五氧化二钒薄膜材料制备方法研究进展

doi:10.11896/cldb.22100297

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Abstract Due to the saturated oxidation state of V⁵⁺, vanadium pentoxide becomes the most stable oxide in the vanadium system. As a functional material, vanadium pentoxide thin film has great application potential in many scientific fields and has attracted more and more attention. This is mainly attributed to its special layered structure, high energy density, good chemical and thermal stability, and excellent optical and electrical properties. Vanadium pentoxide thin films can be prepared in many ways. Using different experimental methods, the electrical and optical properties of vanadium pentoxide thin films prepared on different substrates are also significantly different due to differences in chemical composition and organizational structure. In this paper, the existing preparation technology of vanadium pentoxide thin film is described in detail, and the development trend of vanadium pentoxide thin film material application is prospected, aiming to provide reference for the development of vanadium pentoxide thin film industry.

Key words： vanadium pentoxide thin film sol-gel method sputtering method spray pyrolysis process

Published: 10 March 2024 Online: 2024-03-18

CLC number:

TQ135.1+1

Fund:Regional Innovation Capability Guidance Plan of Shaanxi Province (2022QFY10-05, 2022QFY10-04).

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	Articles by authors
	DU Jinjing
	SUN Ye
	ZHU Jun
	LI Qian
	WANG Bin
	LIU Jingtian
	MENG Xiaorong

Cite this article:

DU Jinjing,SUN Ye,ZHU Jun, et al. Research Progress in Preparation Methods of Vanadium Pentoxide Thin Film Materials[J]. Materials Reports, 2024, 38(5): 22100297-9.

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http://www.mater-rep.com/EN/10.11896/cldb.22100297 OR http://www.mater-rep.com/EN/Y2024/V38/I5/22100297

