阴极碳靶电流对物理气相沉积制备ta-C薄膜性能的影响

doi:10.11896/cldb.24030121

材料导报

2025, Vol. 39

Issue (10): 24030121-5 https://doi.org/10.11896/cldb.24030121

金属与金属基复合材料

阴极碳靶电流对物理气相沉积制备ta-C薄膜性能的影响

温鑫¹, 李多生^1,*, 叶寅¹, 徐锋², 郎文昌³, 刘俊红³, 于爽爽¹, 余欣秀¹

1 南昌航空大学材料科学与工程学院,南昌 330063
2 南京航空航天大学机电学院,南京 210016
3 苏州艾钛科纳米科技有限公司,江苏苏州 215163

Effect of Cathode Carbon Target Current on Properties of ta-C Thin Films Prepared by Physical Vapor Deposition

WEN Xin¹, LI Duosheng^1,*, YE Yin¹, XU Feng², LANG Wenchang³, LIU Junhong³, YU Shuangshuang¹, YU Xinxiu¹

1 School of Materials Science and Engineering, Nanchang Hangkong University, Nanchang 330063, China
2 School of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
3 Suzhou Ion-tech Nano Technology Co., Ltd., Suzhou 215163, Jiangsu, China

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摘要采用物理气相沉积的方法,利用真空阴极离子沉积系统,通过改变阴极碳靶电流在硬质合金表面沉积四面体非晶碳膜(ta-C)薄膜。通过改变阴极碳靶电流(55～95 A),探究电流对ta-C薄膜综合性能的影响,并对ta-C薄膜的表面形态、化学结构、力学性能和摩擦性能等进行了分析。结果显示:阴极碳靶电流为55 A时,薄膜表面最光滑致密,sp³键含量最大为63.5%,摩擦系数最小为0.019 3,硬度和弹性模量分别为33.46 GPa和392.34 GPa,获得综合性能优良的ta-C薄膜。

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	温鑫
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	刘俊红
	于爽爽
	余欣秀

关键词: 阴极碳靶电流 ta-C薄膜 sp³杂化键含量摩擦性能力学性能

Abstract: In this work, tetrahedral amorphous carbon (ta-C) film was deposited on the surface of cemented carbide by changing the cathode carbon target current using a vacuum cathode ion deposition system. By changing the cathode carbon target current (55—95 A), the effect of current on the comprehensive properties of ta-C films was explored. The surface morphology, chemical structure, mechanical properties, and friction properties of ta-C films were analyzed. The results showed that when the cathode carbon target current was 55 A, the surface of the film was the smoothest and densest, the sp³ hybrid bond content was the maximum 63.5%, the friction coefficient was the minimum 0.019 3, and the hardness and elastic modulus were 33.46 GPa and 392.34 GPa respectively. ta-C films with excellent comprehensive properties could be obtained.

Key words: cathode carbon target current ta-C film sp³ hybrid bond content frictional property mechanical property

出版日期: 2025-05-25 发布日期: 2025-05-13

ZTFLH:

TG174

基金资助: 国家自然科学基金(51562027;52375441);江西省重点研发计划重点项目(20201BBE51001);江苏省重点研发计划(产业前瞻与关键核心技术)(BE2021055)

通讯作者: *李多生,博士,南昌航空大学材料科学与工程学院教授。研究领域为新型碳纳米材料、新型电子封装、3D打印及激光表面工程及数值仿真等。duosheng.li@nchu.edu.cn

作者简介: 温鑫,南昌航空大学材料科学与工程学院硕士研究生,在李多生教授的指导下进行研究。目前主要研究领域为新型碳纳米材料。

引用本文:

温鑫, 李多生, 叶寅, 徐锋, 郎文昌, 刘俊红, 于爽爽, 余欣秀. 阴极碳靶电流对物理气相沉积制备ta-C薄膜性能的影响[J]. 材料导报, 2025, 39(10): 24030121-5.
WEN Xin, LI Duosheng, YE Yin, XU Feng, LANG Wenchang, LIU Junhong, YU Shuangshuang, YU Xinxiu. Effect of Cathode Carbon Target Current on Properties of ta-C Thin Films Prepared by Physical Vapor Deposition. Materials Reports, 2025, 39(10): 24030121-5.

