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材料导报  2019, Vol. 33 Issue (Z2): 580-583    
  高分子与聚合物基复合材料 |
KrF激光刻蚀制备300 nm自支撑聚酰亚胺膜
刘仁臣, 陆静
吉林大学珠海学院物理教学中心,珠海 519041
Preparation of 300 nm PI Self-supporting Film Using KrF Laser Ablation
LIU Renchen, LU Jing
Physics Center of Zhuhai College, Jilin University, Zhuhai 519041
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摘要 本工作探讨了微纳米量级聚酰亚胺(PI)自支撑薄膜的制备。以4,4′-二氨基二苯醚(ODA)和均苯四甲酸二酐(PMDA)为单体合成聚酰胺酸(PAA)溶液。经热亚胺化后脱膜得到厚度为900 nm的自支撑PI薄膜。亚胺化程度用傅里叶变换红外光谱仪(FT-IR)测试,表面形貌用透射式显微镜观测。结果显示,在低于250 ℃下制备的ZnO薄膜适合作为脱膜剂;采用KrF准分子激光对薄膜刻蚀,当能量密度为45 mJ/cm2时刻蚀110个脉冲,得到了表面平整且厚度为300 nm的自支撑PI薄膜。
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刘仁臣
陆静
关键词:  聚酰亚胺  自支撑  脱膜  激光刻蚀    
Abstract: To discuss the preparation of micro-nano polyimide (PI) self-supporting film, polyamic acid (PAA) solution were synthesized by using pyro-mellitic dianhydride and 4,4′-oxydianiline as monomers. Then 900 nm self-supporting PI film acquired through thermal imidization and demolding. Degree of imidization was investigated with Fourier transform infrared (FT-IR) spectroscopy, surface morphology was observed by projective microscope. Results showed that ZnO thin film sputtered less than 250 ℃ was the optimum demolder and KrF excimer laser (wavelength: 248 nm) etched PI film 110 pulses at 45 mJ/cm2 laser fluence, 300 nm self-supporting PI film would be acquired.
Key words:  polyimide    self-supporting    demold    laser ablation
               出版日期:  2019-11-25      发布日期:  2019-11-25
ZTFLH:  0436.1  
基金资助: 广东省普通高校重点科研平台和科研项目(2018KTSCX306);吉林大学珠海学院创新培育工程重点项目(2018XJCQSQ047);高等教育教学研究与改革项目(ZLGC20191004, 2019JZDJ034)
通讯作者:  744894076@qq.com   
作者简介:  刘仁臣,吉林大学珠海学院讲师,2010年9月至2013年9月博士就读于同济大学物理科学与工程学院。以第一作者在国内外学术期刊上发表论文20余篇,申请国家发明专利2项,其中授权1项。研究工作主要围绕国家重点发展的薄膜太阳能电池领域和微纳结构的制备等。
引用本文:    
刘仁臣, 陆静. KrF激光刻蚀制备300 nm自支撑聚酰亚胺膜[J]. 材料导报, 2019, 33(Z2): 580-583.
LIU Renchen, LU Jing. Preparation of 300 nm PI Self-supporting Film Using KrF Laser Ablation. Materials Reports, 2019, 33(Z2): 580-583.
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http://www.mater-rep.com/CN/  或          http://www.mater-rep.com/CN/Y2019/V33/IZ2/580
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