1 Beijing Normal University, Central China Normal University, Nanjing Normal University, Inorganic Chemistry Department, ed. Inorganic che-mistry (Fourth Edition), Higher Education Press, China, 2003, pp. 747 (in Chinese).
北京师范大学, 华中师范大学, 南京师范大学无机化学教研室编. 无机化学(第四版下册), 高等教育出版社, 2003, pp. 747.
2 Qi J. Preparation and application of vanadium oxides, Chemical Industry Publishing House, China, 2017 (in Chinese).
齐济. 钒氧化物的制备及其应用, 化学工业出版社, 2017.
3 Morin F J. Physical Review Letters, 1959, 3(1), 34.
4 Armer C F, Lübke M, Reddy M V, et al. Journal of Power Sources, 2017, 353, 40.
5 Xu Y K, Hu Y F, Sun S, et al. ECS Journal of Solid State Science and Technology, 2020, 9(7), 3001.
6 Beke S. Thin Solid Films, 2011, 519(6), 1761.
7 Babeva T, Awala H, Grand J, et al. Journal of Physics: Conference Series, 2018, 992(1), 012038.
8 Raja S, Subramani G, Bheeman D, et al. Optik - International Journal for Light and Electron Optics, 2016, 127(1), 461.
9 Sinha S K. Superlattices and Microstructures, 2019, 125, 88.
10 Abbas Tariq Abdul-Hameed. Journal of Electronic Materials, 2018, 47(12), 7331.
11 Pérez-Pacheco A, Acosta-Najarro D R, Castañeda-Guzmán R, et al. Journal of Applied Physics, 2013, 113(18), 184307.
12 Abd-Alghafour N M, Mohammed Sabah M, Ahmed Naser M, et al. Journal of Electronic Materials, 2019, 48(9), 5640.
13 Li C. Chinese Battery Industry, 2020, 24(3), 121 (in Chinese).
李聪. 电池工业, 2020, 24(3), 121.
14 Yan B, Zhong S K, Liu X J, et al. Journal of Alloys and Compounds, 2021, 875, 159899.
15 Hu B B, Li L, Xiong X, et al. Journal of Solid State Electrochemistry, 2019, 23, 1315.
16 Zeng J, Huang J D, Liu J, et al. Carbon, 2019, 154, 24.
17 Li J M, Qin H, Liu J M. Nonferrous Metals(Extractive Metallurgy), 2021(11), 79 (in Chinese).
李基铭, 覃慧, 刘嘉铭. 有色金属(冶炼部分), 2021(11), 79.
18 Chen Z, Augustyn V, Wen J, et al. Advanced Materials, 2011, 23(6), 791.
19 Korkmaz S, Meydaneri Tezel F, Kariper A. Synthetic Metals, 2018, 242, 37.
20 Xu J H, Zheng F, Xi C P, et al. Journal of Power Sources, 2018, 404(10), 47.
21 Li M, Weng D, Wei Y X, et al. Electrochimica Acta, 2017, 248, 206.
22 Yu D R, Wei W, Wei M, et al. Journal of Solid State Electrochemistry, 2022, 26, 1399.
23 Chang Chung-Chieh, Chi Po-Wei, Chandan Prem, et al. Materials, 2019, 12(15), 2475.
24 Amal G, Dhayal R A, Albert I A, et al. Materials Today: Proceedings, 2020, 36, 464.
25 Shafique S, Yang S M, Wang Y M, et al. Sensors and Actuators A: Phy-sical, 2019, 296, 38.
26 Abbasi M, Rozati S M, Irani R, et al. Materials Science in Semiconductor Processing, 2019, 29, 132.
27 Schneider Krystyna, Maziarz Wojciech. Sensors, 2018, 18(12), 4177.
28 Ali I M, Rzaij J M, Abbas Q A, et al. Iranian Journal of Science and Technology, Transactions A: Science, 2018, 42, 2375.
29 Yang S, Cen Y, Hu B B, et al. ChemElectroChem, 2021, 8(11), 1993.
30 Peng Y, Zhan Z L. Materials for Mechanical Engineering, 2011, 35(10), 70 (in Chinese).
彭雁, 詹肇麟. 机械工程材料, 2011, 35(10), 70.
31 Schneider K. Journal of Materials Science: Materials in Electronics, 2022, 33, 10410.
32 Lin Tien-Chai, Jheng Bai-Jhong, Huang Wen-Chang, et al. Energies, 2021, 14, 2065.
33 Patil C E, Tarwal N L, Jadhav P R, et al. Current Applied Physics, 2014, 14(3), 389.
34 Margoni M M, Mathuri S, Ramamurthi K, et al. Applied Surface Science, 2017, 418(A), 280.
35 Ramana C V, Naidu B S, Hussain O M, et al. Journal of Physics D: Applied Physics, 2001, 34(7), 35.
36 Wu J, Qiu D, Zhang H L, et al. Journal of the Electrochemical Society, 2018, 165(5), D183.
37 Liu X L, Jiang Y Q, Ba D L, et al. Chemical Communications, 2020, 56(1), 70.
38 Li J X, Li Y, Zhou J Z, et al. Electronic Components and Materials, 2021, 40(4), 316 (in Chinese).
李军显, 李毅, 周建忠, 等. 电子元件与材料, 2021, 40(4), 316.
39 Zhen E M, Xu G, Miao L, et al. Micronanoelectronic Technology, 2009, 46(9), 530 (in Chinese).
甄恩明, 徐刚, 苗蕾, 等. 微纳电子技术, 2009, 46(9), 530.
40 Vishva J, Dimple S, Kinjal P. Materials Today: Proceedings, 2022, 48(3), 706.
41 Grayli S V, Leach G W, Bahreyni B. Sensors and Actuators A: Physical, 2018, 279, 630.
42 Amala A C, Vignesh R, Geetha G V, et al. Physica Status Solidi (A), 2021, 218(19), 2100282.
43 Jeyalakshmi K, Vijayakumar S, Nagamuthu S, et al. Materials Research Bulletin, 2013, 48(2), 760.
44 Diktanait A, Gaidamaviien G, Kazakeviius E, et al. Thermochimica Acta, 2020, 685, 178511.
