从工艺参数角度探讨AZ系镁合金表面磁控溅射单层铝及氧化铝膜的耐腐蚀和耐磨损性能

doi:10.11896/j.issn.1005-023X.2017.01.012

材料导报

2017, Vol. 31

Issue (1): 90-96 https://doi.org/10.11896/j.issn.1005-023X.2017.01.012

材料综述

从工艺参数角度探讨AZ系镁合金表面磁控溅射单层铝及氧化铝膜的耐腐蚀和耐磨损性能

高正源^1,2,胡琳盛¹,刘浪³,任毅⁴,李辉君⁵

1 重庆交通大学机电与车辆工程学院,重庆 400074;
2 重庆市计量质量检测研究院,重庆 401121;
3 重庆交通大学土木工程学院,重庆 400074;
4 重庆大学材料科学与工程学院,重庆 400044;
5 重庆国环环境监测有限公司,重庆 400020

Corrosion and Wear Resistance of Magnetron Sputtering Single-layer Aluminum Film and Aluminum Oxide Film on Surface of AZ Magnesium alloys: A Discussion from a Parameter Prespective

GAO Zhengyuan^1,2, HU Linsheng¹, LIU Lang³, REN Yi⁴, LI Huijun⁵

1 School of Mechatronics and Automotive Engineering, Chongqing Jiaotong University, Chongqing 400074;
2 Chongqing Academy of Metrology and Quality Inspection, Chongqing 401121;
3 School of Civil Engineering, Chongqing Jiaotong University, Chongqing 400074;
4 School of Materials Science and Engineering, Chongqing University, Chongqing 400044;
5 Chongqing Guohuan Environmental Monitoring Co., LTD, Chongqing 400020

摘要
参考文献
相关文章
推荐阅读
Metrics

下载:

全文 ( PDF ) ( 1317KB )
输出: BibTeX | EndNote (RIS)

摘要 AZ系镁合金在工业领域具有广阔的应用前景,但其耐腐蚀性能和耐磨损性能差阻碍了其发展。绿色环保的磁控溅射表面涂覆技术是防止镁合金腐蚀和磨损的方法之一。简要地介绍了磁控溅射镀膜技术的原理及特点,评述了当今磁控溅射的重要发展。结合近几年的实验研究,回顾和总结了溅射沉积薄膜技术的发展历程和应用现状,重点分析了溅射工艺参数对薄膜耐腐蚀和耐磨损性能的影响。最后,展望了磁控溅射技术未来的发展趋势。

	服务
	把本文推荐给朋友
	加入引用管理器
	E-mail Alert
	RSS
	作者相关文章
	高正源
	胡琳盛
	刘浪
	任毅
	李辉君

关键词: 镁合金磁控溅射铝及氧化铝膜耐腐蚀/耐磨损性能

Abstract: AZ magnesium alloys has been widely used in industry field. However, the poor corrosion and wear resistance of magnesium and its alloys has been mainly limited their development. Magnetron sputtering is one of the important methods to protect on corrosion and wear of AZ magnesium alloys. The principle and development of magnetron sputtering technologies were introduced in this paper. Based on the experiments in recent years, development and application status of magnetron sputtering technology were reviewed and summarized. And the influence of the sputtering parameters on corrosion and wear resistance of the films was discussed in particular. In the end, the developmental trend of magnetron sputtering was introduced.

Key words: magnesium alloy magnetron sputtering aluminum and aluminum oxide films corrosion and wear resistance

出版日期: 2017-01-10 发布日期: 2018-05-02

ZTFLH:

TB333

基金资助: 重庆市质量技术监督局科研计划资助项目(CQZJKY2013001;CQZJKY2014017);国家质量监督检验检疫总局科技计划资助项目(2014QK263);重庆市南川区科技计划项目(CX201407);重庆市基础与前沿研究计划项目(cstc2015jcyjBX0140);重庆市重点产业共性关键技术创新专项(cstc2016zdcy50002)

作者简介: 高正源:男,1982年生,博士,硕士研究生导师,主要从事机械工程材料、轻金属材料和表面工程方面的研究工作 E-mail:13919919@qq.com 胡琳盛:男,1992年生,硕士研究生,主要从事表面工程方面的研究 E-mail:865610996@qq.com

