调制周期对磁控溅射Cr/类石墨碳多层膜腐蚀-磨损性能的影响

doi:10.11896/cldb.23070129

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Abstract Critical moving parts used in marine environment suffer the interactive impact by corrosion and wear, and depositing tribo-corrosion-resistant coatings on these metal components is one of the effective means to improve their service life. This work, using DC magnetron sputtering technique, prepared on surfaces of 15-5PH stainless steel substrates three samples of films, which were consisted of multiple alternating layers of Cr and graphite-like carbon (GLC), and differed in modulation periodicities (940 nm, 375 nm and 234 nm, marked as S1, S2 and S3, respectively). Further, it carried out morphological observation, electrochemical test, and tribo-corrosion test to clarify the effects of modulation periodicity on the films' structures, electrochemical properties, and tribo-corrosion resistances. The experiments found, with the decrease of modulation periodicity, a gradually decreasing tendency of columnar crystal growth, and consequently, gradual increases in film density and sp² bond content, resulting in intensified graphitization and higher mechanical strength. In artificial seawater, multi-layer films with smaller modulation periodicities had more interlayer interfaces, which facilitated inhibition of crack expansion and corrosion channels formation and hindered the penetration of corrosive medium. And the test indicated the best corrosion resistance acquired by S3 film. In the tribo-corrosion test, due to the interaction of load and corrosive medium, the S2 film with denser structure and suitable modulation periodicity achieved a wear rate of only 2.50×10^-16 m³/(N·m), exhibiting optimal tribo-corrosion resistance. It could be concluded that the adjustment of modulation periodicity is of key importance to improving the tribo-corrosion resistance of Cr/GLC multi-layer films.

Key words： magnetron sputtering alternating Cr/graphite-like carbon (GLC) multi-layer film modulation periodicity tribo-corrosion

Published: 10 November 2024 Online: 2024-11-11

CLC number:

TH117.1

Fund:National Natural Science Foundation of China (52275186) and Intelligence Introduction Project of Foreign Special Projects Bureau (HNGD2020003).

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	LI Yingchun
	YANG Gengsheng
	YANG Mingxuan
	QIU Ming
	FAN Henghua

Cite this article:

LI Yingchun,YANG Gengsheng,YANG Mingxuan, et al. Influence of Modulation Periodicity on Tribo-corrosion Properties of Magnetron-sputtered Film Consisting of Multiple Alternating Layers of Cr and Graphite-like Carbon[J]. Materials Reports, 2024, 38(21): 23070129-7.

URL:

http://www.mater-rep.com/EN/10.11896/cldb.23070129 OR http://www.mater-rep.com/EN/Y2024/V38/I21/23070129

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