基于MDI含量调控的聚氨酯泡沫成型过程力学性能与微观结构多尺度研究

doi:10.11896/cldb.25040259

材料导报

2026, Vol. 40

Issue (9): 25040259-8 https://doi.org/10.11896/cldb.25040259

高分子与聚合物基复合材料

基于MDI含量调控的聚氨酯泡沫成型过程力学性能与微观结构多尺度研究

周慧峰, 刘科甫, 梁璐敏, 胡名豪, 郭柳巍, 周应可, 彭进, 宋旭东^*

河南工业大学材料科学与工程学院,郑州 450001

Multi-scale Study of Mechanical Properties and Microstructure of PolyurethaneFoam Molding Process Based on the Regulation of MDI Content

ZHOU Huifeng, LIU Kefu, LIANG Lumin, HU Minghao, GUO Liuwei, ZHOU Yingke, PENG Jin, SONG Xudong^*

School of Materials Science and Engineering, University of Technology Henan, Zhengzhou 450001, China

摘要
参考文献
相关文章
推荐阅读
Metrics

下载:

全文 ( PDF ) ( 73754KB )
输出: BibTeX | EndNote (RIS)

摘要聚氨酯泡沫(PUF)抛光垫作为晶圆等电子元器件化学机械抛光(CMP)中的关键耗材,其硬度、韧性及气孔结构的协同优化是提升抛光性能的核心。本研究通过泡沫生长热管理与力学性能表征方面系统地探讨了4,4′-二苯基甲烷二异氰酸酯(MDI)含量对PUF抛光垫微观结构、物理性能及力学性能的影响机制。实验结果表明,当MDI含量由15 phr增至40 phr时,PUF的抗压强度从0.25 MPa显著提升至2.69 MPa(增幅976%),拉伸强度由1.16 MPa增长至2.85 MPa(增幅145%),断裂伸长率由101.8%减小至15.6%(降幅85%),邵氏硬度则从64.5提升至90.4(增幅40%)。同时,气孔孔径显著减小,气孔分布更加均匀,泡沫结构更为均匀致密。MDI与聚醚多元醇发生交联反应,形成高交联密度的聚氨酯网络。通过调控MDI含量,建立了MDI配比-网络结构-力学性能的定量构效关系,为开发新一代高性能聚氨酯抛光垫提供了可控化学改性的理论框架与工艺优化策略。

	服务
	把本文推荐给朋友
	加入引用管理器
	E-mail Alert
	RSS
	作者相关文章
	周慧峰
	刘科甫
	梁璐敏
	胡名豪
	郭柳巍
	周应可
	彭进
	宋旭东

关键词: 二苯基甲烷二异氰酸酯聚氨酯泡沫温度压缩强度结构调控

Abstract: Polyurethane foam (PUF) polishing pads, serving as critical consumables in chemical mechanical polishing (CMP) for semiconductor wafers and electronic components, require synergistic optimization of hardness, toughness, and pore architecture to enhance polishing perfor-mance. This study systematically investigates the mechanistic effects of 4, 4′-diphenylmethane diisocyanate (MDI) content on the microstructure, physical properties, and mechanical behavior of PUF pads through thermal management of foam growth and comprehensive mechanical characterization. The experimental results show that when the MDI content increases from 15 phr to 40 phr, the compressive strength of PUF significantly increases from 0.25 MPa to 2.69 MPa (an increase of 976%), the tensile strength rises from 1.16 MPa to 2.85 MPa (an increase of 145%), the elongation at break decreases from 101.8% to 15.6% (a decrease of 85%), and the Shore hardness increases from 64.5 to 90.4 (an increase of 40%). Concurrently, the foam exhibits reduced pore size, enhanced pore uniformity, and densified cellular structures. These variations arise from intensified crosslinking reactions between MDI and polyether polyol, forming a highly crosslinked polyurethane network. By correlating MDI dosage with network architecture evolution, this work establishes a quantitative structure-property relationship and proposes a chemically controllable modification strategy, offering a theoretical framework and process optimization pathway for designing next-generation high-performance PUF CMP pads.