引用本文:

高正源, 胡琳盛, 刘浪, 任毅, 李辉君. 从工艺参数角度探讨AZ系镁合金表面磁控溅射单层铝及氧化铝膜的耐腐蚀和耐磨损性能[J]. 材料导报, 2017, 31(1): 90-96.
GAO Zhengyuan, HU Linsheng, LIU Lang, REN Yi, LI Huijun. Corrosion and Wear Resistance of Magnetron Sputtering Single-layer Aluminum Film and Aluminum Oxide Film on Surface of AZ Magnesium alloys: A Discussion from a Parameter Prespective. Materials Reports, 2017, 31(1): 90-96.

链接本文:

http://www.mater-rep.com/CN/10.11896/j.issn.1005-023X.2017.01.012 或 http://www.mater-rep.com/CN/Y2017/V31/I1/90

1 Fong K S, Tan M J, Chua B W, et al. Enabling wider use of magnesium alloys for lightweight applications by improving the formability by groove pressing[J]. Procedia CIRP,2015,26:449.
2 Yang L H, Li Y T, Qian B, et al. Polyaspartic acid as a corrosion inhibitor for WE43 magnesium alloy [J]. J Magnesium Alloys,2015,54(1):47.
3 Ge Y F, Jiang B L, Liu M, et al. Preparation and characterization of the micro-arc oxidation composite coatings on magnesium alloys [J]. J Magnesium Alloys,2014,2(4):309.
4 Thirumalaikumarasamy D, Shanmugam K, Balasubramanian V. Influence of chloride ion concentration on immersion corrosion beha-viour of plasma sprayed alumina coatings on AZ31B magnesium alloy[J]. J Magnesium Alloys,2014,2(4):325.
5 Gao Zhengyuan, Pan Fusheng. Development of fabrication processes and adhesion measurement of functional surface coating on magne-sium alloys[J]. J Funct Mater,2012,43(14):1817(in Chinese).
高正源,潘复生.镁合金表面功能涂层制备与界面表征技术的研究进展[J].功能材料,2012,43(14):1817.
6 刘瑞鹏,李刘合.磁控溅射镀膜技术简述[J]. 中国青年科技,2006(8):56.
7 Li Fen, Zhu Ying, Li Liuhe, et al. Review on magnetron sputtering technology and its development [J]. Vacuum Electronics,2011(3):49(in Chinese).
李芬,朱颖,李刘合,等.磁控溅射技术及其发展[J]. 真空电子技术,2011(3):49.
8 Xu Wanjing. Recent developments and applications in magnetron sputteing[J]. Modern Instruments,2005(5):1(in Chinese).
徐万劲.磁控溅射技术进展及应用(上)[J].现代仪器,2005(5):1.
9 Yang Wenmao, Liu Yanwen, Xu Luxiang, et al. Review of film growth by sputtering technology[J]. Chinese J Vacuum Sci Tech-nol,2005,25(3):204(in Chinese).
杨文茂,刘艳文,徐禄祥,等.溅射沉积技术的发展及其现状[J].真空科学与技术学报,2005,25(3):204.
10 Kelly P J, Arnell R D. Magnetron sputtering: A review of recent developments and applications [J]. Vacuum,2000,56(3):159.
11 Jochen M S, William D S, Allan M. Phase formation and mechanical properties of alumina coatings prepared at substrate temperatures less than 500 ℃ by ionized and conventional sputtering [J]. Surf Coat Technol,1997,94:179.
12 Guruvenket S, Rao G M. Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering [J]. Mater Sci Eng: B,2004,106(2):172.
13 Soucˇek P, Schmidtová T, Zábransky L, et al. Evaluation of composition, mechanical properties and structure of nc-TiC/aC: H coatings prepared by balanced magnetron sputtering[J]. Surf Coat Technol,2012,211(42):111.
14 Window B, Savvides N. Charged particle fluxes from planar magnetron sputtering sources [J]. J Vacuum Sci Technol A,1986,4(2):196.
15 Dong Qi, Fan Yudian. Unbalanced magnetron sputtering and its applications [J].J Vacuum Sci Technol,1996,16(1):51(in Chinese).
董骐,范毓殿.非平衡磁控溅射及其应用[J]. 真空科学与技术,1996,16(1):51.
16 Zhou H, Zheng J, et al. The effect of Ti content on the structural and mechanical properties of MoS₂-Ti composite coatings deposited by unbalanced magnetron sputtering system[J]. Phys Procedia,2011,18:234.
17 Mu Zongxin, Zang Hairong, Liu Bingbing, et al. Surface modification of AZ31 mg alloys by depositing silicon nitrides films[J]. J Va-cuum Sci Technol,2012,32(1):6(in Chinese).
