透明导电CuCr1-xMgxO2(x=0~0.08)薄膜的固溶度扩展和c轴外延生长

doi:10.11896/cldb.20010112

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Abstract The c-axis epitaxial CuCr_1-xMg_xO₂(x=0—0.08) thin films were grown on the 0—15° vicinal cut α-Al₂O₃(0001) substrate by pulsed laser deposition (PLD) technology. With the increase of Mg doping, the thin films are all single-phase delafossite structure. The thin films exhibit semiconductor behavior, which conforms to Arrhenius thermal activation mode. The room temperature resistivity decreased monotonically by 2—3 orders of magnitude, the thermal activation energy dropped from 0.22 eV to 0.025 eV. It was inferred that the solid solubility of Mg in the thin film was at least 0.08, which was significantly extended compared with polycrystalline (~0.03). The non-equilibrium and instantaneous explosion characteristics of PLD make Mg in the target second phase (MgCr₂O₄) transport to the substrate by plasma, and dissolve into the thin film lattice, resulting in an extension of the solid solubility. The transmittance of the thin films (x=0, 0.02) was 60%—80% in the visible light region of 380—780 nm. The direct optical bandgap E_g was 3.06 eV, 3.04 eV, respectively. The acceptor energy level is introduced and broadened above the valence band top while more Cr³⁺ replaced by Mg²⁺, making thermal activation energy decrease significantly, the more carriers can be gene-rated. The transmittance and optical band gap have a slight drop. When Mg is solid-dissolved into the crystal lattice, which promotes the growth of layered crystal grains of the thin films, the epitaxialitye are improved, and the resistivity is further reduced.

Key words： CuCr_1-xMg_xO₂ films transparent conductive pulsed laser deposition solid solubility extension c-axis epitaxial growth

Published: 04 June 2021

CLC number:

TB34

Fund:National Natural Science Foundation of China (51962017,51462017).

About author:: Yan Shen pursuing his master's degree in materials science at Kunming University of Science and Technology (KMUST), focusing on the research of optoelectro-nic materials and devices.
Lan Yu received her Ph.D. degree in materials science from joint training of Kunming University of Science and Technology and Max Planck Institute for Solid State Research in 2012. Her research interests focus on the strong correlation systems and atomic layer thermopile characteristic oxides, preparation and characterization of polycrystalline ceramics and epitaxial films of semiconductor thermoelectric materials, thermoelectric and magnetic transport anisotropy, transverse thermoelectric effects, and atomic layer thermopile films heat flow sensor. She has published more than 50 journal papers, applied 25 national invention patents and 11 of them were autho-rized.

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	SHEN Yan
	LIU Dandan
	SONG Shijin
	TAN Yanyan
	HU Yiding
	WU Haorong
	YU Lan

Cite this article:

SHEN Yan,LIU Dandan,SONG Shijin, et al. Solid Solubility Extension and c-axis Epitaxial Growth of Transparent Conductive CuCr_1-xMg_xO₂(x=0—0.08) Thin Films[J]. Materials Reports, 2021, 35(10): 10008-10012.

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http://www.mater-rep.com/EN/10.11896/cldb.20010112 OR http://www.mater-rep.com/EN/Y2021/V35/I10/10008

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