Key words: diphenylmethane diisocyanate polyurethane foam temperature compression strength structural modulation

收稿日期: 2026-05-10 出版日期: 2026-05-10 发布日期: 2026-05-18

ZTFLH:

TQ328.3

基金资助: 河南工业大学高层次人才基金(2022BS024);河南省重点研发与推广专项(科技攻关)(242102231016);河南省重点研发专项 (241111233100)

通讯作者: ^*宋旭东,河南工业大学材料科学与工程学院,博士,讲师,硕士研究生导师。毕业于燕山大学亚稳材料全国重点实验室,目前从事超精密加工用超硬材料工具的结构调控及磨抛机理研究工作。songxudong@haut.edu.cn

作者简介: 周慧峰,河南工业大学材料科学与工程学院硕士研究生,在宋旭东老师的指导下进行研究。目前主要研究领域为聚氨酯泡沫抛光垫。

引用本文:

周慧峰, 刘科甫, 梁璐敏, 胡名豪, 郭柳巍, 周应可, 彭进, 宋旭东. 基于MDI含量调控的聚氨酯泡沫成型过程力学性能与微观结构多尺度研究[J]. 材料导报, 2026, 40(9): 25040259-8.
ZHOU Huifeng, LIU Kefu, LIANG Lumin, HU Minghao, GUO Liuwei, ZHOU Yingke, PENG Jin, SONG Xudong. Multi-scale Study of Mechanical Properties and Microstructure of PolyurethaneFoam Molding Process Based on the Regulation of MDI Content. Materials Reports, 2026, 40(9): 25040259-8.

链接本文:

https://www.mater-rep.com/CN/10.11896/cldb.25040259 或 https://www.mater-rep.com/CN/Y2026/V40/I9/25040259

1 Lee H, Kim H, Jeong H, et al.International Journal of Precision Engineering and Manufacturing-Green Technology, 2022, 9(1), 349.
2 Luo Z, Zhang Z, Zhao F, et al.Materials Today Sustainability, 2024, 27, 100841.
3 Iannaccone G, Sbrana C, Morelli I, et al.IEEE Access, 2021, 9, 139446.
4 Zhong Z W.International Journal of Advanced Manufacturing Technology, 2020, 109(5), 1419.
5 Ma J H, Cheng J, Chen J C.et al.China Surface Engineering, DOI: 10.11933/j.issn.1007-9289.20241016001.
马家辉, 程洁, 陈金池, 等.中国表面工程, DOI: 10.11933/j.issn.1007-9289.20241016001.
6 Ma M L.Preparation and performance research of porous polyurethane polishing materials.Master’s Thesis, Shaanxi University of Science and Technology, China, 2024 (in Chinese).
马明兰.多孔聚氨酯抛光材料的制备及性能研究, 硕士学位论文, 陕西科技大学, 2024.
7 Murata J, Yodogawa K, Ban K.et al.International Journal of Machine Tools and Manufacture, 2017, 114, 1.
8 Seo J.Journal of Materials Research, 2021, 36, 235.
9 Wang Z, Wang C, Gao Y, et al.Polymers, 2023, 15(18), 3818.
10 Saha M C, Kabir M E, Jeelani S.Materials Science and Engineering: A, 2008, 479(1), 213.
11 Zhong Z W.Materials and Manufacturing Processes, 2020, 35(12), 1279.
12 Xie M, Pan Y, An Z, et al.Advances in Materials Science and Engineering, 2022, 2022(1), 8723269.
13 Fan T, Xue S S, Zhu W B, et al.ACS Applied Materials & Interfaces, 2022, 14(11), 13778.
14 Chen M, Jiang Z, Zhu M, et al.Materials, 2024, 17(11), 2759.
15 Eling B, Tomović Ž, Schädler V.Macromolecular Chemistry and Physics, 2020, 221(14), 2000114.
16 Xu Y W, Liu L J.China Adhesives, 2025, 34(4), 11 (in Chinese).
徐玉文, 刘良军.中国胶粘剂, 2025, 34(4), 11.
17 Maamoun A A, Mahmoud A A, Nasr E A, et al.Journal of Polymer Research, 2019, 26, 1.
18 Peyrton J, Avérous L.Materials Science & Engineering R-Reports, 2021, 145, 100608.
19 Prociak A, Kurańska M, Cabulis U, et al.Industrial Crops and Products, 2018, 120, 262.
20 Fu Y, Qiu C, Ni L, et al.Construction and Building Materials, 2024, 447, 138068.
21 Zhong Z W.Materials and Manufacturing Processes, 2020, 35(12), 1279.
22 Prasad A, Fotou G, Li S.Journal of Materials Research, 2013, 28(17), 2380.
23 Guo Q Q, Fang Y X, Song Q H.Fine chemical processes, Chemical Industry Press, China, 2024, pp.485 (in Chinese).
郭清泉, 方岩雄, 宋启煌.精细化工工艺学, 化学工业出版社, 2024, pp.485.
24 Gama N V, Ferreira A, Barros-Timmons A.Materials, 2018, 11(10), 1841.
25 Kaikade D S, Sabnis A S.Polymer Bulletin, 2023, 80(3), 2239.
26 Alarifi I M.Advanced Industrial and Engineering Polymer Research, 2023, 6(4), 451.
27 Zhang C, Tong X, Deng C, et al.Journal of Cellular Plastics, 2020, 56(3), 279.
28 Guo N S, Zhu X B, Wang S, et al.CIESC Journal, DOI: 10.11949/0438-1157.20241243.
郭乃胜, 朱小波, 王双, 等.化工学报, DOI: 10.11949/0438-1157.20241243.
29 Wang W.Study on thesynthesis and properties of biodegradable thermoplastic polyester elastomers.Ph.D.Thesis, Dalian University of Technology, China, 2024 (in Chinese).
王维.可生物降解热塑性聚酯弹性体的合成与性能研究, 博士学位论文, 大连理工大学, 2024.
30 Wang J, Zhang C, Deng Y, et al.Polymers, 2022, 14(21), 4586.
31 Somarathna H, Raman S N, Mohotti D, et al.Construction and Building Materials, 2018, 190, 995.
32 Devi P P K, Maznee T I T N, Hoong S S, et al.Reaction Kinetics, Mec-hanisms and Catalysis, 2016, 119, 93.
33 Zeller M, Garbev K, Weigel L, et al.Journal of Analytical and Applied Pyrolysis, 2023, 171, 105976.
34 Xing Z Y.The Study on the relationship between microphase separation and mechanical properties of cross-linked polyurethane.Ph.D.Thesis, University of Science and Technology of China, 2024 (in Chinese).
邢泽宇. 交联聚氨酯的微相分离结构与力学性能关系研究, 博士学位论文, 中国科学技术大学, 2024.

