MAX相Ti<sub>3</sub>SiC<sub>2</sub>高导电涂层的研究进展

doi:10.11896/cldb.20090046

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Abstract Ti₃SiC₂(TSC) is a new type of ternary compound MAX phase with excellent properties of both metallic and ceramic materials. Ti₃SiC₂ as a high conductive coating with great application potential has attracted more and more attention in recent years. The preparation technologies of Ti₃SiC₂ coating are constantly being reformed and optimized. There're mainly five common processes to prepare Ti₃SiC₂ coating, including chemical vapor deposition (CVD), physical vapor deposition (PVD), solid-state reaction, aerosol deposition method (ADM) and thermal sp-raying, respectively.
The properties of Ti₃SiC₂ coatings are closely related to their purity to a large extent. Usually, a certain degree of impurities are contained in Ti₃SiC₂ coating, which has become an important factor restricting its wide application. It is found that the impurities in Ti₃SiC₂ coating are mainly TiC, Ti₅Si₃, SiC, TiSi₂, etc. More over, the kinds of impurities produced by different methods are different. In order to improve the purity of Ti₃SiC₂ coating, it is necessary to explore and optimize the preparation process. At present, reactive chemical vapor deposition (RCVD) has realized the growth of pure Ti₃SiC₂ coating on graphite substrate by consuming silicon carbide (SiC) sublayer. Besides, ADM has also produced pure Ti₃SiC₂ coatings at room temperature, which reduces the synthesis temperature of conventional Ti₃SiC₂ coating. In addition, PVD technology not only provides the possibility of synthesizing Ti₃SiC₂ coating at low temperature, but also realizes the industrial production of Ti-Si-C composite coating.
This paper comprehensively reviews the recent research on Ti₃SiC₂. The unique crystal structure and excellent properties of Ti₃SiC₂ coating are discussed. The different ways to prepare Ti₃SiC₂ coating were analyzed and current challenges in the synthesis of pure Ti₃SiC₂ coating were also introduced. Furthermore, the current and potential applications of Ti₃SiC₂ coating has been summarized. Overall, the analyses and discussions of various Ti₃SiC₂ coating synthesis technologies in this review will be contributed to synthesis of high purity Ti₃SiC₂ coating in the future.

Key words： Ti₃SiC₂ coating structure property preparation

Published: 10 December 2021 Online: 2021-12-23

CLC number:

TQ174

Fund:National Natural Science Foundation of China (21676163, 51602189)

Corresponding Authors: zhangfzh@shu.edu.cn;aijun.li@shu.edu.cn

About author: Jie Zhu received his B.E. degree in metal materials and engineering from Nanjing Institute of Technelogy in 2017. He is currently a postgraduate student in the School of Materials Science and Engineering, Shanghai University under the supervision of Prof. Aijun Li. His research has focused on depositing Ti₃SiC₂ coating by chemical vapor deposition.
Fangzhou Zhang is an assistant researcher in School of Materials and Engineering of Shanghai University. In 2014, he graduated from the Ecole Normale Superieur de Cachan. After graduation, he worked in Aerospace Research Institute of Materials & Processing Technology and Shanghai University. In the past five years, he has successively obtained Technology Foundation for Selec-ted Overseas Chinese Scholar, National Natural Science Foundation of China, and Key Laboratory foundation of Equipment Development Department of the Central Military Commission. As the first author or the corresponding author, he published 6 SCI papers in academic journals including Nano Energy, Journal of Composite Material, etc. At present, he is mainly engaged in the research on the mechanical properties and behaviors of ceramic matrix composite materials.
Aijun Li is currently a professor at the School of Mate-rials Science and Engineering at the Shanghai University (SHU). He received his Ph.D. degree in materials science from Northwestern Polytechnical University in 2004. He worked as a senior scientist and then a group leader for carbon materials at the Karlsruhe Institute of Technology (KIT), in Germany from 2010 to 2015, being involved with the research, development and application of composites. His main research interests are in the complex interactions of multi-physical and chemical phenomena involved in chemically reacting flows, mainly focusing on modeling, simulation and synthesis of composites by chemical vapor infiltration/deposition processes.

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Cite this article:

ZHU Jie,ZHANG Fangzhou,XIE Youju, et al. Research Progress in MAX Phase Ti₃SiC₂ Highly Conductive Coating[J]. Materials Reports, 2021, 35(23): 23025-23032.

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http://www.mater-rep.com/EN/10.11896/cldb.20090046 OR http://www.mater-rep.com/EN/Y2021/V35/I23/23025

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