1 School of Materials Engineering, Xi'an Aeronautical University, Xi'an 710077; 2 R&D Center of Lubricating and Protecting Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000;
Abstract: Fullerene-like hydrogenated carbon films (FL-C∶H) were grown by pulse plasma enhanced chemical vapor deposition (PECVD) technique on silicon (n-100) substrate using CH4 as feed stock at ambient temperature. The microstructure of the films and wear debris were characterized by high resolution transmission electron microscopy (HRTEM), Raman spectra(LABRAM) and X-ray photoelectron spectra (XPS). The tribological behaviors were investigated by friction-abrasion testing machine and scanning electron microscope. It was found that the films could be described as fullerene-like nanostructures. The tribological properties of the films were improved significantly. In addition, the FL-C∶H films demonstrate long wear life about 3 538.2 m and ultra-low friction coefficient (0.012) under the 30 N contact load and the 0.1 m/s friction velocity in contrast with the typical hydrogenated carbon films (α-C∶H).
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2018, Vol. 32 