牟宗信,臧海蓉,刘冰冰,等.AZ31镁合金基材非平衡磁控溅射镀膜工艺研究[J]. 真空科学与技术学报,2012,32(1):6.
18 Yi P, Peng L, Huang J. Multilayered TiAlN films on Ti6Al4V alloy for biomedical applications by closed field unbalanced magnetron sputter ion plating process [J]. Mater Sci Eng C,2016,59:669.
19 Mao Xinhui, Chen Guoping. Advance in reactive magnetron sputtering [J]. Vacuum,2001(4):1(in Chinese).
茅昕辉,陈国平.反应磁控溅射的进展[J]. 真空,2001(4):1.
20 Maniv S, Miner C, Westwood W D. High rate deposition of transparent conducting films by modified reactive planar magnetron sputtering of Cd₂Sn alloy [J]. J Vacuum Sci Technol,1981,18(2):195.
21 Nyberg T, Berg S. Method for reactive sputtering deposition: US, 7465378 B2[P].2008.
22 Ju H, Xu J. Microstructure and tribological properties of NbN-Ag composite films by reactive magnetron sputtering[J]. Appl Surf Sci,2015,355:878.
23 Zhang Jicheng, Wu Weidong, Xu Hua, et al. The recent developments and applications of magnetron sputtering [J]. Mater Rev,2004,18(4):56(in Chinese).
张继成,吴卫东,许华,等.磁控溅射技术新进展及应用[J].材料导报,2004,18(4):56.
24 Belkind A, Freilich A, Song G, et al. Mid-frequency reactive sputtering of dielectrics: Al₂O₃[J]. Surf Coat Technol,2003,174:88.
25 Gong Qiuyu, Hao Junying, Liu Xiaoqiang, et al. The properties of a-C∶ H( Al,W) films prepared by medium frequency magnetron sputtering[J]. Tribology,2013,33(6):556(in Chinese).
龚秋雨,郝俊英,刘小强,等.中频磁控溅射制备 aC∶ H (Al, W) 薄膜及其性能研究[J].摩擦学学报,2013,33(6):556.
26 Ren Kefei, Yin Mingli, Zhou Changwei, et al. AlN films deposited by middle-frequency magnetron sputtering [J]. Nuclear Techniques,2009,32(3):169(in Chinese).
任克飞,阴明利,邹长伟,等.中频磁控溅射制备AlN薄膜[J].核技术,2009,32(3):169.
27 Xiong J,Xia Y,Xue Y, et al. Development of mid-frequency AC rea-ctive magnetron sputtering for fast deposition of Y₂O₃ buffer layers [J]. Physica C: Superconductivity and its Applications,2014,497:38.
28 Kelly P J, Hisek J, Zhou Y, et al. Advanced coatings through pulsed magnetron sputtering [J]. Surf Eng,2004,20(3):157.
29 Lisco F, Kaminski P M, Abbas A, et al. High rate deposition of thin film cadmium sulphide by pulsed direct current magnetron sputtering [J]. Thin Solid Films,2015,574:43.
30 Chen Y H, Hsu C C, He J L. Antibacterial silver coating on poly (ethylene terephthalate) fabric by using high power impulse magnetron sputtering [J]. Surf Coat Technol,2013,232:868.
31 Dai H Y, Zhan C, Du J. Studies on the influence of sputtering power on amorphous carbon films deposited by pulsed unbalanced magnetron sputtering [J]. Optik-International J Light Electron Optics,2016,127(5):2512.
32 Zhang Jin, Yang Donghua, Wang Dongya, et al. Mechanical properties of aluminum films on magnesium alloys by magnetron sputtering[J]. J University of Science and Technology Beijing,2008,30(12):1388(in Chinese).
张津,杨栋华,王东亚,等.镁合金表面磁控溅射沉积铝膜的力学性能[J].北京科技大学学报,2008,30(12):1388.
33 Wang Zhenlin, Yang Hui. Characterization study of Al magnetron sputtering coating on AZ31 magnesium alloy[J]. Light Alloy Fabrication Technol,2007,35(5):32(in Chinese).
王振林,杨惠.AZ31镁合金磁控溅射镀铝膜的性能研究[J].轻合金加工技术,2007,35(5):32.
34 Shen Yu, Zhu Xiangrong. Research on surface properties of Al and TiN films deposited on AZ31 magnesium alloys by magnetron sputtering [J]. Light Alloy Fabrication Technol,2014(8):56(in Chinese).
沈钰,祝向荣.AZ31镁合金表面磁控溅射Al和TiN的试验研究[J]. 轻合金加工技术,2014(8):56.
35 Wei Qi, Zhang Yu, et al. Study on Al thin films on AZ31 Mg alloy surface by magnetron sputtering[J]. Hot Working Technol,2014(22):161(in Chinese).
