利用原位压痕技术表征原子层沉积Al<sub>2</sub>O<sub>3</sub>超薄纳米薄膜的力学性能

doi:10.11896/cldb.18070240

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Abstract Five Al₂O₃ nanofilms with thickness of 20—60 nm were deposited by atomic layer deposition(ALD). The surface roughness and microstructure of the deposited Al₂O₃ nanofilms were characterized by three dimensional optical microscopy and transmission electron microscopy. The force-displacement curves captured by a hybrid scanning electron microscope/scanning probe microscope(SEM/SPM)system were analyzed based on Hertz’s theory of contact mechanics for the elastic modulus of Al₂O₃ nanofilms. The Hay model was used to eliminate the influence of the substrate on the measurement results, and the errors in the model due to the different shapes of the indenter were corrected. The results show that, ALD Al₂O₃ nanofilms is amorphous, and the surface roughness does not increase with the increase of thickness. The elastic modulus do not show obvious small size effect, and the measured value is (175±10) GPa. Under the same indentation ratio, the smaller the film thickness is, the more obvious the substrate effect is.

Key words： atomic layer deposition Al₂O₃ film in-situ nanoindentation mechanical property elastic modulus

Published: 31 July 2019

CLC number:

TG113.25

Fund:This work was financially supported by the National Natural Science Foundation of China (21676005).

About author:: Lyuhong Liuentered the School of Mechanical Engineering of Taiyuan University of Technology for a master’s degree in September 2016. Since July 2017, she has been co-educating and learning at Institute of Microstructure and Property of Advanced Materials of Beijing University of Technology, focusing on the research of mechanical properties of nano-film materials.
Yuefei Zhangobtained his M.E. degree from the Beijing University of Technology in 2008. His doctoral thesis was awarded the 2008 Excellent Doctoral Dissertation of Beijing University of Technology, the 2009 Beijing Excellent Doctoral Thesis, and the 2010 National Outstanding Doctoral Thesis Nomination Award. During the period of 2002.7—2008.9, he was engaged in research work on nanomaterial preparation, functional film preparation, plasma technology application, etc. in the Laboratory of Plasma Physics and Materials of Beijing Institute of Prin-ting. 2008 transferred to Beijing University of Technology. In 2009, he was
selected as a key young and middle-aged teacher in Beijing. In 2010, he was selected as a Beijing science and technology star. His team research direction is material in-situ electron microscopy research, preparation of new nanomaterials and research on microstructure and properties. He has undertaken more than 20 national, provincial and ministerial projects, and has published more than 100 papers in the academic journals at home and abroad as the first author or correspondent author, including more than 20 journal articles in the 1 district, and he has attracted nearly 1 400.

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	LIU Lyuhong
	LIU Yanping
	MA Jinyao
	SANG Lijun
	CHENG Xiaopeng
	ZHANG Yuefei

Cite this article:

LIU Lyuhong,LIU Yanping,MA Jinyao, et al. In-situ Nanoindentation Investigation of Mechanical Properties of Al₂O₃ Ultra-thin Nanofilm Grown by Atomic Layer Deposition[J]. Materials Reports, 2019, 33(18): 3026-3030.

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http://www.mater-rep.com/EN/10.11896/cldb.18070240 OR http://www.mater-rep.com/EN/Y2019/V33/I18/3026

[1]	Wang X,Tabakman S M,Dai H.American Chemical Society,2008,130,8152.
[2]	Cheng R,Bai J,Liao L,et al.Proceedings of the National Academy of Sciences of the United States of America,2012,109,11588.
[3]	Tripp M K,Stampfer C,Miller D C,et al.Sensors and Actuators A Physical,2006,130(2),419.
[4]	Tapily K,Jakes J E,Stone D S,et al.Journal of the Electrochemical Society,2008,155(7),545.
[5]	Wang C Y,Yang S M,Li C S,et al.Rare Metal Materials and Enginee-ring,2015,44(12),3078(in Chinese).王琛英,杨树明,李常胜,等.稀有金属材料与工程,2015,44(12),3078.
[6]	Ma Y X,Gao Y F,Zeng Y Y,et al.Materias Review B:Research Papers,2015,29(3),102(in Chinese).马亚鑫,高怡斐,曾雨吟,等.材料导报:研究篇,2015,29(3),102.
[7]	Huang H.Sevreral theoretical problems of indentation and scratch testing and experimental research based on self-made instruments.Ph.D. Thesis,Jilin University,China,2014(in Chinese).黄虎.压痕/划痕测试若干理论与基于自制仪器的试验研究.博士学位论文,吉林大学,2014.
[8]	Yang P.Investigations on fracture toughness and residual stress of thermal barrier coatings in high temperature by in-situ indentation technique.Master’s thesis,Xiangtan University,China,2017(in Chinese).杨鹏.高温环境下热障涂层力学性能压痕原位表征分析.硕士学位论文,湘潭大学,2017.
[9]	Li X F.Interfacial structures and electrical properties of atomiclayer deposited high-k dielectric thin films on Ⅲ-Ⅴand Ge semiconductor.Ph.D. Thesis,Nanjing University,China,2013(in Chinese).李学飞.原子层沉积栅介质材料与Ⅲ-Ⅴ族/Ge半导体的界面结构及其电学性能研究.博士学位论文,南京大学,2013.
[10]	Hu H,Dong B H,Wang L,et al.Materias Review A: Review Papers,2016,30(12),9(in Chinese).胡航,董兵海,万丽,等.材料导报:综述篇,2016,30(12),9.
[11]	Johnson K L. Contact mechanics,Cambridge University Press,UK,1985.
[12]	Qasmi M,Delobelle P.Surface and Coatings Technology,2006,201,1191.
[13]	Jee A Y,Lee M.Polymer Testing,2010,29(1),95.
[14]	Sneddon I N.International Journal of Engineering Science,1965,3(1),47.
[15]	Geng K,Yang F,Druffel T,et al.Polymer,2005,46(25),11768.
[16]	Doerner M F,Nix W D.Journal of Materials Research,1986,1(4),601.
[17]	King R B.International Journal of Solids and Structures,1987,23(12),1657.
[18]	Gao H,Chiu C H,Lee J.International Journal of Solids and Structures,1992,29(29),2471.
[19]	Shield T W,Bogy D B.Journal of Applied Mechanics,1989,56(4),798.
[20]	Song H.Selected mechanical problems in load- and depth-sensing indentation testing.Ph.D. Thesis,Rice University,USA,1999.
[21]	Xu H,Pharr G M.Scripta Materialia,2006,55(4),315.
[22]	Li D G,Liang Y C,Bai Q S.Aviation Precision Manufacturing Technology,2008,44(2),9(in Chinese).李德刚,梁迎春,白清顺.航空精密制造技术,2008,44(2),9.
[23]	Zheng X Y,Lee H,Weisgraber T H,et al.Science,2014,344(6190),1373.
[24]	Hay J,Crawford B.Journal of Materials Research,2011,26(6),727.
[25]	Saha R,Nix W D.Acta Materialia,2002,50(1),23.
[26]	Mencˇík J,Munz D,Quandt E.Journal of Materials Research,1997,12(9),2475.