对非晶硅薄膜进行快速磷扩散以获得本征薄层异质结

doi:10.11896/cldb.18090144

Abstract
Figure/Table
References
Related Citation (14)

Download:

Full Text ( PDF ) (3005KB)

Suppl. Info.
Export: BibTeX | EndNote (RIS)

Abstract Heterojunction with intrinsic thin-layer (HIT) solar cells have many advantages, such as high efficiency, low cost, good stability and low temperature of preparing. Using magnetron sputtering method, we prepared the intrinsic amorphous silicon film (i-a-Si) with a certain thickness on the substrate of P-type crystalline silicon (p-c-Si), then the doped amorphous silicon layer (n⁺-a-Si), which is also the ideal p-n junction, was obtained by the rapid thermal diffusion method (RTD). Finally, the heterostructure of n⁺-a-Si/i-a-Si/c-Si was prepared successfully. This paper focus on the effect of diffusion process on the crystallization of amorphous silicon film,including i-a-Si and n⁺-a-Si, and the depth of p-n junction. Meantime, we characterized the amorphous silicon film by Raman spectra and X-ray diffraction (XRD), and the depth of p-n junction was mea-sured by metallographic microscope with the lapping and staining method. As a result, the ideal temperature and time of diffusion to get better p-n junction was concluded.

Key words： heterojunction with intrinsic thin-layer (HIT) solar cells amorphous silicon films magnetron sputtering p-n junction rapid thermal diffusion

Published: 29 August 2019

CLC number:	O475
	TM914.4+1

About author:: Xiuyu Yang, studying at North China Electric Power University as a master student now, focuses on the research of high efficiency solar cell technology.Nuofu Chen are currently a professor and a doctoral supervisor in North China Electric Power University. He specializes in semiconductor materials and devices. In recent years, he has devoted himself to the research of new high-efficiency solar cells, invented combined concentrator modules, and successfully developed high-efficiency concentrator solar cells, integrated solar cells and polycrystalline silicon thin film solar cells. He has published more than 100 papers in academic journals such as Physical Review B and Applied Physics Letters, applied for 22 invention patents and authorized 8 invention patents.

	Service
	E-mail this article
	Add to my bookshelf
	Add to citation manager
	E-mail Alert
	RSS
	Articles by authors
	YANG Xiuyu
	CHEN Nuofu
	ZHANG Hang
	TAO Quanli
	XU Jiaran
	CHEN Meng
	CHEN Jikun

Cite this article:

YANG Xiuyu,CHEN Nuofu,ZHANG Hang, et al. Rapid Thermal Diffusion of Phosphorus in Amorphous Silicon Thin Films to Prepare Heterojunction with Intrinsic Thin-layer[J]. Materials Reports, 2019, 33(20): 3353-3357.

URL:

http://www.mater-rep.com/EN/10.11896/cldb.18090144 OR http://www.mater-rep.com/EN/Y2019/V33/I20/3353

王同龙.http://www.qianzhan.com/qzdata/detail/149/151201-5ec9b13a.html, 2015-12-01/2018-09-08.2 王安琪.http://guangfu.bjx.com.cn/news/20170410/819122.shtml, 2017-04-10/2018-09-08.3 Yoshikawa K, Kawasaki H, Yoshida W, et al. Nature Energy, 2017, 2(5),17032.4 NREL. https://www.nrel.gov/pv/assets/images/efficiency-chart.png, 2017/2018-09-08.5 Green M A, Hishikawa Y, Warta W, et al. Progress in Photovoltaics, 2017, 25(7), 668.6 Masuko K, Shigematsu M, Hashiguchi T, et al. IEEE Journal of Photovoltaics, 2014, 4(6),1433.7 Taguchi M, Terakawa A, Maruyama E, et al. Progress in Photovoltaics Research & Applications, 2005, 13(6),481.8 Taguchi M, Yano A, Tohoda S, et al. IEEE Journal of Photovoltaics, 2013, 4(1),96.9 Tohoda S, Fujishima D, Yano A, et al. Journal of Non-Crystalline So-lids, 2012, 358(17),2219.10 Adachi D, Hernández J L, Yamamoto K. Applied Physics Letters, 2015, 107(23),73.11 Descoeudres A, Holman Z C, Barraud L, et al. IEEE Journal of Photovoltaics, 2013, 3(1),83.12 Fujishima D, Inoue H, Tsunomura Y, et al. In: Photovoltaic Specialists Conference. IEEE, USA, 2010, pp. 003137.13 Tsunomura Y, Yoshimine Y, Taguchi M, et al. Solar Energy Materials & Solar Cells, 2009, 93(6-7),670.14 Maruyama E, Terakawa A, Taguchi M, et al. In: Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE, World Conference on IEEE, USA, 2007, pp. 1455.15 Taguchi M, Terakawa A, Maruyama E, et al. Progress in Photovoltaics Research & Applications, 2005, 13(6),481.16 Wang Q, Page M R, Iwaniczko E, et al. Applied Physics Letters, 2010, 96(1), 2186.17 Zhang Q F, Zhu M F, Liu F Z. Solar Energy, 2006(4),40 (in Chinese).张群芳,朱美芳,刘丰珍.太阳能, 2006(4),40.18 Zhang Q F, Zhu M F, Liu F Z, et al. Journal of Semiconductors, 2007, 28(1),96 (in Chinese).张群芳, 朱美芳, 刘丰珍,等.半导体学报, 2007, 28(1),96.19 Jagannathan B, Anderson W A, Coleman J. Solar Energy Materials & Solar Cells, 1997, 64(3), 241.20 Liang X Q. Experiments and analysis of new technology of crystalline silicon solar cell. Master’s Thesis, Zhongshan University,China, 2010 (in Chinese).梁学勤. 晶体硅太阳电池新工艺实验研究和理论分析.硕士学位论文,中山大学, 2010.21 Tong L Y, Zhao Q, Shi J X, et al.Semiconductor Technology, 2009, 34(12), 1213 (in Chinese).佟丽英, 赵权, 史继祥,等.半导体技术, 2009, 34(12),1213.22 He B, Shi Y L, Xu J.Infrared, 2006, 27(10),5 (in Chinese).何波, 史衍丽, 徐静.红外, 2006, 27(10),5.23 Lavareda G, Velozo A D C, Carvalho C N D, et al. Thin Solid Films, 2013, 543(24),122.24 Green M. Solar cells: Principles, technologies and applications of systems, Electronics Industry Press, China, 1987 (in Chinese).马丁·格林. 太阳电池:工作原理、工艺和系统的应用, 电子工业出版社, 1987.25 Tanaka M, Okamoto S, Tsuge S, et al. In: Photovoltaic Energy Conversion, 2003. Proceedings of World Conference on IEEE Xplore. Japan, 2003, pp. 955.26 Jia X P. Chinese Journal of Power Sources, 2011, 35(2), 127 (in Chinese).贾旭平.电源技术, 2011, 35(2),127.27 世纪新能源网. http://www.ne21.com/news/show-73714.html, 2016-03-04/2018-09-08.