PDMS基体上金属薄膜变形与断裂行为及其应变传感性能综述

doi:10.11896/cldb.21010111

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Abstract In recent years, flexible electronic technology has broken through the limitation of traditional electronic devices, which has been widely applied in the fields of electronics, energy, medical care, information technology, national defense, etc. As the basic structural unit of flexible electronic devices, metal film/compliant substrate systems inevitably suffer from various deformation in the practical application, such as tension, compression, bending and torsion. Thus, it is a big challenge to prepare the material systems, design the film/substrate interfaces and optimize the structures for maintaining the structural stability of metal film/compliant substrate systems.
Polydimethylsiloxane (PDMS) is often used as the substrate material for flexible electronics. However, the PDMS substrates cannot effectively suppress the strain localization of the metal films because of low elasticity modulus and poor adhesion. The as-deposited metal films may even fracture, restricting the development of flexible electronics. Recently, much effort has been devoted to the deformation and fracture behavior of metal films on PDMS substrates. Some strategies have been proposed to improve the stretchability, including optimizing the film preparation, enhancing the interface adhesion, and designing the geometries of the films and substrates.
For example,the stress state of metal films can be tuned by changing deposition parameters. A compressive stress in metal films is beneficial to the stretchability. The stretchability can also be improved by interfacial adhesion strategies, such as ultraviolet-ozone (UVO) treatment, oxygen plasma treatment, and adding adhesion interlayers. However, the improvement of the stretchability is considerably limited by optimizing film preparation and enhancing interface adhesion. Recent studies have demonstrated that the stretchability would be significantly improved by introducing the wrinkling/buckling structures in films or substrates, which provides a possibility for the practical application of flexible electronics. Additionally, as one of the most common failure modes of metal thin films, cracking will remarkably impair the stretchability, which usually should be avoided. On the contrary, it is helpful to achieve some functionalities by controlling the fracture behavior of the metal films. For example, it has been demonstrated that the highly sensitive flexible strain sensors can be developed by manipulating the cracking behavior of metal thin films.
This review summarizes the research progress of deformation and fracture behavior of metal films on PDMS substrates, and introduces the strategies for improving the stretchability, including optimizing film preparation, modifying the PDMS surface, adding the adhesion interlayers and designing wrinkling/buckling structures. By analyzing the current challenges and future opportunities, this review is expected to provide the theoretical reference for the preparation of optimization and structural design of high-performance flexible electronic devices.

Key words： flexible electronics polydimethylsiloxane(PDMS) metal films fracture wrinkle strain sensing

Published: 10 July 2022 Online: 2022-07-12

CLC number:

TB31

Fund:National Natural Science Foundation of China (51621063, 51801146, 51625103) and the 111 Project of China (BP2018008).

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	ZHANG Dongkai
	WU Kai
	LIU Gang
	SUN Jun

Cite this article:

ZHANG Dongkai,WU Kai,LIU Gang, et al. Deformation and Fracture Behavior of Metal Films on Polydimethylsiloxane (PDMS) and Its Application in Strain Sensing: a Review[J]. Materials Reports, 2022, 36(13): 21010111-8.

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http://www.mater-rep.com/EN/10.11896/cldb.21010111 OR http://www.mater-rep.com/EN/Y2022/V36/I13/21010111

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