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材料导报  2023, Vol. 37 Issue (24): 22030065-10    https://doi.org/10.11896/cldb.22030065
  无机非金属及其复合材料 |
二次电子产额影响因素的研究进展
邓晨晖*, 韩立, 王岩, 高召顺, 牛耕
中国科学院电工研究所,北京 100190
Progress in the Study of Factors Influencing the Secondary Electron Yield
DENG Chenhui*, HAN Li, WANG Yan, GAO Zhaoshun, NIU Geng
Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China
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摘要 二次电子发射现象在显微分析、电子倍增、航空航天、高压输电和粒子加速器等中广泛存在,因此开展二次电子的相关研究具有重要的应用价值。本文首先介绍了二次电子的相关背景;随后从入射电子与材料相互作用到最终二次电子产额测量的全过程出发,将影响二次电子产额的因素分成了入射电子性质、材料属性、样品表面状态、测试条件与方法四个大类,并对其进行了文献调研和综合分析;最后总结了目前研究取得的进展,梳理了相关规律,指出了存在的不足之处,探讨了该领域可能的发展趋势。
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邓晨晖
韩立
王岩
高召顺
牛耕
关键词:  二次电子  二次电子产额  入射电子性质  样品性质  测试条件    
Abstract: The phenomenon of secondary electron emission widely exists in microanalysis, electron multiplication, aerospace, high-voltage power transmission, particle accelerators and so on. Hence, research on it is necessary. This paper firstly introduces the background knowledge about secondary electrons. Secondly, considering the whole process from electron-material interactions to the measurements of secondary electron yield, this paper classifies the factors affecting the secondary electron yield into four broad categories:nature of the incident electrons, properties of the sample, surface condition of the sample, test conditions and methods. Founded on that, this paper conducts a literature review and a comprehensive analysis. Finally, this paper summarizes the progress of the current research, sorts out the relevant laws, points out the shortco-mings, and discusses the possible development trend in the field.
Key words:  secondary electron    secondary electron yield    properties of the incident electrons    properties of the sample    experimental condition
发布日期:  2023-12-19
ZTFLH:  O046  
基金资助: 中国科学院电工研究所科研基金(E155440101)
通讯作者:  *邓晨晖,2014年6月毕业于河北工业大学,获得工学学士学位,2021年6月从中国科学院大学取得工学博士学位。目前在中国科学院电工研究所从事博士后研究,主要研究方向为电子束的应用。dengch@mail.iee.ac.cn   
引用本文:    
邓晨晖, 韩立, 王岩, 高召顺, 牛耕. 二次电子产额影响因素的研究进展[J]. 材料导报, 2023, 37(24): 22030065-10.
DENG Chenhui, HAN Li, WANG Yan, GAO Zhaoshun, NIU Geng. Progress in the Study of Factors Influencing the Secondary Electron Yield. Materials Reports, 2023, 37(24): 22030065-10.
链接本文:  
http://www.mater-rep.com/CN/10.11896/cldb.22030065  或          http://www.mater-rep.com/CN/Y2023/V37/I24/22030065
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