Abstract: To discuss the preparation of micro-nano polyimide (PI) self-supporting film, polyamic acid (PAA) solution were synthesized by using pyro-mellitic dianhydride and 4,4′-oxydianiline as monomers. Then 900 nm self-supporting PI film acquired through thermal imidization and demolding. Degree of imidization was investigated with Fourier transform infrared (FT-IR) spectroscopy, surface morphology was observed by projective microscope. Results showed that ZnO thin film sputtered less than 250 ℃ was the optimum demolder and KrF excimer laser (wavelength: 248 nm) etched PI film 110 pulses at 45 mJ/cm2 laser fluence, 300 nm self-supporting PI film would be acquired.
刘仁臣, 陆静. KrF激光刻蚀制备300 nm自支撑聚酰亚胺膜[J]. 材料导报, 2019, 33(Z2): 580-583.
LIU Renchen, LU Jing. Preparation of 300 nm PI Self-supporting Film Using KrF Laser Ablation. Materials Reports, 2019, 33(Z2): 580-583.
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