Abstract: Ti3SiC2(TSC) is a new type of ternary compound MAX phase with excellent properties of both metallic and ceramic materials. Ti3SiC2 as a high conductive coating with great application potential has attracted more and more attention in recent years. The preparation technologies of Ti3SiC2 coating are constantly being reformed and optimized. There're mainly five common processes to prepare Ti3SiC2 coating, including chemical vapor deposition (CVD), physical vapor deposition (PVD), solid-state reaction, aerosol deposition method (ADM) and thermal sp-raying, respectively. The properties of Ti3SiC2 coatings are closely related to their purity to a large extent. Usually, a certain degree of impurities are contained in Ti3SiC2 coating, which has become an important factor restricting its wide application. It is found that the impurities in Ti3SiC2 coating are mainly TiC, Ti5Si3, SiC, TiSi2, etc. More over, the kinds of impurities produced by different methods are different. In order to improve the purity of Ti3SiC2 coating, it is necessary to explore and optimize the preparation process. At present, reactive chemical vapor deposition (RCVD) has realized the growth of pure Ti3SiC2 coating on graphite substrate by consuming silicon carbide (SiC) sublayer. Besides, ADM has also produced pure Ti3SiC2 coatings at room temperature, which reduces the synthesis temperature of conventional Ti3SiC2 coating. In addition, PVD technology not only provides the possibility of synthesizing Ti3SiC2 coating at low temperature, but also realizes the industrial production of Ti-Si-C composite coating. This paper comprehensively reviews the recent research on Ti3SiC2. The unique crystal structure and excellent properties of Ti3SiC2 coating are discussed. The different ways to prepare Ti3SiC2 coating were analyzed and current challenges in the synthesis of pure Ti3SiC2 coating were also introduced. Furthermore, the current and potential applications of Ti3SiC2 coating has been summarized. Overall, the analyses and discussions of various Ti3SiC2 coating synthesis technologies in this review will be contributed to synthesis of high purity Ti3SiC2 coating in the future.
1 Nowotny V H. Progress in Solid State Chemistry, 1971, 5, 27. 2 Jeitschko W, Nowotny H, Benesovsky F. Monatshefte für Chemie und verwandte Teile anderer Wissenschaften, 1964, 95(1), 178. 3 Barsoum M W. Progress in Solid State Chemistry, 2000, 28(1-4), 201. 4 Shahzad F, Alhabeb M, Hatter C B, et al. Journal of Physics: Condensed Matter, 2016, 353(6304), 1137. 5 Zhang F Y, Zhao L P, Yan S, et al. Ceramics International, 2020, 46(10), 16298. 6 Yan H, Liu K W, Zhang P L, et al. Optics & Laser Technology, 2020, 126, 106077. 7 Jiao Q, Guo F F, Li C, et al. Ceramics International, 2020, 46(9), 12948. 8 Lu J L, Abbas N, Tang J N, et al. Electrochemistry Communications, 2019, 105, 106490. 9 Zhu B, Mei B C, Shen C H, et al. Journal of Power Sources, 2006, 161(2), 997. 10 Zhang H L, Su R R, Shi L Q, et al. Applied Surface Science, 2018, 434, 1210. 11 Jodrph W, Simon M, Matthew T, et al. Journal of Nuclear Materials, 2018, 502, 220. 12 Nappé J C, Grosseau P, Audubert F, et al. Journal of Nuclear Materials, 2009, 385(2), 304. 13 Kurbakov S D. Atomic Energy, 2009, 106(6), 377. 14 Chen D, Gu H Z, Huang A, et al. Journal of Alloys and Compounds, 2019, 791, 461. 15 Kocher M, Rommel M, Erlbacher T, et al.In: Materials Science Forum. Swizerland, 2018, pp. 393. 16 Tang Y D, Shen H J, Zhang X F, et al.In: Materials Science Forum. Swizerland, 2017, pp. 395. 17 Fashandi H, Dahlqvist M, Lu J, et al. Nature Materials, 2017, 16(8), 814. 18 Zhao D, Xia S Q, Wang Y G, et al. Applied Physics a-Materials Science & Processing, 2020, 126(1), 69. 19 Garg A, Goel S, Kumari N, et al. Journal of Electronic Materials, 2020, 49(3), 2233. 