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《材料导报》期刊社  2017, Vol. 31 Issue (18): 11-15    https://doi.org/10.11896/j.issn.1005-023X.2017.018.003
  材料研究 |
热氧化ZnS∶Ga制备ZnO∶Ga薄膜及其光致发光性能*
张小红1, 杨卿1,2, 张旭晨1, 马研1, 易筱银1
1 西安理工大学材料科学与工程学院,西安 710048;
2 陕西省电工材料与熔渗技术重点实验室,西安 710048
Preparation of ZnO∶Ga Films by Thermal Oxidation of ZnS∶Ga and Their Photoluminescent Properties
ZHANG Xiaohong1, YANG Qing1,2, ZHANG Xuchen1, MA Yan1, YI Xiaoyin1
1 Faculty of Materials Science and Engineering, Xi’an University of Technology, Xi’an 710048;
2 Shaanxi Province Key Laboratory for Electrical Materials and Infiltration, Xi’an 710048
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摘要 利用化学浴沉积法制备了不同Ga掺杂量的ZnS (ZnS∶Ga)薄膜,并采用热氧化法生长了Ga掺杂ZnO(ZnO∶Ga)薄膜,研究了ZnO∶Ga薄膜的表面形貌、成分及光致发光性能。结果表明:Ga的掺入改变了ZnO薄膜的微观结构、化学计量比、氧空位的相对含量,进而影响了薄膜的光致发光性能。随着Ga掺杂量增加,ZnO薄膜的致密度提高,颗粒尺寸减小;同时改善了ZnO的化学计量比,氧空位相对含量随之减少;ZnO薄膜的紫外光与可见光强度比增大。
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张小红
杨卿
张旭晨
马研
易筱银
关键词:  ZnS薄膜  ZnO薄膜  Ga掺杂  热氧化  光致发光    
Abstract: Ga-doped ZnS (ZnS∶Ga) films with different Ga content were prepared by chemical bath deposition, and then the thermal oxidation in the air was subsequently performed for the growth of Ga-doped ZnO (ZnO∶Ga) films. The microstructures, surface compositions, and photoluminescent properties of the ZnO∶Ga films were investigated. The results showed that the microstructure, stoichiometric ratio, and the relative content of oxygen vacancy of ZnO films were altered due to Ga doping, which then affected the photoluminescent properties of ZnO films. The increase of Ga content led to improved compactness and refined particle size of the product, resulted in a more near-stoichiometric composition of ZnO, lowered the relative content of oxygen vacancy, also enhanced the IUV/IVis ratio.
Key words:  ZnS film    ZnO film    Ga doping    thermal oxidation    photoluminescence
               出版日期:  2017-09-25      发布日期:  2018-05-08
ZTFLH:  TB43  
基金资助: 国家自然科学基金(51202191);陕西省自然科学基础研究计划(2015JM5179);陕西省教育厅重点实验室科学研究计划项目(15JS072)
通讯作者:  杨卿:通讯作者,男,1982年生,博士,教授,研究方向为半导体金属氧化物 E-mail:yangqing@xaut.edu.cn   
作者简介:  张小红:女,1991年生,硕士研究生,研究方向为镓掺杂氧化锌 E-mail:zhangxiaohongfan@163.com
引用本文:    
张小红, 杨卿, 张旭晨, 马研, 易筱银. 热氧化ZnS∶Ga制备ZnO∶Ga薄膜及其光致发光性能*[J]. 《材料导报》期刊社, 2017, 31(18): 11-15.
ZHANG Xiaohong, YANG Qing, ZHANG Xuchen, MA Yan, YI Xiaoyin. Preparation of ZnO∶Ga Films by Thermal Oxidation of ZnS∶Ga and Their Photoluminescent Properties. Materials Reports, 2017, 31(18): 11-15.
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http://www.mater-rep.com/CN/10.11896/j.issn.1005-023X.2017.018.003  或          http://www.mater-rep.com/CN/Y2017/V31/I18/11
1 Service R F. Will UV lasers beat the blues[J]. Science, 1997,276(5314):895.
2 Wang Z L, Song J H. Piezoelectric nanogenerators based on zinc oxi-de nanowire arrays[J]. Science, 2006,312(5771):242.
3 Ong K P, Singh D J, Wu P. Analysis of the thermoelectric properties of n-type ZnO[J]. Phys Rev B, 2011,83(11):115110.
4 Cheng P F, Zhang Y T, Yu H W. The research development of the point defect structure and p-type transition of ZnO[J]. Mater Rev: Rev, 2011,25(1):22(in Chinese).
成鹏飞, 张英堂, 余花娃. ZnO的点缺陷结构与p型化转变的研究进展[J]. 材料导报: 综述篇, 2011,25(1):22.
5 Kim J B, Jin S B, Wen L, et al. Low temperature, high conductivity Al-doped ZnO film fabrication using modified facing target sputtering[J]. Thin Solid Films, 2015,587:88.
6 Ma Q B, Ye Z Z, He H P, et al. Highly near-infrared reflecting and transparent conducting ZnO∶Ga films: Substrate temperature effect[J]. J Phys D: Appl Phys, 2008,41(5):055302.
7 Ding L H, Yang Y X, Jiang X W, et al. Photoluminescence of undoped and B-doped ZnO in silicate glasses[J]. J Non-Crystalline So-lids, 2008,354(12):1382.
8 Yang Q, Zhou X H, Nukui T, et al. Time-resolved ultraviolet photoluminescence of ZnO/ZnGa2O4 composite layer[J]. AIP Adv, 2014,4(2):027101.
