Measurement of Transverse Piezoelectric Coefficients of Pb(Zr0.52Ti0.48)O3 Thin Films by a Mechano-electrical Multiphysics Coupling, Bulge Test Method
HE Yuandong1, SUN Changzhen1, MAO Weiguo1, MAO Yiqi2, ZHANG Honglong3, CHEN Yanfei3, PEI Yongmao3, FANG Daining4
1 School of Materials Science and Engineering, Xiangtan University, Xiangtan 411105; 2 College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082; 3 College of Engineering, Peking University, Beijing 100871; 4 Institute of Advanced Structure Technology, Beijing Institute of Technology, Beijing 100081;
Abstract: On the measuring of transverse piezoelectric coefficients of Pb(Zr0.52Ti0.48)O3 (PZT) thin films, we derived the mechano-electrical coupling bulge constitutive equations of PZT thin films on the basis of bulge test model and ferroelectric constitutive equations. The bulge samples were prepared by sol-gel and chemical etching methods. Mechano-electrical coupling bulge tests were performed by using modified force-electric experimental platform under the applied voltage between 0—14 V. The results showed that the elastic modulus and residual stress of PZT thin films were 91.9 GPa and 36.2 MPa under pure force field, respectively. The transverse piezoelectric coefficients d31 of PZT thin films increased from -28.9 pm/V to -45.8 pm/V when the voltage increased from 2 V to 14 V. Our work provides an effective analysis method for the transverse piezoelectric properties of other ferroelectric thin film materials by using the modified mechano-electrical coupling bulge test and the corresponding constitutive equations.
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2017, Vol. 31 
