沉积厚度对L10-FePd颗粒膜结构和磁性能的影响

doi:10.11896/j.issn.1005-023X.2018.04.003

《材料导报》期刊社

2018, Vol. 32

Issue (4): 525-527 https://doi.org/10.11896/j.issn.1005-023X.2018.04.003

材料研究

沉积厚度对L1₀-FePd颗粒膜结构和磁性能的影响

刘涛¹, 马垒^{1, 2}, 赵世谦¹, 马冬冬¹, 李林^{1, 2}, 成钢^{1, 2}

1 桂林电子科技大学材料科学与工程学院,桂林 541004;
2 桂林电子科技大学广西信息材料重点实验室,桂林 541004

Effect of Deposition Thickness on Structure and Magnetic Properties of L1₀-FePd Granular Film

LIU Tao¹, MA Lei^{1, 2}, ZHAO Shiqian¹, MA Dongdong¹, LI Lin^{1, 2}, CHENG Gang^{1, 2}

1 School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin 541004;
2 Guangxi Key Laboratory of Information Materials, Guilin University of Electronic Technology, Guilin 541004

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摘要采用直流磁控溅射法在石英玻璃基片上制备不同厚度的FePd纳米颗粒膜,利用X射线衍射仪、X射线能谱仪、扫描电子显微镜、原子力显微镜和振动样品磁强计表征薄膜的结构和磁性能。结果表明,经过550 ℃热处理3 h后,薄膜的X射线衍射谱中出现(002)超晶格衍射峰,表明薄膜中出现了四方有序结构。随着薄膜厚度的减小其有序化程度增加,在膜厚为47 nm时,样品矫顽力达到3.5 kOe,剩磁比达到0.94,最大磁能积((BH)_max)达到17.6 MGOe。FePd薄膜的相转变温度降低,磁性能较好。

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	刘涛
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关键词: FePd薄膜磁记录磁控溅射磁性能

Abstract: The FePd nanoparticle films with different thickness were deposited on glass substrates by direct current magnetron sputtering at room temperature. The structure and magnetic properties were characterized by XRD, SEM, AFM and VSM. The results indicated that (002) superlattice diffraction peaks in X-ray diffraction pattern could be seen in films annealed at 550 ℃ for 3 h, which suggests that tetragonal ordered structure formed in annealed films. With the decrease of film thickness, the ordering degree of FePd film increased gradually. When the film thickness was 47 nm, the coercivity and magnetic energy could reach 3.5 kOe and 17.6 MGOe respectively, and remanence ratio could keep about 0.94. The disorder-order transition temperature of FePd film was evidently reduced and its magnetic properties was improved.

Key words: FePd thin films magnetic recording magnetron sputtering magnetic properties

出版日期: 2018-02-25 发布日期: 2018-02-25

ZTFLH:

TM27

基金资助: 广西自然科学基金(2016GXNSFAA380030; 2013GXNSFBA019242; 2016GXNSFGA380001); 广西研究生教育创新计划资助项目(YCSZ2014140)

通讯作者: 马垒,男,1979年生,博士,副教授,研究方向为磁性材料 E-mail:malei@guet.edu.cn

作者简介: 刘涛:男,1991年生,硕士,研究方向为磁性薄膜 E-mail:751058387@qq.com

引用本文:

刘涛, 马垒, 赵世谦, 马冬冬, 李林, 成钢. 沉积厚度对L1₀-FePd颗粒膜结构和磁性能的影响[J]. 《材料导报》期刊社, 2018, 32(4): 525-527.
LIU Tao, MA Lei, ZHAO Shiqian, MA Dongdong, LI Lin, CHENG Gang. Effect of Deposition Thickness on Structure and Magnetic Properties of L1₀-FePd Granular Film. Materials Reports, 2018, 32(4): 525-527.

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http://www.mater-rep.com/CN/10.11896/j.issn.1005-023X.2018.04.003 或 http://www.mater-rep.com/CN/Y2018/V32/I4/525

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