[1]	郑玉华, 杨柳, 郭宁, 杨凯栋, 张永政, 李振民, 崔彦斌. 基于稀土发光材料荧光强度比技术的光学温度传感研究进展[J]. 材料导报, 2026, 40(5): 25030201-11.
[2]	姜伟浩, 许亿, 李成灿, 王悦, 李国栋, 夏原. 烧结Nd-Fe-B磁体热稳定性研究进展[J]. 材料导报, 2026, 40(4): 24120238-14.
[3]	薛漫野, 武少杰, 程方杰. 层间温度对埋弧增材双相不锈钢冲击韧性的影响[J]. 材料导报, 2026, 40(4): 25020169-5.
[4]	陆珊珊, 刘坤, 李树康, 方珍文. 无纺布复合膜及内容物对医用热敷贴发热性能的影响机制[J]. 材料导报, 2026, 40(2): 24110079-8.
[5]	牛舒楠, 郑丽君, 高艺萌, 曲佳音, 王继福, 王鹏. 以碳化硅为发泡剂的铁尾矿多孔陶瓷的制备及性能研究[J]. 材料导报, 2026, 40(2): 24120220-7.
[6]	刘国建, 孙锦滢, 曲洪漩, 徐家乐, 蒋域蓉, 沈方敏. 基于反应分子动力学的混凝土模拟孔溶液中钢筋腐蚀行为研究[J]. 材料导报, 2026, 40(2): 24120115-7.
[7]	窦贵山, 曹睿, 焦世舜, 杨飞, 朱宇霆, 张克静, 刘春桃. 焊后热处理温度对960 MPa级低碳贝氏体钢焊缝金属显微组织和力学性能的影响[J]. 材料导报, 2026, 40(10): 25030167-6.
[8]	李逸帆, 吴文平, 尹颢. [111]取向单晶NiTi温度诱导相变马氏体结构相容性的分子动力学研究[J]. 材料导报, 2026, 40(10): 25040232-7.
[9]	张昌青, 刘恩荣, 王栋, 王亚雄, 石消飞, 王一帆, 张鹏省. 搅拌摩擦封焊过程扭矩和温度场变化规律研究[J]. 材料导报, 2026, 40(1): 24120074-5.
[10]	郭幼丹, 程晓农. SAF2507双相不锈钢二次急冷淬火成形析出相的析出行为[J]. 材料导报, 2025, 39(9): 23100100-7.
[11]	曹世豪, 赵锡佳, 王方全, 喻贤磊, 杨荣山. 方腔内正十八烷相变材料凝固放热特性试验研究[J]. 材料导报, 2025, 39(9): 24040013-6.
[12]	蒋力, 唐昭敏, 赵健清, 李世杰, 李昊宇, 杨怡宁, 潘皛, 王新茗. 原位可注射pH/温度双响应载药水凝胶的制备及抗肿瘤应用[J]. 材料导报, 2025, 39(6): 24010129-7.
[13]	张昌青, 马东东, 谷怀壮, 王栋, 刘恩荣, 张鹏省. 1060-H24纯铝无轴肩微型搅拌摩擦焊的数值模拟分析[J]. 材料导报, 2025, 39(5): 24020082-6.
[14]	罗健涵, 田晓东, 王苗明月. 振荡频率对TC4合金激光氮化组织形貌的影响及其数值模拟[J]. 材料导报, 2025, 39(23): 24110162-7.
[15]	宋春生, 徐龙, 李泓燊, 江友亮, 罗怡杭. 碳纤维复合材料固化过程的非均匀温度场重构技术研究[J]. 材料导报, 2025, 39(23): 24100070-8.

