原子层沉积微通道板的研究进展

doi:10.11896/cldb.18110031

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Abstract The micro-channel plate (MCP) is the core device for electronic multiplication and signal amplification in the fields of optical communication and optoelectronic technology, and the performance improvement research of MCP is mainly focused on increasing gain, extending service life and reducing dark count. Currently, the commonly used commercial MCPs are still prepared based on the traditional lead silicate glass via hydrogen reduction process. Although its gain, lifetime and dark count can reach 10³, 0.3 C/cm², 0.25 events/(s·cm²), respectively, optimized by four generations of glass components and preparation process, the glass composition and complicated preparation process limit its further enhancement in performance, e.g. lower ion feedback and background noise, and higher gain.
In view of this,researchers have proposed and perfected a new solution over the past decade:adopting atomic layer deposition (ALD) techno-logy to deposit functional layers, including the conductive layers and secondary electron emission layers onto the surface of borosilicate glass substrates. Thereby, an MCP with conduction and electron multiplication capability is obtained. This novel ALD-MCP can effectively avoid the restriction of substrate glass on its performance optimization, realize the independent design of the substrate glass and the functional layer’s materials, and significantly improve the comprehensive performance of the MCP.
Through continuous attempts, the ALD functional layers exhibiting much superior performance to that of traditional MCP have been developed. The prevailing deposition materials for conductive layer are Al₂O₃/ZnO, Al₂O₃/W or Al₂O₃/Mo , and for the secondary electron emission layers are MgO or Al₂O₃, with the products' gain elevated to 10⁴, dark count reduced to 0.078 events/(s·cm²), and lifetime prolonged to 7 C/cm². However, its stability still requires further improvement. In addition, deeper investigations are needed to improve deposition efficiency, and to optimize and regulate the performance of functional layers.
This paper provides a systematic summary over the worldwide research status of ALD-MCP from the perspectives of functional layer composition and product performance. Moreover, it also gives a critical discussion involving the problems in current research and a prospective outlook for future development trends.

Key words： micro-channel plate atomic layer deposition functional layer gain life

Published: 03 January 2020

CLC number:

O484.1

Fund:This work was financially supported by the National Key Research and Development Program of China (2016YFB0303804).

About author:: Junjiang Guo received his B.S. degree in physics from Xinzhou Teachers University in 2009. He is currently pursuing his Ph.D. at the Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Science under the researcher Haitao Guo. His research has focused on atomic layer deposition micro-channel plate;Haitao Guo received his B.S. degree in composite materials and Ph.D. degree in Material Science and Engineering from Wuhan University of Technology in 2002 and 2007, respectively. Now, he is working as a researcher in Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Science. His major research interests are fabrication and analysis of new functional glasses, fibers and optical device, etc. Into the Academy of Sciences, the "Western Light Joint Scho-lars” talent program and the “Youth Innovation Promotion Excellence Talents Program”. He hosted the National Natural Science Foundation, the National key R & D projects, Pre-research key project and the Shaanxi Provincial Natural Science Foundation et. al. Meanwhile, he has published more than 60 articles in the SCI journals such as Optics Express, Journal of the American Ceramic Society, and applied for more than 10 national invention patents.

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	GUO Junjiang
	ZHU Xiangping
	XU Yantao
	CAO Weiwei
	ZOU Yongxing
	LU Min
	PENG Bo
	SI Jinhai
	GUO Haitao

Cite this article:

GUO Junjiang,ZHU Xiangping,XU Yantao, et al. Research Progress of Atomic Layer Deposited Micro-channel Plate[J]. Materials Reports, 2020, 34(3): 3080-3089.

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http://www.mater-rep.com/EN/10.11896/cldb.18110031 OR http://www.mater-rep.com/EN/Y2020/V34/I3/3080

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