparent Zinc Oxide Semiconductor Thin Films and Their Properties. Materials Reports, 2018, 32(11): 1938-1942.
1 Yamamoto N, Makino H, Osone S, et al. Development of Ga-doped ZnO transparent electrodes for liquid crystal display panels[J].Thin Solid Films,2012,520(12):4131. 2 Gu J, Lu Z, Long L, et al. Preparation and crystalline characteristics of indium-tin-oxide TCO thin films[J].Journal of South-Central University of Nationalities (Natural Science Edition),2016,35(2):91(in Chinese). 顾锦华,陆轴,龙路,等.氧化铟锡TCO薄膜的制备及其结晶性能研究[J].中南民族大学学报(自然科学版),2016,35(2):91. 3 Park S, Tark S T, Lee J S, et al. Effects of intrinsic ZnO buffer layer based on P3HT/PCBM organic solar cells with Al-doped ZnO electrode[J].Solar Energy Materials and Solar Cells,2009,93(6-7):1020. 4 Zhong Z Y, Kang H, Lu Z, et al. Effect of devices structure on optical electrical field distribution of polymer solar cells[J].Journal of South-Central University of Nationalities (Natural Science Edition),2016,35(3):67(in Chinese). 钟志有,康淮,陆轴,等.器件结构对聚合物太阳能电池内部光电强分布的影响[J].中南民族大学学报(自然科学版),2016,35(3):67. 5 Karaagac H, Yengel E, Islam M S. Physical properties and heterojunction device demonstration of aluminum-doped ZnO thin films synthesized at room ambient via sol-gel method[J].Journal of Alloys and Compounds,2012,521(1):155. 6 Chen S B, Lan C. Effect of deposition temperature on structure and optical properties of zinc oxide films prepared by sputtering[J].Journal of South-Central University of Nationalities (Natural Science Edition),2016,35(2):97(in Chinese). 陈首部,兰椿.沉积温度对氧化锌薄膜结构和光学性能的影响[J].中南民族大学学报(自然科学版),2016,35(2):97. 7 Park C Y, Lee J H, Choi B H, Effects of surface treatment of ITO anode layer patterned with shadow mask technology on characteristics of organic light-emitting diodes[J].Organic Electronics,2013,14(12):3172. 8 Long H, Zhang Z C, Gu J H, et al. Effect of graded-composition transition layer on the performance of GaN-based light-emitting diodes[J].Journal of South-Central University of Nationalities (Na-tural Science Edition),2017,36(1):71(in Chinese). 龙浩,张智超,顾锦华,等.组分渐变过渡层对氮化镓基发光二极管性能的影响[J].中南民族大学学报(自然科学版),2017,36(1):71. 9 Kim H, Horwitz J S, Kim W H, et al. Doped ZnO thin films as anode materials for organic light-emitting diodes[J].Thin Solid Films,2002,420-421(1):539. 10 Cao H T, Sun C, Pei Z L, et al. Properties of transparent conducting ZnO∶Al oxide thin films and their application for molecular organic light-emitting diodes[J].Journal of Materials Science:Materials in Electronics,2004,14(1):169. 11 Chen S B, Lu Z, Lan C. Microsructure and crystalline characteristics of zinc oxide thin films[J].Journal of South-Central University of Nationalities (Natural Science Edition),2017,36(4):67(in Chinese). 陈首部,陆轴,兰椿.氧化锌薄膜的微观结构及其结晶性能研究[J].中南民族大学学报(自然科学版),2017,36(4):67. 12 Wu J L, Lin H Y, Su B Y, et al. Comparison of physical and electrical properties of GZO/ZnO buffer layer and GZO as source and drain electrodes of α-IGZO thin-film transistors[J].Journal of Alloys and Compounds,2014,592(1):35. 13 Wang H, Long H, Chen Z, et al. Fabrication and characterization of alternating-current-driven ZnO-based ultraviolet light-emitting diodes[J].Electronic Materials Letters,2015,11(4):664. 14 Tang Z K, Wong G K L, Yu P, et al. Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystalline thin films[J].Applied Physics Letters,1998,72(25):3270. 15 Fu Y Q, Luo J K, Du X Y, et al. Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: A review[J].Sensors and Actuators B: Chemical,2010,143(2):606. 16 Zheng K, Gu L, Sun D, et al. The properties of ethanol gas sensor based on Ti doped ZnO nanotetrapods[J].Materials Science and Engineering:B,2010,166(1):104. 17 Zhong Z Y, Lu Z, Long L, et al. Grain growth and microstructure of gallium-zinc oxide semiconductor thin films[J].Journal of South-Central University of Nationalities (Natural Science Edition),2016,35(1):75(in Chinese). 钟志有,陆轴,龙路,等.镓锌氧化物半导体薄膜的晶粒生长特性及其微结构研究[J].中南民族大学学报(自然科学版),2016,35(1):75. 