魏琦,张玉,等. AZ31镁合金表面磁控溅射沉积铝膜研究[J].加工工艺学,2014(22):161.
36 Wang Zhenlin, Yang Hui, Yang Donghua. Study on aluminum anticorrosion protective coating on magnesium alloy by magnetron sputtering[J]. China Mechan Eng,2008,19(8):993(in Chinese).
王振林,杨惠,杨栋华.镁合金磁控溅射镀铝耐蚀防护层研究[J].中国机械工程,2008,19(8):993.
37 Wu G S. Fabrication of Al and Al/Ti coatings on magnesium alloy by sputtering [J]. Mater Lett,2007,61(18):3815.
38 Huo Hongwei, Wang Fuhui, Li Ying, et al. Effect of aluminum diffusion coating on corrosion resistance of AZ91D magnesium alloy [J]. Corros Sci Protection Technol,2001,13:484(in Chinese).
霍宏伟,王福会,李瑛,等.Al扩散涂层对AZ91D 镁合金耐腐蚀性能的影响[J]. 腐蚀科学与防护技术,2001,13:484.
39 Tian L H, Zhu R H, Zhang Y, et al. Microstructure and corrosion resistance of aluminized coatings on magnesium alloy by pulsed bias magnetron sputtering[J].Mater Sci Forum,2011,68(7):688.
40 Wei Chunbei, Dai Mingjiang, Gao Yang, et al. Magnetron sputtered aluminum film on AZ91D magnesium alloy and its corrosion resis-tance after chemical conversion treatment[J]. Electroplating Fini-shing,2012,31(4):30(in Chinese).
韦春贝,代明江,高阳,等.AZ91D 镁合金磁控溅射镀铝膜及其化学转化后的耐蚀性[J].电镀与涂饰,2012,31(4):30.
41 Zhang Yan. Microstructure, corrosion and wear properties of Al and AlN/Al coatings on magnesium alloy[D].Taiyuan: Taiyuan University of Technology,2010(in Chinese).
张岩. 镁合金表面渗镀Al及AlN/Al涂层的组织结构和腐蚀磨损性能研究[D]. 太原:太原理工大学,2010.
42 Wu Liangwen. Investigation on microstructure and properties of Al,Ti-Al-N,Al/Ti-Al-N films fabricated on AZ91D magnesium alloy by magnetron sputtering[D].Zhenjiang: Jiangsu University Sci Tech-nol,2011(in Chinese).
吴良文.AZ91D镁合金表面磁控溅射Al、Ti-Al-N、Al/Ti-Al-N膜及其组织与性能研究[D]. 镇江:江苏科技大学,2011.
43 Gao Zhengyuan, Pan Fusheng. Investigation on microstructure and mechanical properties of nano-ceramic coating on AZ31 magnesium alloys[J]. J Chongqing University,2012,35(7):67(in Chinese).
高正源,潘复生.AZ31镁合金表面纳米陶瓷涂层的组织与力学性能分析[J].重庆大学学报,2012,35(7):67.
44 Zhou C, Xu J, Jiang S. Reactive sputter deposition of alumina films on magnesium alloy by double cathode glow-discharge plasma technique [J]. Mater Characterization,2010,61(2):249.
45 Gao Zhengyuan, Pan Fusheng, Tang Aitao, et al. Investigation on corrosion and wear resistance of AZ31 magnesium alloy by single la-yer nanocrystalline Al₂O₃thin film [J]. J Funct Mater,2013,44(8):1069(in Chinese).
高正源,潘复生,汤爱涛,等.AZ31镁合金表面纳米Al₂O₃涂层的耐蚀耐磨性能研究[J]. 功能材料,2013,44(8):1069.
46 Terai T, Kobayashi T, Mitsuyama T, et al. Fabrication and properties of Al₂O₃ and AlN coatings for fusion reactor blanket by sputtering method [J]. Surf Coat Technol,1998,106(1):18.
47 Wu G, Zeng X, Ding W, et al. Characterization of ceramic PVD thin films on AZ31 magnesium alloys [J]. Appl Surf Sci,2006,252(20):7422.
48 Ruben, Kotoka, Sergey Y, et al. Corrosion behavior of reactive sputtered Al₂O₃ and ZrO₂ thin films on Mg disk immersed in saline solution [J]. J Mater Sci Technol,2015,31(9):873.
49 Wu Guosong. Fabrication and corrosion failure of PVD coatings on magnesium alloy[D].Shanghai: Shanghai Jiao Tong University,2006(in Chinese).
吴国松.镁合金表面PVD膜层的制备与腐蚀破坏[D].上海:上海交通大学,2006.
50 Xin Y, Huo K, Hu T, et al. Mechanical properties of Al₂O₃/Al bi-layer coated AZ91 magnesium alloy [J]. Thin Solid Films,2009,517(17):5357.
51 Wang Xuemin, Zeng Xiaoqin, Wu Guosong, et al. Applications of magnetron sputtering on magnesium alloys surface treatment[J]. Foundry Technol,2006,27(4):412(in Chinese).
王学敏,曾小勤,吴国松,等.磁控溅射在镁合金表面处理中的应用[J].锻造技术,2006,27(4):412.

