金属掺杂MoS2基复合薄膜的微观结构与真空摩擦学性能研究

doi:10.11896/cldb.25040052

材料导报

2025, Vol. 39

Issue (15): 25040052-7 https://doi.org/10.11896/cldb.25040052

空间润滑材料

金属掺杂MoS₂基复合薄膜的微观结构与真空摩擦学性能研究

郑玉刚¹, 苟世宁¹, 冯兴国¹, 汪科良¹, 赵蒙¹, 张凯锋¹, 周晖^1,*, 李林^2,*

1 兰州空间技术物理研究所真空技术与物理全国重点实验室,兰州 730000
2 北京空间飞行器总体设计部,北京 100094

Microstructure and Vacuum Tribological Properties of Metal Doped MoS₂ Composite Films

ZHENG Yugang¹, GOU Shining¹, FENG Xingguo¹, WANG Keliang¹, ZHAO Meng¹, ZHANG Kaifeng¹, ZHOU Hui^1,*, LI Lin^2,*

1 National Key Laboratory on Vacuum Technology and Physics, Lanzhou Institute of Physics, Lanzhou 730000, China
2 Beijing Institute of Spacecraft System Engineering, Beijing 100094, China

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摘要采用非平衡磁控溅射技术在Si片和9Cr18钢表面分别沉积了纯MoS₂、MoS₂-Ag、MoS₂-Ti和MoS₂-(Ti+Ag)四种不同类型的薄膜,并对这四种薄膜进行了对比分析研究。结果表明,四种薄膜的表面形貌为颗粒状,断面形貌为柱状晶,掺杂Ti和Ag能显著提升薄膜的致密性,掺杂Ti还产生衍射峰宽化和晶粒细化。力学性能测试结果表明,掺杂Ti和(Ti+Ag)共掺杂能大幅度提升薄膜的硬度和附着力,硬度相较纯MoS₂薄膜分别提升了5.9倍和5.1倍,附着力分别增大了3.5倍和3.2倍。真空摩擦学性能实验分析发现,与磨损率为1.63×10^-15m³/(N·m)的纯MoS₂薄膜相比,Ti掺杂及(Ti+Ag)共掺杂均能显著提高耐磨性能,MoS₂-(Ti+Ag)磨损率仅为0.9×10^-17m³/(N·m),降低了2个数量级,表现出优异的摩擦学性能。本研究为改善金属掺杂MoS₂基复合薄膜的真空摩擦学性能提供了理论依据和实验数据。

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	郑玉刚
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	张凯锋
	周晖
	李林

关键词: 二硫化钼薄膜金属掺杂硬度真空摩擦学性能

Abstract: MoS₂, MoS₂-Ti, MoS₂-Ag and MoS₂-(Ti+Ag) films were deposited on Si wafers and 9Cr18 steel using unbalanced magnetron sputtering technology. A comparative analysis of these four films was subsequently conducted. The films exhibit granular surface morphology and columnar structure in cross-section. Doping with Ti and Ag significantly enhances films compactness, while Ti doping results in peak broadening, indicating refined grain size. The mechanical property tests demonstrate that both Ti doping and (Ti+Ag) co-doping significantly improve film hardness and adhesion. Compared to pure MoS₂ films, hardness increases by factors of 5.9 and 5.1, respectively, and adhesion increases by 3.5 times and 3.2 times. Vacuum tribological tests reveal that Ti-doped and (Ti+Ag)-co-doped films significantly outperform pure MoS₂ films (wear rate:1.63×10^-15 m³/(N·m)) in wear resistance. The MoS₂-(Ti+Ag) film exhibits a wear rate of 0.9×10^-17m³/(N·m), representing a two-order-of-magnitude reduction and demonstrating superior tribological performance. This study provides a theoretical basis and experimental data for improving the vacuum tribological properties of metal doped MoS₂ composite films.

Key words: MoS₂ film metal doping hardness vacuum tribological property

出版日期: 2025-08-10 发布日期: 2025-08-13

ZTFLH:

TH117

通讯作者: 周晖,博士,兰州空间技术物理研究所研究员,博士研究生导师。目前主要从事表面工程技术与空间摩擦学等方面的研究。zhouhui510@sina.com
李林,北京空间飞行器总体设计部高级工程师,目前从事空间机构设计、超大型空间结构在轨构建等方面的研究。lilin03071728@163.com

作者简介: 郑玉刚,硕士,兰州空间技术物理研究所工程师。目前主要从事空间润滑材料与空间摩擦学等方面的研究。

引用本文:

郑玉刚, 苟世宁, 冯兴国, 汪科良, 赵蒙, 张凯锋, 周晖, 李林. 金属掺杂MoS₂基复合薄膜的微观结构与真空摩擦学性能研究[J]. 材料导报, 2025, 39(15): 25040052-7.
ZHENG Yugang, GOU Shining, FENG Xingguo, WANG Keliang, ZHAO Meng, ZHANG Kaifeng, ZHOU Hui, LI Lin. Microstructure and Vacuum Tribological Properties of Metal Doped MoS₂ Composite Films. Materials Reports, 2025, 39(15): 25040052-7.

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https://www.mater-rep.com/CN/10.11896/cldb.25040052 或 https://www.mater-rep.com/CN/Y2025/V39/I15/25040052

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