9 Su J F, Tang C J, Niu Q, et al. Microstructure, optical and electrical properties of Al-doped ZnO films grown by MOCVD [J]. Appl Surf Sci, 2012,258(22):8595.
10Yang S H, Zhang Y L, Wang X S, et al. Preparation of Y doped ZnO films by sol-gel method and investigation of their optoelectrical properties[J]. Mater Rev: Res, 2012,26(3):24(in Chinese).
阳生红, 张曰理, 王旭升, 等. 溶胶-凝胶法制备Y掺杂ZnO薄膜及其光电性能研究[J]. 材料导报: 研究篇, 2012,26(3):24.
11Cao P, Bai Y. Structure and optical properties of electrodeposited Nd-doped ZnO thin films[J]. Rare Metal Mater Eng, 2016,45(6):1419.
12Yang Q, Saeki Y, Izumi S, et al. Novel ultraviolet photoluminescence of ZnO/ZnGa2O4 composite layers[J]. Appl Sur Sci, 2010,256(2):6928.
13Zou Y S, Yang H, Wang H P, et al. Microstructure, optical and photoluminescence properties of Ga-doped ZnO films prepared by pulsed laser deposition[J]. Physica B, 2013,414(4):7.
14Shinde S S, Shinde P S, Oh Y W, et al. Structural, optoelectronic, luminescence and thermal properties of Ga-doped zinc oxide thin films [J]. Appl Surf Sci, 2012,258(24):9969.
15Zhou X H, Yang Q, Zou J T, et al. Effects of growth conditions on the microstructures and photoluminescence properties of Ga-doped ZnO films[J]. Acta Phys Sin, 2015,64(8):087803(in Chinese).
周小红, 杨卿, 邹军涛, 等. 生长条件对Ga掺杂ZnO薄膜微观结构及光致发光性能的影响[J].物理学报, 2015,64(8):087803.
16Chelvanathan P, Yusoff Y, Haque F, et al. Growth and characte-rization of RF-sputtered ZnS thin film deposited at various substrate temperatures for photovoltaic application[J]. Appl Surf Sci, 2015,334:138.
17Islam M M, Ishizuka S, Yamada A, et al. CIGS solar cell with MBE-grown ZnS buffer layer[J]. Solar Energy Mater Solar Cells, 2009,93(6):970.
18Wei A X, Liu J, Zhuang M X, et al. Preparation and characterization of ZnS thin films prepared by chemical bath deposition[J]. Mater Sci Semiconductor Processing, 2013,16(6):1478.
19Akhtar M S, Malik M A, Alghamdi Y G, et al. Chemical bath de-position of Fe-doped ZnS thin films: Investigations of their ferromagnetic and half-metallic properties[J]. Mater Sci Semiconductor Processing, 2015,39:283.
20Huang C M, Chen L C, Pan G T, et al. Effect of Ni on the growth and photoelectronchemical properties of ZnS thin films[J]. Mater Chem Phys, 2009,117(1):156.
21Gilbert B, Frazer B H, Zhang H, et al. X-ray absorption spectroscopy of the cubic and hexagonal polytypes of zinc sulfide[J]. Phys Rev B, 2002,66(24):245205.
22Liu T Z, Ke H, Zhang H, et al. Effect of four different zinc salts and annealing treatment on growth, structural, mechanical and optical properties of nanocrystalline ZnS thin films by chemical bath de-position[J]. Mater Sci Semiconductor Processing, 2014,26(1):301.
23Zhou L M, Tang N, Wu S M, et al. Influence of deposition time on ZnS thin films performance with chemical bath deposition[J]. Phys Procedia, 2011,22:354.
24Liu W. Low temperature synthesis of hexagonal phase ZnS nanocrystals by thermolysis of an air-stable single-source molecular precursor in air[J]. Mater Lett, 2006,60(4):551.
25Xu D, Duan X C, Zhu X B, et al. Effect of Al doping concentration on the structure,electrical and optical properties of ZnO∶Al films[J]. Mater Rev, 2008,22(S1):63(in Chinese).
徐迪, 段学成, 朱协彬, 等. Al掺杂量对ZnO∶Al薄膜微观结构和光电性能的影响[J]. 材料导报, 2008,22(S1):63.
26Wu Y H, Li C P, Li M G, et al. Microstructural and optical properties of Ta-doped ZnO films prepared by radio frequency magnetron sputtering[J]. Ceram Int, 2016,42(9):10847.
27Hsieh P T, Chen Y C, Kao K S, et al. Luminescence mechanism of ZnO thin film investigated by XPS measurement[J]. Appl Phys A, 2008,90(2):317.
28Li D H, Yu S F, Abiyasa A P, et al. Strain dependence of lasing mechanisms in ZnO epilayers[J]. Appl Phys Let, 2005,86(26):261111.
29Yun E J, Jung J W, Lee B C, et al. Characterization of the properties of high-energy electron irradiated Al-doped ZnO thin films prepared by rf magnetron sputtering using Ar plasma[J]. Surf Coat Technol, 2011,205(21-22):5130.
30Wang Q P, Zhang D H, Ma H L, et al. Photoluminescence of ZnO films prepared by r.f. sputtering on different substrates[J]. Appl Surf Sci, 2003,220(1-4):12.
31Zhang D H, Wang Q P, Xue Z Y. Photoluminescence of ZnO films excited with light of different wavelength[J]. Appl Surf Sci, 2003,207(1-4):20.
32Xu P S, Sun Y M, Shi C S, et al. Electronic structure of ZnO and its defects[J]. Sci China Series A: Mathematics, 2001,44(9):1174.
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