18 Yi I J, Kim J H, Choi Y J, et al. A disposable biosensor with Prussian blue deposited electrode[J].Microelectronic Engineering,2006,83(4-9):1594. 19 Ozgur U, Alivov Y I, Liu C, et al. A comprehensive review of ZnO materials and devices[J].Journal of Applied Physics,2005,98(12):041301. 20 Zhong Z Y, Kang H, Lu Z, et al. Structure and optical properties of magnesium-doped zinc oxide thin films[J].Journal of South-Central University of Nationalities (Natural Science Edition),2017,36(1):64(in Chinese). 钟志有,康淮,陆轴,等.掺镁氧化锌薄膜结构及其光学性质的研究[J].中南民族大学学报(自然科学版),2017,36(1):64. 21 Ueno N, Yamamoto A, Uchida Y, et al. Low-temperature hydrothermal synthesis of ZnO nanosheet using organic/inorganic compo-site as seed layer[J].Materials Letters,2012,86(1):65. 22 Rao T P, Kumar M C S. Physical properties of Ga-doped ZnO thin films by spray pyrolysis[J].Journal of Alloys and Compounds,2010,506(2):788. 23 Kim H, Piqué A, Horwitz J S, et al. Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices[J].Thin Solid Films,2000,377-378(1):79. 24 Liu H W, Liu H F, Le Q, et al. Study on microwave synthesis and properties of butterfly-type ultrafine CeO2[J].Journal of South-Central University of Nationalities (Natural Science Edition),2016,35(3):17(in Chinese). 刘浩文,刘荷芬,乐琦,等.微波法合成蝴蝶型超细CeO2及其性能研究[J].中南民族大学学报(自然科学版),2016,35(3):17. 25 Barhoumi A, Leroy G, Duponchel B, et al. Aluminum doped ZnO thin films deposited by direct current sputtering: Structural and optical properties[J].Superlattices and Microstructures,2015,82:483. 26 Huang Z, Liu X, Wu L, et al. Preparation and photocatalytic pro-perties of α-Bi2O3/TiO2 nanoparticles[J].Journal of South-Central University of Nationalities (Natural Science Edition),2016,35(1):17(in Chinese). 黄正喜,刘献平,吴腊梅,等.α-Bi2O3/TiO2纳米粒子的制备及其光催化性能的研究[J].中南民族大学学报(自然科学版),2016,35(1):17(in Chinese). 27 Gu J H, Long L, Lu Z, et al. Optical, electrical and structural pro-perties of aluminum-doped nano-zinc oxide thin films deposited by magnetron sputtering[J].Journal of Materials Science: Materials in Electronics,2015,26(2):734. 28 Ma Q B, Ye Z Z, He H P, et al. Effects of deposition pressure on the properties of transparent conductive ZnO∶Ga films prepared by DC reactive magnetron sputtering[J].Materials Science in Semiconductor Processing,2007,10(1):167. 29 Li J L, Gong M, Zhao F Z, et al. In situ hydrothermal synthesis of mesoporous LaCoO3/MCF catalysts for CO oxidation reaction[J].Journal of South-Central University of Nationalities(Natural Science Edition),2016,35(1):7(in Chinese). 李金林,龚渺,赵福真,等.原位水热法合成介孔LaCoO3/MCF催化剂用于CO氧化反应[J].中南民族大学学报(自然科学版),2016,35(1):7. 30 You Z Z, Hua G J, Yong Y C, et al. Microstructural and optoelectrical properties of transparent conducting ZnO:Al thin films for organic solar cells[J].Crystal Research and Technology,2012,47(10):1039. 31 Yang B, Liu Y, Liu H D, et al. Microstructure and mechanical pro-perties of AlTiSiN/AlCrSiN multilayer coatings[J].Journal of South-Central University of Nationalities (Natural Science Edition),2016,35(3):13(in Chinese). 杨兵,刘琰,刘辉东,等.AlTiSiN/AlCrSiN纳米多层复合涂层的结构及性能研究[J].中南民族大学学报(自然科学版),2016,35(3):13. 32 Singh A K. A comparative study on optical properties of Se-Zn-In and Se-Zn-Te-In chalcogenide glasses[J].Optik,2013,124(15):2187. 33 Gu J H, Lu Z, Kang H. Preparation and properties of Mo-doped ZnO thin films prepared by magnetron sputtering[J].Journal of South-Central University of Nationalities (Natural Science Edition),2017,36(2):66(in Chinese). 顾锦华,陆轴,康淮.钼掺杂氧化锌薄膜的制备及其性能研究[J].中南民族大学学报(自然科学版),2017,36(2):66. 34 Hua Q L, Fu R, Yang W, et al. Effect of sputtering time on the properties of boron-doped ZnO thin films[J].Materials Review B: Research Papers,2013,27(9):16(in Chinese). 化麒麟,付蕊,杨雯,等.溅射时间对硼掺杂ZnO薄膜性能的影响[J].材料导报:研究篇,2013,27(9):16. 35 Zhong Z Y, Kang H, Lu Z, et al. Effect of doping on optical properties of zinc oxide semiconductor thin films[J].Journal of South-Central University of Nationalities (Natural Science Edition),2017,36(3):61(in Chinese). 钟志有,康淮,陆轴,等.掺杂对ZnO半导体薄膜光学性能的影响[J].中南民族大学学报(自然科学版),2017,36(3):61.
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2018, Vol. 32 