[1]	Wei ZHOU, Xixi WANG, Yinlong ZHU, Jie DAI, Yanping ZHU, Zongping SHAO. A Complete Review of Cobalt-based Electrocatalysts Applying to Metal-Air Batteries and Intermediate-Low Temperature Solid Oxide Fuel Cells[J]. Materials Reports, 2018, 32(3): 337 -356 .
[2]	Dongyong SI, Guangxu HUANG, Chuanxiang ZHANG, Baolin XING, Zehua CHEN, Liwei CHEN, Haoran ZHANG. Preparation and Electrochemical Performance of Humic Acid-based Graphitized Materials[J]. Materials Reports, 2018, 32(3): 368 -372 .
[3]	Yunzi LIU,Wei ZHANG,Zhanyong SONG. Technological Advances in Preparation and Posterior Treatment of Metal Nanoparticles-based Conductive Inks[J]. Materials Reports, 2018, 32(3): 391 -397 .
[4]	Bingwei LUO,Dabo LIU,Fei LUO,Ye TIAN,Dongsheng CHEN,Haitao ZHOU. Research on the Two Typical Infrared Detection Materials Serving at Low Temperatures: a Review[J]. Materials Reports, 2018, 32(3): 398 -404 .
[5]	Yingke WU,Jianzhong MA,Yan BAO. Advances in Interfacial Interaction Within Polymer Matrix Nanocomposites[J]. Materials Reports, 2018, 32(3): 434 -442 .
[6]	Zhengrong FU,Xiuchang WANG,Qinglin JIN,Jun TAN. A Review of the Preparation Techniques for Porous Amorphous Alloys and Their Composites[J]. Materials Reports, 2018, 32(3): 473 -482 .
[7]	Fangyuan DONG,Shansuo ZHENG,Mingchen SONG,Yixin ZHANG,Jie ZHENG,Qing QIN. Research Progress of High Performance ConcreteⅡ: Durability and Life Prediction Model[J]. Materials Reports, 2018, 32(3): 496 -502 .
[8]	Lixiong GAO,Ruqian DING,Yan YAO,Hui RONG,Hailiang WANG,Lei ZHANG. Microbial-induced Corrosion of Concrete: Mechanism, Influencing Factors,Evaluation Indices, and Proventive Techniques[J]. Materials Reports, 2018, 32(3): 503 -509 .
[9]	Ningning HE,Chenxi HOU,Xiaoyan SHU,Dengsheng MA,Xirui LU. Application of SHS Technique for the High-level Radioactive Waste Disposal[J]. Materials Reports, 2018, 32(3): 510 -514 .
[10]	Haoran CHEN, Yingdong XIA, Yonghua CHEN, Wei HUANG. Low-dimensional Perovskites: a Novel Candidate Light-harvesting Material for Solar Cells that Combines High Efficiency and Stability[J]. Materials Reports, 2018, 32(1): 1 -11 .

Viewed

Full text

Abstract

Cited

Shared

Discussed