墨水直写、喷墨打印和激光直写技术及其在微电子器件中的应用<sup>*</sup>

doi:10.11896/j.issn.1005-023X.2017.09.022

Abstract
Figure/Table
References
Related Citation (3)

Download:

Full Text ( PDF ) (1969KB)
Export: BibTeX | EndNote (RIS)

Abstract Direct writing is one kind of micro-fabrication technologies which can realize materials fabrication and processing in a broad range of size from sub-micrometer to several centimeters without masks. Direct ink writing, inkjet printing and direct laser writing are the most widely used direct writing technologies which enable fast and accurate fabrication of structures with high resolutions. A variety of materials including metals, ceramics, polymers and hydrogels can be processed for the formation of complicated two and three-dimensional architectures by these techniques. Therefore, they are widely used in many different fields such as microelectronics, tissue engineering, microfluidics and so on. In this review, we summarize the materials and principles of the three direct writing techniques, discuss their advantages and disadvantages, and then focus on their applications on microelectronics. An overview of the state-of-art developments in this area is given, the main challenges are discussed and the future trends is predicted.

Key words： direct writing microelectronics electrodes

Published: 03 May 2018

CLC number:	TP39
	TB332

	Service
	E-mail this article
	Add to my bookshelf
	Add to citation manager
	E-mail Alert
	RSS
	Articles by authors
	CHEN Liao
	TANG Xingwei
	ZHOU Han
	FAN Tongxiang

Cite this article:

CHEN Liao,TANG Xingwei,ZHOU Han, et al. Direct Ink Writing, Inkjet Printing and Direct Laser Writing Techniques and Their Applications in Microelectronics[J]. Materials Reports, 2017, 31(9): 158-164.

URL:

http://www.mater-rep.com/EN/10.11896/j.issn.1005-023X.2017.09.022 OR http://www.mater-rep.com/EN/Y2017/V31/I9/158