45 Yu W J, Wang J X, Gou Z P, et al. Ceramics International, 2013, 39(3), 2639.
46 Liu H Y, Liang X P, Jiang T, et al. Electrochimica Acta, 2022, 404, 139784.
47 Jeyalakshmi K, Vijayakumar S, Purushothaman K K, et al. Materials Research Bulletin, 2013, 48(7), 2578.
48 Yu D M, Zhang S T, Liu D W, et al. Journal of Materials Chemistry, 2010, 20(48), 10841.
49 Abyazisani M, Bagheri-Mohagheghi M M, Benam M R. Materials Science in Semiconductor Processing, 2015, 31, 693.
50 Mousavi M, Kompany A, Shahtahmasebi N, et al. Physica Scripta, 2013, 88(6), 065701.
51 Li Y W, Yao J H, Uchaker E, et al. The Journal of Physical Chemistry C, 2013, 117(45), 23507.
52 Gershinsky Gregory, Yoo Hyun Deog, Gofer Yosef, et al. Langmuir, 2013, 29(34), 10964.
53 Balboni R D C, Lemos R M J, Moura E A, et al. Journal of Materials Science: Materials in Electronics, 2018, 29, 16911.
54 Vasanth Raj D, Ponpandian N, Mangalaraj D, et al. Materials Science in Semiconductor Processing, 2013, 16(2), 256.
55 Etemadi B, Mazloom J, Ghodsi F E. Materials Science in Semiconductor Processing, 2017, 61, 99.
56 Wei Y X, Zhou J L, Zheng J M, et al. Electrochimica Acta, 2015, 166, 277.
57 Moura E A, Cholant C M, Balboni R D C, et al. Journal of Physics and Chemistry of Solids, 2018, 119, 1.
58 Shi Q Q. The study of the preparation and optical response characteristics of vanadium pentoxide thin films. Master's Thesis, University of Chinese Academy of Sciences, China, 2021 (in Chinese).
石倩倩. 五氧化二钒薄膜的制备及光学响应特性研究. 硕士学位论文, 中国科学院大学, 2021.
59 Rubin A C, Liu Y L, Lee K M, et al. Journal of Applied Physics, 1986, 60(2), 749.
60 Abd-Alghafour N M, Ahmed Naser M, Hassan Z, et al. Applied Physics A, 2016, 122(9), 817.
61 Modafferi V, Trocino S, Donato A, et al. Thin Solid Films, 2013, 548, 689.
62 Khalaf M K, Hassan N K, Khudiar A I, et al. Physics of the Solid State, 2020, 62(1), 74.
63 Zhang S B, Li Y H, Zhu N N, et al. Ferroelectrics, 2022, 551(1), 259.
64 Zhu N N, Zheng F Z, Zhu Y W, et al. The International Journal of Advanced Manufacturing Technology, 2016, 87, 1951.
65 Dhananjaya M, Guru Prakash N, Lakshmi Narayana A, et al. Journal of Electronic Materials, 2020, 49, 1922.
66 Esther A C M, Porwal D, Pradeepkumar M S, et al. Physica B: Condensed Matter, 2015, 478, 161.
67 Muhammed M Sh, Kalaf M K, Mohammed S J. IOP Conference Series: Materials Science and Engineering, 2019, 557, 012065.
68 Buchheit Annika, Teßmer Britta, Muñoz-Castro Marina, et al. Chemistry Open, 2021, 10, 340.
69 Zuo J, Wang H, Wang Q, et al. Vacuum, 2022, 196, 110756.
70 Mane A A, Ganbavle V V, Gaikwad M A, et al. Journal of Analytical and Applied Pyrolysis, 2015, 115, 75.
71 Yusuke Iida, Yoshinori Kanno. Journal of Materials Processing Technology, 2009, 209(5), 2421.
72 Giorgetti M, Berrettoni M, Smyrl W H. Chemistry of Materials, 2007, 19(24), 5991.
73 Farcy J, Maingot S, Soudan P, et al. Solid State Ionics, 1997, 99(1-2), 61.
74 Zhan S Y, Wei Y J, Bie X F, et al. Journal of Alloys and Compounds, 2010, 502(1), 92.
75 Guru P N, Dhananjaya M, Purusottam R B, et al. Materials Today: Proceedings, 2016, 3(10), 4076.
76 Panagopoulou M, Vernardou D, Koudoumas E, et al. The Journal of Physical Chemistry C, 2017, 121(1), 70.
77 Tabatabai Y S, Pilevar S R, Shafei S. Materials Science and Enginee-ring: B, 2021, 263, 114755.
78 Mousavi M, Khorami G, Kompany A, et al. Modern Physics Letters B, 2018, 32(20), 1850229.
79 Vijayakumar Y, Nagaraju P, Sreekanth T, et al. Superlattices and Microstructures, 2021, 153, 106870.
80 Nagaraju P, Vijayakumar Y, Ramana Reddy M V, et al. RSC Advances, 2019, 9(29), 16515.
81 Tutel Y, Batuhan Durukan M, Koc S, et al. Journal of the Electrochemical Society, 2021, 168(10), 106511.
82 Khmissi H, Mahmoud S A, Akl A A. Optik, 2021, 227, 165979.
83 Gandasiri R, Sreelatha C J, Nagaraju P, et al. Physica B: Condensed Matter, 2019, 572(B), 220.
84 Liu Y N, Jia C Y, Wan Z Q, et al. Solar Energy Materials and Solar Cells, 2015, 132, 467.
85 Asen Parvin, Shahrokhian Saeed, Iraji zad Azam. International Journal of Hydrogen Energy, 2017, 42(33), 21073.
86 Li H L, Wei K Y, Yang Z, et al. Chemical Physics, 2021, 544, 111111.
87 Margoni M M, Mathuri S, Ramamurthi K, et al. Applied Surface Science, 2018, 449, 193.
88 Hu T, Sun J J, Zhang Y F, et al. Journal of Materials Science & Techno-logy, 2021, 83, 7.