Research Progress of the Fixed Abrasive Tools for Ultra-precision Planar Machining of Functional Ceramics
WANG Jie1,2, ZHAO Ping1, LYU Binghai1, ZHANG Taojie1, HUANG Sheng1, HANG Wei1, YUAN Julong1
1 Ultra-precision Machining Center, Zhejiang University of Technology, Hangzhou 310014 2 Fair Friend Institute of Electromechanics, Hangzhou Vocational & Technical College, Hangzhou 310018
Abstract: unctional ceramics are inorganic non-metallic materials that can achieve certain functions.Functional ceramic parts and products with plane as an important working face are widely used in the fields of medical treatment, people's livelihood, national defense, military industry, etc.In order to better meet the functional requirements of the product, the processing quality of the plane needs to reach the sub-micron level of shape accuracy, nanometer level of surface roughness, or even higher level. Therefore, ultra-precision machining is urgently needed for functional ceramic plane.Abrasive processing is an important way of ultra-precision machining, including consolidated abrasive and free abrasive processing, which complement each other.Whether the fixed abrasive processing can meet the ultra-precision requirements of the processed workpiece, the abrasive tool is very important.The grinding wheel used in grinding, the lapping pad and the polishing pad used in fixed abrasive lapping and polishing are all fixed abrasive tools. The stable physical and chemical properties of functional ceramics determine that the processing accuracy of functional ceramics can be maintained for a long time after being processed, which also determines the processing of functional ceramics is different from metal materials, organic materials and engineering ceramics. The fixed abrasive tools used in ultra-precision plane processing of functional ceramics are also different from those used in ordinary processing, so it is urgent to study them pertinently.The factors affecting whether the fixed abrasive tools can meet the processing requirements mainly include: reasonable selection or modification of abrasives and binders as main raw materials of consolidation abrasives in abrasive preparation; the passivation of abrasives and the blockage of abrasive debris on the surface of fixed abrasive tools may occur in the use; whether optimizing macro-topography of abrasive tool surface or not. In recent years, researchers at home and abroad choose abrasives based on different removal mechanisms of functional ceramics, select or modify binders for different ultra-precision planar fixed abrasive processing, make the abrasive tools maintain high efficiency and high accuracy for a long time by means of in-process dressing and surface structuring. As a result, the fixed abrasive tools prepared or selected have been successfully applied in the planar processing of the functional ceramics materials, such as silicon, germanium, sapphire, silicon carbide, glass-ceramics, lithium triborate, and so on. The processing can achieve ultra-precision processing level, and meet the functional requirements of related products in different fields. In this paper, the research progress of abrasives for ultra-precision surface machining of functional ceramics is reviewed.The selection of abrasive materials, application of fixed abrasive tools,in-process dressing of abrasives and surface structure are introduced respectively.The problems faced by the research are analyzed and the future are prospected, in order to provide a reference for the industry and relevant researchers to fixed abrasive tools for ultra-precision machining of functional ceramic plane.
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2019, Vol. 33 