[1]	Hon K K B, Li L, Hutchings I M. Direct writing technology—Advances and developments[J]. CIRP Annals—Manuf Technol,2008,57(2):601.
[2]	Ambrosi A, Pumera M.3D-printing technologies for electrochemical applications[J]. Chem Soc Rev,2016,45(10): 2740.
[3]	Gratson G M, et al.Microperiodic structures: Direct writing of three-dimensional webs[J]. Nature,2004, 428(6981):386.
[4]	Arnold C, Sutto T, et al.Direct-write laser processing creates tiny electrochemical systems[J]. Laser Focus World,2004,40(5):S9.
[5]	Selimis A, Mironov V, Farsari M.Direct laser writing: Principles and materials for scaffold 3D printing[J]. Microelectron Eng,2015,132:83.
[6]	Lewis J A.Direct ink writing of 3D functional materials[J]. Adv Funct Mater,2006,16(17):2193.
[7]	Therriault D, White S R, Lewis J A.Chaotic mixing in three-dimensional microvascular networks fabricated by direct-write assembly[J]. Nat Mater,2003,2(4):265.
[8]	Smay J E, Cesarano Ⅲ J, Tuttle B A, et al.Piezoelectric properties of 3-X periodic Pb(ZrxTi1-x)O3-polymer composites[J]. J Appl Phys,2002,92(10):6119.
[9]	Lous G M, Cornejo I A, McNulty T F, et al. Fabrication of piezoelectric ceramic/polymer composite transducers using fused deposition of ceramics[J]. J Am Ceram Soc,2000,83(1):124.
[10]	Duoss E B, Twardowski M, Lewis J A.Sol-gel inks for direct-write assembly of functional oxides[J]. Adv Mater,2007, 19(21):3485.
[11]	Barry R A, Shepherd R F, Hanson J N, et al.Direct-write assembly of 3D hydrogel scaffolds for guided cell growth[J]. Adv Mater,2009,21(23):2407.
[12]	Attinger D, Zhao Z, et al.An experimental study of molten microdroplet surface deposition and solidification: Transient beha-vior and wetting angle dynamics[J]. J Heat Transfer,2000,122(3):544.
[13]	Fromm J.Numerical calculation of the fluid dynamics of drop-on-demand jets[J]. IBM J Res Development,1984, 28(3):322.
[14]	Maruo S, Nakamura O, Kawata S.Three-dimensional microfa brication with two-photon-absorbed photopoly merization[J]. Optics Lett,1997,22(2):132.
[15]	El-Kady M F, Strong V, Dubin S, et al. Laser scribing of high-performance and flexible graphene-based electrochemical capacitors[J]. Science,2012,335(6074):1326.
[16]	Ahn B Y, Lorang D J, Duoss E B, et al.Direct-write assembly of microperiodic planar and spanning ITO microelectrodes[J]. Chem Commun,2010,46(38):7118.
[17]	Nathan-Walleser T, Lazar I-M, Fabritius M, et al.3D micro-extrusion of graphene-based active electrodes: Towards high-rate AC line filtering performance electrochemical capacitors[J]. Adv Funct Mater,2014,24(29):4706.
[18]	Zhu C, Han T Y J, et al. Highly compressible 3D pe-riodic graphene aerogel microlattices[J]. Nat Commun,2015,6:6962.
[19]	Zhu C, Liu T, Qian F, et al.Supercapacitors based on three-dimensional hierarchical graphene aerogels with periodic macropores[J]. Nano Lett,2016,16(6):3448.
[20]	Ahn B Y, Duoss E B, Motala M J, et al.Omnidirectional printing of flexible, stretchable, and spanning silver microelectrodes[J].Scie-nce,2009,323(5921):1590.
[21]	Adams J J, Duoss E B, Malkowski T F, et al.Conformal printing of electrically small antennas on three-dimensional surfaces[J]. Adv Mater,2011,23(11):1335.
[22]	Chen P, Fu Y, Aminirad R, et al.Fully printed separated carbon nanotube thin film transistor circuits and its application in organic light emitting diode control[J]. Nano Lett,2011,11(12):5301.
[23]	Vatani M, Engeberg E D, Choi J W.Conformal direct-print of piezoresistive polymer/nanocomposites for compliant multi-layer tactile sensors[J]. Additive Manuf,2015,7:73.
[24]	Boley J W, White E L, et al.Direct writing of gallium-indium alloy for stretchable electronics[J]. Adv Funct Mater,2014,24:3501.
[25]	Sun K, et al.3D printing of interdigitated Li-ion microbattery architectures[J]. Adv Mater, 2013,25(33):4539.
[26]	Fu K, Wang Y, et al.Graphene oxide-based electrode inks for 3D-printed lithium-ion batteries[J]. Adv Mater,2016,28(13):2587.
[27]	Kong Y L, Tamargo I A, Kim H, et al.3D printed quantum dot light-emitting diodes[J]. Nano Lett,2014,14(12): 7017.
[28]	Sirringhaus H, Kawase T, et al.High-resolution inkjet printing of all-polymer transistor circuits[J]. Science, 2000,290:2123.
[29]	Wang J, Gu J, et al.Low-cost fabrication of submicron all polymer field effect transistors[J]. Appl Phys Lett,2006,88(13):133502.
[30]	Sele C W, von Werne T, Friend R H, et al. Lithography-free, self-aligned inkjet printing with sub-hundred-nanometer resolution[J]. Adv Mater,2005,17(8):997.
[31]	Li J, Zhao Y, Tan H S, et al.A stable solution-processed polymer semiconductor with record high-mobility for printed transistors[J]. Sci Rep,2012,2:754.
[32]	Tekin E, Smith P J, Hoeppener S, et al.Inkjet printing of luminescent CdTe nanocrystal-polymer composites[J]. Adv Funct Mater,2007,17(1):23.
[33]	Wood V, Panzer M J, Chen J, et al.Inkjet-printed quantum dot-poly-mer composites for full-color AC-driven displays[J]. Adv Mater,2009,21(21):2151.
[34]	Gorter H, Coenen M, Slaats M, et al.Toward inkjet printing of small molecule organic light emitting diodes[J]. Thin Solid Films,2013,532:11.
[35]	Xu Y, Hennig I, et al.Inkjet-printed energy storage device using graphene/polyaniline inks[J]. J Power Sources,2014,248:483.
[36]	Xu B B, et al.Laser patterning of conductive gold micronanostructures from nanodots[J]. Nanoscale,2012,4(22):6955.
[37]	Seo B H, Youn J, Shim M.Direct Laser writing of air-stable p-n junctions in graphene[J]. ACS Nano,2014,8(9):8831.
[38]	Zhang Y, Guo L, Wei S, et al.Direct imprinting of microcircuits on graphene oxides film by femtosecond laser reduction[J]. Nano Today,2010,5(1):15.
[39]	Gao W, Singh N, Song L, et al.Direct laser writing of micro-supercapacitors on hydrated graphite oxide films[J]. Nat Nanotechnol,2011,6(8):496.
[40]	Zhou Y, Bao Q, et al.Microstructuring of graphene oxide nanosheets using direct laser writing[J]. Adv Mater,2010,22(1):67.
[41]	Rapp L, Diallo A K, et al.Pulsed-laser printing of organic thin-film transistors[J]. Appl Phys Lett, 2009,95(17):171109.
[42]	Shaw S J, Lippert T, Nagel M, et al.Red-green-blue polymer light-emitting diode pixels printed by optimized laser-induced forward transfer[J]. Appl Phys Lett,2012,100(20):203303.
[43]	Nam W, Mitchell J I, et al.Laser direct writing of silicon field effect transistor sensors[J]. Appl Phys Lett,2013,102(9):093504.