20 Liu Y, Su X L, He X H, et al. Journal of Materials Science-Materials in Electronics, 2019, 30(3), 2630. 21 Chen D, Luo F, Zhou W C, et al. Journal of Electronic Materials, 2019, 48(3), 1506. 22 Zhang H, Wang X H, Zhou Y C. Advanced Ceramics, 2019, 40(3), 150 (in Chinese). 张辉, 王晓辉, 周延春.现代技术陶瓷, 2019, 40(3), 150. 23 Li J H, Zhang C, Wang X H. Advanced Ceramics, 2017, 38(1), 3 (in Chinese). 李建华, 张 超, 王晓辉.现代技术陶瓷, 2017, 38(1), 3. 24 Lian R C, Li Y X, Bai P K, et al. Foundry Technology, 2016, 37(2), 209 (in Chinese). 廉睿超, 李玉新, 白培康, 等. 铸造技术, 2016, 37(2), 209. 25 Shannahan L, Barsoum M W, Lamberson L. Engineering Fracture Mechanics, 2017, 169, 54. 26 Barsoum M W. MAX phases: properties of machinable ternary carbides and nitrides. John Wiley & Sons Press, USA, 2013. 27 Eklund P, Beckers M, Jansson U, et al. Thin Solid Films, 2010, 518(8), 1851. 28 Ganguly A. Synthesis and characterization of solid solutions of MN+1AXN phases. Ph.D. Thesis, Drexel University, USA, 2006. 29 Radovic M, Barsoum M W. American Ceramics Society Bulletin, 2013, 92(3), 20. 30 Barsoum M W, El-Raghy T, Rawn C, et al. Journal of Physics and Che-mistry of Solids, 1999, 60, 429. 31 Kisi E, Crossley J, Myhra S, et al. Journal of Physics and Chemistry of Solids, 1998, 59(9), 1437. 32 Zhou Y C, Sun Z M. Journal of Physics: Condensed Matter, 2000, 12(28), L457. 33 Hu J Q, Xie M, Chen J L, et al. Acta Physica Sinica, 2017, 66(5), 057102. 34 Zhang H B, Bao Y W, Zhou Y C. Journal of Materials Sciences and Technology, 2009, 25(1), 1. 35 Emmerlich J, Eklund P, Rittrich D, et al. Journal of Materials Research, 2011, 22(8), 2279. 36 Zhou Y C, Sun Z M. Material Research Innovations, 2000, 3(5), 286. 37 Atazadeh N, Heydari M S, Baharvandi H R, et al. International Journal of Refractory Metals and Hard Materials, 2016, 61, 67. 38 Cai Y Z, Cheng L F, Yin H F, et al. Ceramics International, 2017, 43(9), 6648. 39 Furgeaud C, Brenet F, Nicolai J. Materialia, 2019, 7, 100369. 40 Galvin T, Hyatt N C, Rainforth W M, et al. Surface & Coatings Techno-logy, 2019, 366, 199. 41 Islak B Y, Ayas E. Ceramics International, 2019, 45(9), 12297. 42 Li X, Zhang C H, Zhang S, et al. Optics and Laser Technology, 2019, 114, 209. 43 Liu Y, Jian X Y, Su X L, et al. Journal of Alloys and Compounds, 2018, 740, 68. 44 Magnus C, Sharp J, Rainforth W M. Tribology Transactions, 2020, 63(1), 38. 45 Tatarko P, Casalegno V, Hu C, et al. Journal of the European Ceramic Society, 2016, 36(16), 3957. 46 Wen Q L, Zhou W C, Wang Y D, et al. Journal of Materials Science, 2017, 52(2), 832. 47 Xu B B, Chen Q Y, Li X H, et al. Ceramics International, 2019, 45(1), 948. 48 Zhou M Z, Lu W L, Liu X J, et al. Tribology International, 2018, 118, 196. 49 Eklund P, Rosen J, Persson P O. Journal of Physics D: Applied Physics, 2017, 50(11), 113001. 50 Emmerlich J, Högberg H, Sasvári S, et al. Journal of Applied Physics, 2004, 96(9), 4817. 51 Palmquist J P, Li S, Persson P, et al. Physical Review B, 2004, 70(16), 165401. 52 Berger O. Surface Engineering, 2020, 36(3), 225. 53 Liu Y, Su X L, Luo F, et al. Journal of Materials Science: Materials in Electronics, 2018, 29(3), 2500. 54 Chen D, Luo F, Zhou W C, et al. Journal of Materials Science: Materials in Electronics, 2018, 29(16), 13534. 55 Liu Y, Li Y Y, Luo F, et al. Journal of Alloys and Compounds, 2017, 715, 21. 56 Su J B, Zhou W C, Wang H Y, et al. Journal of Thermal Spray Technology, 2016, 25(4), 639. 57 Su J B, Zhou W C, Liu Y, et al. Journal of Materials Science: Materials in Electronics, 2015, 27(3), 2460. 58 Wang H Y, Zhu D M, Zhou W C, et al. Rsc Advances, 2015, 5(105), 86656. 59 Su J B, Zhou W C, Liu Y, et al. Surface and Coatings Technology, 2015, 270, 39. 60 Liu Y, Luo F, Wang Y, et al. Journal of Alloys and Compounds, 2015, 629, 208. 61 Liu Y, Luo F, Su J B, et al. Journal of Alloys and Compounds, 2015, 632, 623. 