[1]	赵笑昆, 李博研, 张增光. 磁控溅射沉积制备Al掺杂ZnO薄膜的棒状晶粒生长[J]. 材料导报, 2019, 33(z1): 112-115.
[2]	刘印, 王昌, 于振涛, 盖晋阳, 曾德鹏. 医用镁合金的力学性能研究进展[J]. 材料导报, 2019, 33(z1): 288-292.
[3]	赵曦, 于振涛, 郑继明, 余森, 王昌. 合金元素影响镁合金弹性性能的第一性原理计算研究[J]. 材料导报, 2019, 33(z1): 293-296.
[4]	彭鹏, 汤爱涛, 佘加, 周世博, 潘复生. 超细晶镁合金的研究现状及展望[J]. 材料导报, 2019, 33(9): 1526-1534.
[5]	李响, 毛萍莉, 王峰, 王志, 刘正, 周乐. 长周期有序堆垛相(LPSO)的研究现状及在镁合金中的作用[J]. 材料导报, 2019, 33(7): 1182-1189.
[6]	宋雨来, 付洪德, 王震, 杨鹏聪. 镁合金的应力腐蚀开裂:机理、影响因素、防护技术[J]. 材料导报, 2019, 33(5): 834-840.
[7]	姚天宇, 杨海燕, 周素洪, 叶兵, 蒋海燕. 镁合金表面电沉积铝工艺的研究进展[J]. 材料导报, 2019, 33(3): 470-478.
[8]	周超, 李得天, 周晖, 张凯锋, 曹生珠. MEMS器件真空封装用非蒸散型吸气剂薄膜研究概述[J]. 材料导报, 2019, 33(3): 438-443.
[9]	张娜,程仁菊,董含武,刘文君,詹俊,蒋斌,潘复生. Sr在耐热镁合金中的应用及研究进展[J]. 材料导报, 2019, 33(15): 2565-2571.
[10]	郑博, 赵丽, 董仕节, 胡心彬. 镁铝金属间化合物的第一性原理研究[J]. 材料导报, 2019, 33(14): 2426-2430.
[11]	孙科学, 常月欣, 成谢锋. xBiInO₃-(1-x)PbTiO₃薄膜的横向压电特性[J]. 材料导报, 2019, 33(14): 2299-2304.
[12]	王春明,杨牧南,黄建辉,刘位江,梁彤祥. 镁合金表面自纳米化研究进展及现状[J]. 材料导报, 2019, 33(13): 2260-2265.
[13]	石磊, 柳翊, 沈俊芳, 金文中, 王黎, 张伟. P-ECAP挤压镁合金空心壁板的晶粒度演变模拟和实验研究[J]. 材料导报, 2019, 33(12): 2019-2024.
[14]	周杰, 李克, 王彪, 艾凡荣. 添加Nd对Mg-Zn-Ca合金非晶形成能力和耐蚀性的影响[J]. 材料导报, 2019, 33(1): 73-77.
[15]	谢红梅, 蒋斌, 彭程, 潘复生. SiO₂/MoS₂复合纳米基润滑油在镁合金冷轧中的摩擦学性能及润滑机理[J]. 《材料导报》期刊社, 2018, 32(8): 1276-1282.