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https://www.mater-rep.com/CN/10.11896/cldb.24030121 或 https://www.mater-rep.com/CN/Y2025/V39/I10/24030121

1 Fan S Y, Kuang T C, Lin S S, et al. Materials Reports, 2023, 37(8), 24 (in Chinese).
范舒瑜, 匡同春, 林松盛, 等. 材料导报, 2023, 37(8), 24.
2 Ma L J, Tan F H, Li D Z, et al. Tool Technology, 2017, 51(5), 26 (in Chinese).
马廉洁, 谭福慧, 李德震, 等. 工具技术, 2017, 51(5), 26.
3 Liu K, Kang J J, Yue W, et al. Materials Reports, 2019, 33(19), 3251 (in Chinese).
刘康, 康嘉杰, 岳文, 等. 材料导报, 2019, 33(19), 3251.
4 Ding Y Z, Ye Y, Li D S, et al. Acta Physica Sinica, 2023, 72(6), 367(in Chinese).
丁业章, 叶寅, 李多生, 等. 物理学报, 2023, 72(6), 367.
5 Chen X Y. Petrochemical Technology, 2020, 27(8), 13 (in Chinese).
陈行易. 石化技术, 2020, 27(8), 13.
6 Erdemir A. Tribology International, 2004, 37(11-12), 1005.
7 Li J, Tong H H, Wang K, et al. Journal of Functional Materials, 2020, 51(8), 8204 (in Chinese).
李健, 童洪辉, 王坤, 等. 功能材料, 2020, 51(8), 8204.
8 Vetter J. Surface and Coatings Technology, 2014, 257(10), 213.
9 Ferreira R, Martins J, Carvalho Ó, et al. Materials and Manufacturing Processes, 2020, 35(5), 498.
10 Wang M L, Cheng W J, Lin G Q. Rare Metal Materials and Engineering, 2022, 51(8), 3095 (in Chinese).
王明磊, 程玮杰, 林国强. 稀有金属材料与工程, 2022, 51(8), 3095.
11 Wei J, Guo P, Liu L, et al. Applied Surface Science, 2020, 516, 146115.
12 Frolov V D, Zavedeev E V, Komlenok M S, et al. Nanotechnologies in Russia, 2016, 11, 461.
13 Ferrari A C, Kleinsorge B, Morrison N A, et al. Journal of Applied Physics, 1999, 85(10), 7191.
14 Zavaleyev V, Walkowicz J, Kuznetsova T, et al. Thin Solid Films, 2017, 638, 153.
15 Etula J, Wester N, Sainio S, et al. RSC Advances, 2018, 8(46), 26356.
16 Han L, Shao H X, He L, et al. Acta Physica Sinica, 2012, 61(10), 349 (in Chinese).
韩亮, 邵鸿翔, 何亮, 等. 物理学报, 2012, 61(10), 349.
17 Guo T, Zuo X, Guo P, et al. Surface Technology, 2017, 46(4), 143.
郭婷, 左潇, 郭鹏, 等. 表面技术, 2017, 46(4), 143.
18 Wu Y R, Xie F, Zhang Y X, et al. Heat Treatment of Metals, 2022, 47(6), 202 (in Chinese).
吴一若, 谢峰, 张月霞, 等. 金属热处理, 2022, 47(6), 202.
19 Yan S F. Research on modification of medical metal materials coated with diamond film. Master’s Thesis, Sichuan University, China, 2004 (in Chinese).
闫双峰. 金刚石薄膜涂覆医用金属材料的改性研究. 硕士学位论文, 四川大学, 2004.
20 Ding J C, Dai W, Zhang T F, et al. Thin Solid Films, 2018, 663, 159.
21 Guo T, Kong C, Li X, et al. Applied Surface Science, 2017, 410, 51.
22 Xue Q J, Wang L P. Diamond-like carbon-based thin film materials, Science Press, China, 2012, pp.471 (in Chinese).
薛群基, 王立平. 类金刚石碳基薄膜材料, 北京科学出版社, 2012, pp.471.
23 Kong C, Guo P, Sun L, et al. Surface and Coatings Technology, 2018, 342, 167.
24 Zhao F, Li H, Ji L, et al. Diamond and Related Materials, 2010, 19(4), 342.
25 Liu Y, Erdemir A, Meletis E I. Surface and Coatings Technology, 1996, 86, 564.
26 Pang X, Shi L, Wang P, et al. Surface and Interface Analysis 2009, 41(12-13), 924.
27 Chang C L, Jao J Y, Chang T C, et al. Diamond and Related Materials, 2005, 14(11-12), 2127.

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