62 Goto T. Journal of Wuhan University of Technology-Mater Sci Ed, 2016, 31(1), 15. 63 Muñoz R, Gómez-Aleixandre C. Chemical Vapor Deposition, 2013, 19(10-12), 297. 64 Goto T, Hirai T. Materials Research Bulletin, 1987, 22(9), 1195. 65 Pickering E, Lackey W J, Crain S. Chemical Vapor Deposition, 2000, 6(6), 289. 66 Nickl J, Schweitzer K, Luxenberg P. Journal of the Less Common Metals, 1972, 26(3), 335. 67 Racault C, Langlais F, Naslain R, et al. Journal of Materials Science, 1994, 29(15), 3941. 68 Jacques S, Di-Murro H, Berthet M P, et al. Thin Solid Films, 2005, 478(1-2), 13. 69 Lin T C, Hon M H. Ceramics International, 2008, 34(3), 631. 70 Fakih H, Jacques S, Berthet M P, et al. Surface and Coatings Technology, 2006, 201(6), 3748. 71 Jacques S, Fakih H. Advances in Science and Technology, 2006, 45, 1085. 72 Fakih H, Jacques S, Dezellus O, et al. Journal of Phase Equilibria and Diffusion, 2008, 29(3), 239. 73 Jacques S, Fakih H, Viala J C. Thin Solid Films, 2010, 518(18), 5071. 74 Yang G Y, Li G D, Xiong X, et al. Materials Science and Engineering of Powder Metallurgy, 2014, 19(5), 797. 75 Liu S, Lu W Z, Chen Y G, et al. Key Engineering Materials, 2016, 693, 813. 76 Chen Z S, Li H J, Fu Q G, et al. Materials Science and Technology, 2013, 29(8), 975. 77 Cunha L, Vaz F, Moura C, et al. Journal of Nanoscience and Nanotech-nology, 2010, 10(4), 2926. 78 Lauridsen J, Eklund P, Joelsson T, et al. Surface & Coatings Technology, 2010, 205(2), 299. 79 Sonoda T, Nakao S, Ikeyama M. Japanese Journal of Applied Physics, 2012, 51(1S), 01AC06. 80 Sonoda T, Nakao S, Ikeyama M. Japanese Journal of Applied Physics, 2013, 52(11), 11NJ14. 81 Palmquist J P, Jansson U, Seppänen T, et al. Applied Physics Letters, 2002, 81(5), 835. 82 Sonoda T, Nakao S, Ikeyama M. Journal of Physics: Conference Series, 2013, 417(1), 012063. 83 Lawniczak-Jablonska K, Klepka M T, Dynowska E, et al. Radiation Phy-sics and Chemistry, 2013, 93, 168. 84 Vishnyakov V, Lu J, Eklund P, et al. Vacuum, 2013, 93, 56. 85 Eklund P, Beckers M, Frodelius J, et al. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2007, 25(5), 1381. 86 Magnuson M, Tengdelius L, Greczynski G, et al. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2019, 37(2), 021506. 87 Alami J, Eklund P, Emmerlich J, et al. Thin Solid Films, 2006, 515(4), 1731. 88 Phani A R, Krzanowski J E, Nainaparampil J J. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2001, 19(5), 2252. 89 Hu J J, Bultman J E, Patton S, et al. Tribology Letters, 2004, 16(1-2), 113. 90 Lange C, Barsoum M W, Schaaf P. Applied Surface Science, 2007, 254(4), 1232. 91 Tsukimoto S, Nitta K, Sakai T, et al. Journal of Electronic Materials, 2004, 33(5), 460. 92 Tsukimoto S, Sakai T, Murakami M. Journal of Applied Physics, 2004, 96(9), 4976. 93 Veisz B, Pécz B. Applied Surface Science, 2004, 233(1-4), 360. 94 Yu H L, Zhang X F, Shen H J, et al. Journal of Applied Physics, 2015, 117(2), 025703. 95 Akedo J, Lebedev M. Japanese Journal of Applied Physics, 1999, 38(9S), 5397. 96 Piechowiak M A, Henon J, Durand O, et al. Journal of the European Ceramic Society, 2014, 34(5), 1063. 97 Henon J, Piechowiak M A, Durand O, et al. Journal of the European Ceramic Society, 2015, 35(4), 1179. 98 Pasumarthi V, Chen Y, Bakshi S R, et al. Journal of Alloys and Compounds, 2009, 484(1-2), 113. 99 Trache R, Puschmann R, Leyens C, et al. In: Thermal Spray 2013: Proceedings of the International Thermal Spray Conference. Busan, 2013, pp.74. 100 Li C, Yan S, Zhang F Y, et al. Vacuum, 2019, 161, 14. 101 Song Q, Ye F, Kong L, et al. Advanced Functional Materials, 2020, 30(31), 2000475. 102 Tsukimoto S, Nitta K, Sakai T, et al. Journal of Electronic Materials, 2004, 33(5), 460. 103 Wen Q L, Zhou W C, Wang Y D, et al. Journal of Materials Science, 2016, 52(2), 832.