[1]	Bingwei LUO,Dabo LIU,Fei LUO,Ye TIAN,Dongsheng CHEN,Haitao ZHOU. Research on the Two Typical Infrared Detection Materials Serving at Low Temperatures: a Review[J]. Materials Reports, 2018, 32(3): 398 -404 .
[2]	Huimin PAN,Jun FU,Qingxin ZHAO. Sulfate Attack Resistance of Concrete Subjected to Disturbance in Hardening Stage[J]. Materials Reports, 2018, 32(2): 282 -287 .
[3]	Siyuan ZHOU,Jianfeng JIN,Lu WANG,Jingyi CAO,Peijun YANG. Multiscale Simulation of Geometric Effect on Onset Plasticity of Nano-scale Asperities[J]. Materials Reports, 2018, 32(2): 316 -321 .
[4]	Xu LI,Ziru WANG,Li YANG,Zhendong ZHANG,Youting ZHANG,Yifan DU. Synthesis and Performance of Magnetic Oil Absorption Material with Rice Chaff Support[J]. Materials Reports, 2018, 32(2): 219 -222 .
[5]	Ninghui LIANG,Peng YANG,Xinrong LIU,Yang ZHONG,Zheqi GUO. A Study on Dynamic Compressive Mechanical Properties of Multi-size Polypropylene Fiber Concrete Under High Strain Rate[J]. Materials Reports, 2018, 32(2): 288 -294 .
[6]	XU Zhichao, FENG Zhongxue, SHI Qingnan, YANG Yingxiang, WANG Xiaoqi, QI Huarong. Microstructure of the LPSO Phase in Mg_98.5Zn_0.5Y₁ Alloy Prepared by Directional Solidification and Its Effect on Electromagnetic Shielding Performance[J]. Materials Reports, 2018, 32(6): 865 -869 .
[7]	ZHOU Rui, LI Lulu, XIE Dong, ZHANG Jianguo, WU Mengli. A Determining Method of Constitutive Parameters for Metal Powder Compaction Based on Modified Drucker-Prager Cap Model[J]. Materials Reports, 2018, 32(6): 1020 -1025 .
[8]	WANG Tong, BAO Yan. Advances on Functional Polyacrylate/Inorganic Nanocomposite Latex for Leather Finishing[J]. Materials Reports, 2017, 31(1): 64 -71 .
[9]	HUANG Dajian, MA Zonghong, MA Chenyang, WANG Xinwei. Preparation and Properties of Gelatin/Chitosan Composite Films Enhanced by Chitin Nanofiber[J]. Materials Reports, 2017, 31(8): 21 -24 .
[10]	YUAN Xinjian, LI Ci, WANG Haodong, LIANG Xuebo, ZENG Dingding, XIE Chaojie. Effects of Micro-alloying of Chromium and Vanadium on Microstructure and Mechanical Properties of High Carbon Steel[J]. Materials Reports, 2017, 31(8): 76 -81 .

Viewed

Full text

Abstract

Cited

Shared

Discussed