表面氧含量对高纯硅粉高温氮化行为的影响

doi:10.11896/j.issn.1005-023X.2018.16.003

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Abstract The effects of surface oxygen content on the nitridation of high-purity silicon powders were studied, high-α phase silicon nitride was prepared via direct nitridation process of silicon powders in the N₂/H₂ atmosphere.The results show that the content of α-Si₃N₄ in nitridation products tended to increase first and then decrease with the increase of the oxygen content on the silicon surface. When the surface oxygen content of silicon powders was 3.91%, the α-Si₃N₄ content of nitridation products could reach 97%, the residual silicon content was lower than 1% and the oxygen content in central region was 1.71%, the micrograph morphology of nitridation products mainly composed of rod shaped α-Si₃N₄ whisker which was formed by chemical vapor deposition at 1 350 ℃ for 3 hours in the N₂/H₂ atmosphere. When the surface oxygen content of silicon powders was lower than 4.38%, all the content of the α-Si₃N₄ in nitridation products was over 95%, a small amount of β-Si₃N₄ and residual silicon phase, which was examined by XRD, can be observed, but no silicon oxynitride. While the oxygen content of silicon powders was higher than 5.61%, the content of silicon oxynitride increased obviously with the increase of oxygen content. While the oxygen content of silicon powders was lower than 5.61%, the residual silicon of nitridation products decreased significantly with the increase of oxygen content, which showed that the increase of oxygen in silicon powders could accelerate the nitridation rate significantly and then reduce the content of residual silicon in nitridation products.

Key words： α-silicon nitride oxygen content direct nitridation high-purity silicon silicon oxynitride

Published: 18 September 2018

CLC number:

TQ174

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	Articles by authors
	LAN Yu
	LI Bing
	ZHOU Zihao
	ZHANG Yichun
	YIN Chuanqiang
	WEI Xiuqin
	ZHOU Lang

Cite this article:

LAN Yu,LI Bing,ZHOU Zihao, et al. Effects of Surface Oxygen Content on the High-temperature Nitridation of High-purity Silicon Powders[J]. Materials Reports, 2018, 32(16): 2719-2722.

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http://www.mater-rep.com/EN/10.11896/j.issn.1005-023X.2018.16.003 OR http://www.mater-rep.com/EN/Y2018/V32/I16/2719

1 Hampshire S. Silicon nitride ceramics-review of structure, proces-sing and properties[J]. Journal of Achievements in Materials and Manufacturing Engineering,2007,24(1):43.
2 Bocanegra-Bernal M H, Matovic B. Mechanical properties of silicon nitride-based ceramics and its use in structural applications at high temperatures[J]. Materials Science and Engineering: A,2010,527(6):1314.
3 Riley F L. Silicon nitride and related materials[J]. Journal of the American Ceramic Society,2000,83(2):245.
4 Ren H, Zhang L, Su K, et al. Thermodynamic study on the chemical vapor deposition of silicon nitride from the SiCl₄-NH₃-H₂ system[J]. Computational and Theoretical Chemistry,2015,1051:93.
5 Sahu B B, Shin K S, Han J G. Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF-UHF hybrid plasmas[J]. Plasma Sources Science and Technology,2016,25(1):015017.
6 Ziegenbalg G, Breuel U, Ebrecht E, et al. Synthesis of α-silicon nitride powder by gas-phase ammonolysis of CH₃SiCl₃[J]. Journal of the European Ceramic Society,2001,21(7):947.
7 Park Y J, Park M J, Kim J M, et al. Sintered reaction-bonded silicon nitrides with high thermal conductivity: The effect of the star-ting Si powder and Si₃N₄ diluents[J]. Journal of the European Ceramic Society,2014,34(5):1105.
8 Pavarajarn V, Kimura S. Catalytic effects of metals on direct nitridation of silicon[J]. Journal of the American Ceramic Society,2001,84(8):1669.
9 Dervišbegovic H, Riley F L. The role of hydrogen in the nitridation of silicon powder compacts[J]. Journal of Materials Science,1981,16(7):1945.
10 Pigeon R G, Varma A, Miller A E. Some factors influencing the formation of reaction-bonded silicon nitride[J]. Journal of Materials Science,1993,28(7):1919.
11 Yao G, Li Y, Jiang P, et al. Formation mechanisms of Si₃N₄ and Si₂N₂O in silicon powder nitridation[J]. Solid State Sciences,2017,66:50.
12 Vongpayabal P, Kimura S. Kinetics of SiO vapor ammonolysis for nano-sized silicon nitride powder synthesis[J]. Powder technology,2005,156(2):73.
13 Lin D, Kimura S. Kinetics of silicon monoxide ammonolysis for nanophase silicon nitride synthesis[J]. Journal of the American Ceramic Society,1996,79(11):2947.
14 Wen Y, Xia D, Xuan W. Modeling for particle size prediction and mechanism of silicon nitride nanoparticle synthesis by chemical vapor deposition[J]. Aerosol Science and Technology,2017,51(7):845.
15 Parikh R S, Lightfoot A, Haggerty J S, et al. Effects of trace O₂ levels on the nitriding kinetics of high-purity silicon powders[J]. Journal of the American Ceramic Society,1999,82(10):2626.
16 Campos-Loriz D, Riley F L. The effect of silica on the nitridation of silicon[J]. Journal of Materials Science,1976,11(1):195.
17 Rahaman M N, Moulson A J. The removal of surface silica and its effect on the nitridation of high-purity silicon[J]. Journal of Mate-rials Science,1984,19(1):189.
18 Shaw N J. The combined effects of Fe and H₂ on the nitridation of silicon[J]. Journal of Materials Science Letters,1982,1(8):337.
19 Campos-Loriz D, Riley F L. The effects of hydrogen on the nitridation of silicon[J]. Journal of Materials Science,1979,14(4):1007.
20 Jovanovic Z, Kimura S. Use of two-phase standards of unknown compositions to determine calibration constants for powder XRD by linear regression[J]. Journal of the American Ceramic Society,1994,77(8):2226.
21 Rakshit J, Das P K. Optimization of time-temperature schedule for nitridation of silicon compact on the basis of silicon and nitrogen reaction kinetics[J]. Bulletin of Materials Science,2000,23(4):249.
22 Barsoum M, Kangutar P, Koczak M J. Nitridation mechanisms of silicon powder compacts[C]//13th Annual Conference on Composites and Advanced Ceramic Materials, Part 1 of 2: Ceramic Engineering and Science Proceedings, Volume 10.John Wiley & Sons,2009:794.
23 Jennings H M. On reactions between silicon and nitrogen[J]. Journal of Materials Science,1983,18(4):951.
24 Riley F L. Reaction bonded silicon nitride[C]//Materials Science Forum. Trans Tech Publications,1989,47:70.
25 叶大伦.实用无机物热力学数据手册[M].北京:冶金工业出版社,2002:13.