MPCVD同质外延单晶金刚石研究进展

doi:10.11896/cldb.21100019

材料导报

2023, Vol. 37

Issue (16): 21100019-8 https://doi.org/10.11896/cldb.21100019

无机非金属及其复合材料

MPCVD同质外延单晶金刚石研究进展

董浩永¹, 任瑛², 张贵锋^1,*

1 大连理工大学材料科学与工程学院三束材料改性教育部重点实验室,辽宁大连 116024
2 河南工业大学材料科学与工程学院,郑州 450001

Research Progress of MPCVD Homogeneous Epitaxial Single-crystal Diamond

DONG Haoyong¹, REN Ying², ZHANG Guifeng^1,*

1 Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Ministry of Education), School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, Liaoning, China
2 School of Materials Science and Engineering, Henan University of Technology, Zhengzhou 450001, China

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摘要微波等离子体化学气相沉积法(Microwave plasma chemical vapor deposition, MPCVD)外延单晶金刚石被认为是制备大尺寸、高质量的单晶金刚石极具前景的技术手段之一。本文首先对MPCVD同质外延单晶金刚石生长机理及最新进展做了简要介绍,然后着重阐述了MPCVD法制备大尺寸、高质量单晶金刚石在籽晶筛选与预处理、基台结构设计及生长工艺探索等方面的工作,并对MPCVD高品质单晶金刚石在力学、热学、光学及电子学等领域的应用进行了介绍,对未来单晶金刚石的应用前景进行了展望。

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关键词: MPCVD 同质外延单晶金刚石生长工艺基台结构设计应用领域

Abstract: The microwave plasma chemical vapor deposition (MPCVD) method is considered one of the most promising techniques for preparing large-size and high-quality epitaxial single-crystal diamonds. In this paper, the growth mechanism and the latest progress of MPCVD homogeneous epitaxial single crystal diamonds are briefly introduced, and then the work of preparing large-size and high-quality single crystal diamonds by MPCVD method in seed crystal screening and pretreatment, substrate structure design, and growth process exploration is emphatically described. The applications of MPCVD high-quality single-crystal diamonds in the fields of mechanics, thermal, optics, and electronics are introduced, and the application prospects of single-crystal diamonds in the future are forecasted.

Key words: MPCVD homoepitaxy single crystal diamond growth process abutment structure design application field

出版日期: 2023-08-25 发布日期: 2023-08-14

ZTFLH:

TB321

基金资助: 河南省科技厅自然科学项目(222102230040);2021年郑州市重大科技专项 (2021KJZX062)

通讯作者: ^*张贵锋,大连理工大学材料科学与工程学院教授、博士研究生导师。1984年武汉水运工程学院金属材料及热处理专业本科毕业,分别于1989年与1993年在西北工业大学金属材料及热处理专业获得硕士与博士学位,先后在西北工业大学任教,在埃森大学担任研究员,并于2004年在大连理工大学工作至今。主要从事金刚石薄膜、超硬薄膜等方面的研究工作。发表论文100余篇,包括Advanced Materials Research、Applied Surface Science、Journal of Materials Science & Technology等,获得国家发明专利5项。gfzhang@dlut.edu.cn

作者简介: 董浩永,2020年6月毕业于河南工业大学,获得工学学士学位,现为大连理工大学材料科学与工程硕士研究生,在张贵锋教授指导下进行研究。目前主要研究领域为金刚石薄膜材料。

引用本文:

董浩永, 任瑛, 张贵锋. MPCVD同质外延单晶金刚石研究进展[J]. 材料导报, 2023, 37(16): 21100019-8.
DONG Haoyong, REN Ying, ZHANG Guifeng. Research Progress of MPCVD Homogeneous Epitaxial Single-crystal Diamond. Materials Reports, 2023, 37(16): 21100019-8.

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http://www.mater-rep.com/CN/10.11896/cldb.21100019 或 http://www.mater-rep.com/CN/Y2023/V37/I16/21100019

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