Study on Nano Silver, Copper Assisted Chemical Etching Texturing of Diamond Wire Sawn Multicrystalline Silicon Wafers
ZOU Yuxin1, QIU Jiajia1, XI Fengshuo1, YANG Xi3, LI Shaoyuan2, MA Wenhui1, 2
1 Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology, Kunming 650093; 2 Key Laboratory of Complex Nonferrous Metal Resources Clean Utilization, Kunming University of Science and Technology, Kunming 650093; 3 Yunnan Provincial Energy Research Institute Co.,Ltd., Kunming 650093
Abstract: The diamond wire sawn multicrystalline silicon (DWS mc-Si) was textured by nano silver and copper catalyzed chemical etching method, and the effects of metal species on textured morphology and anti-reflection performance of DWS mc-Si were studied in detail. The results showed that the textured morphology of silicon wafer was greatly influenced by various metal species. Compared with the silicon nanowires arrays structure form nano Ag-assisted etching, the inverted pyramid structure formed by nano Cu-assisted etching has a more outstanding performance. The large area micron-size inverted pyramids can more perfectly balance anti-reflection and surface passivation. Moreover, inverted pyramids texturization can significantly eliminate the surface saw marks. When the etching time is 15 min, the resulting inverted pyramid structure is the most uniform and the average reflectivity of textured sample decrease from 41.8% to 5.8% in the wavelength range of 300—1 100 nm. The superior anti-reflection performance and excellent saw marks elimination ability show a huge potential application in high-efficiency solar cells based on DWS mc-Si wafers.
邹宇新, 邱佳佳, 席风硕, 杨玺, 李绍元, 马文会. 纳米金属银、铜辅助化学刻蚀制绒金刚线切割多晶硅的研究[J]. 材料导报, 2018, 32(21): 3706-3711.
ZOU Yuxin, QIU Jiajia, XI Fengshuo, YANG Xi, LI Shaoyuan, MA Wenhui. Study on Nano Silver, Copper Assisted Chemical Etching Texturing of Diamond Wire Sawn Multicrystalline Silicon Wafers. Materials Reports, 2018, 32(21): 3706-3711.
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2018, Vol. 32 
