具有优良隔热和力学性能的低热导率W/Al<sub>2</sub>O<sub>3</sub>纳米多层功能膜的构建

doi:10.11896/cldb.19010037

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Abstract This work carried out an alternative deposition of W/Al₂O₃ nano-multilayers with various periodic thickness on the surface of soda-lime-silica glass by means of magnetron sputtering at room temperature, taking W and Al₂O₃ as targets. Under the condition of the same total thickness of W/Al₂O₃nano-multilayers, the effects of various periodic thickness on thermal insulation performance of W/Al₂O₃ were investigated. Step profiler, scanning electron microscope (SEM), X-ray diffraction (XRD) and transmission electron microscope (TEM) were employed to characterize the morphology and structure of W/Al₂O₃ nano-multilayers. Transient thermoreflectance (TTR) technique and nano indentation instrument were adopted to measure the thermal and mechanical properties of W/Al₂O₃ nano-multilayers. It was found that the individual layer in the nano-multilayers was uniform and continuous, no fault could be observed and interface between the layers was clear. The deposited Al₂O₃ layer exhibited an amorphous morphology, and the W layer held a metastable β-W (210) preferred orientation and showed an obvious amorphous state under the periodic thickness of 5 nm. The increase of interface density would bring about the enhancement in thermal resistance and hardness, and the decline in thermal conductivity of W/Al₂O₃ nano-multilayers. The W/Al₂O₃ nano-multilayers with 41 layers and periodic thickness of 5 nm exhibited an exceptional thermal insulation and mechanical properties, presenting the thermal resistance of 3.14×10^-7m²·K·W^-1, effective thermal conductivity of 0.36 W·m^-1·K^-1, hardness up to 8.53 GPa, binding force between multilayers and substrate of 42.20 mN. The prepared W/Al₂O₃ nano-multilayers possess a satisfactory thermal stability in the range of room temperature to 500 ℃.

Key words： W/Al₂O₃ multilayer films magnetron sputtering thermal conductivity periodic thickness transient thermoreflectance technique

Published: 25 January 2020 Online: 2020-01-03

CLC number:	TB34
	TB79

About author: Shanni Wumajors in chemical engineering as a gra-duate student in Hainan University, mainly engaged in functional membrane materials research;Chunrong Xiongreceived his M.S. degree from Fudan University in 1998, and worked at Shanghai Research Institute of Petrochemical Engineering from 1998 to 2002. He furthered his study at the University of Texas for a Ph.D. during 2003—2007. Upon graduation he worked as a postdoctoral at the University of California at Merced. Since August of 2008, he has been working at Hainan University. His research inte-rests cover functional membrane materials, nanomate-rials and industrial catalysis.

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	WU Shanni
	ZHAO Yuan
	JIANG Hong
	WEN Feng
	XIONG Chunrong

Cite this article:

WU Shanni,ZHAO Yuan,JIANG Hong, et al. Construction of W/Al₂O₃ Functional Nano-multilayers with Low Thermal Conductivity and Superior Mechanical Properties[J]. Materials Reports, 2020, 34(2): 2023-2028.

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http://www.mater-rep.com/EN/10.11896/cldb.19010037 OR http://www.mater-rep.com/EN/Y2020/V34/I2/2023

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