红外抗反射微纳结构刻蚀制备研究进展

doi:10.11896/cldb.22110062

材料导报

2024, Vol. 38

Issue (6): 22110062-10 https://doi.org/10.11896/cldb.22110062

金属与金属基复合材料

红外抗反射微纳结构刻蚀制备研究进展

李雪伍¹, 王红星^1,2, 郭伟玲², 邢志国², 黄艳斐^2,*, 王海斗^3,*

1 西安科技大学机械工程学院,西安 710054
2 中国人民解放军陆军装甲兵学院装备再制造技术国防科技重点实验室,北京 100072
3 中国人民解放军陆军装甲兵学院机械产品再制造国家工程研究中心,北京 100072

Research Progress on the Preparation of Infrared Anti-reflection Micro-Nano Structure by Etching Process

LI Xuewu¹, WANG Hongxing^1,2, GUO Weiling², XING Zhiguo², HUANG Yanfei^2,*, WANG Haidou^3,*

1 School of Mechanical Engineering, Xi'an University of Science and Technology, Xi'an 710054, China
2 National Key Laboratory for Remanufacturing, Army Academy of Armored Forces of PLA, Beijing 100072, China
3 National Engineering Research Center for Remanufacturing, Army Academy of Armored Forces of PLA, Beijing 100072, China

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摘要 “蛾眼效应”指光波折射率因蛾眼表面微纳结构在深度方向呈连续性变化,使大部分光被吸收,只有极少被反射的现象。受“蛾眼效应”启发,在材料表面制备微纳结构使其具有独特抗反射性能受到广泛关注,在太阳能电池、光电探测器、光电二极管和军事隐身等领域有广阔应用前景。本文梳理不同微纳结构抗反射原理,并对红外抗反射结构的不同刻蚀制备方法及其应用进行综述,总结了化学刻蚀、反应离子刻蚀、超快激光刻蚀等红外抗反射结构制备方法的特点以及对抗反射性能的影响,阐述红外抗反射结构在红外探测、红外热成像和隐身等方面的应用,并对抗反射结构制备方法研究方向与未来前景进行展望。

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	李雪伍
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	黄艳斐
	王海斗

关键词: 抗反射结构红外微纳结构刻蚀制备

Abstract: The ‘moth-eye effect' refers to the phenomenon that the refractive index of the light wave changes continuously due to the micro-nano structures of the moth-eye surface in the depth direction, so that most of the light is absorbed and only rarely reflected. Inspired by the ‘moth-eye effect', the preparation of micro-nano structured surfaces on materials has attracted wide attention owing to its unique anti-reflection properties. It has broad application prospects in solar cells, photodetectors, photodiodes, and military stealth. In this paper, the antireflection principles of different micro-nano structures are sorted, and the preparation methods and applications of different etching of infrared antireflective structures are reviewed. The characteristics of infrared antireflection structure preparation methods, such as chemical etching, reactive ion etching, and ultrafast laser etching, and the influence of the antireflection performance are summarized. Applications of infrared antireflection structures in infrared detection, infrared thermal imaging and stealth are described. The research direction and future prospects of the preparation methods for anti-reflection structures are discussed.

Key words: anti-reflective structure infrared micro-nano structure etching method

出版日期: 2024-03-25 发布日期: 2024-04-07

ZTFLH:	TG141
	TG177
	TG178

基金资助: 国家自然科学基金(52275227;52275211;52130509);陕西省创新能力支撑计划科技新星项目(2021KJXX-38)

通讯作者: ^*黄艳斐,中国人民解放军陆军装甲兵学院再制造技术国家重点实验室助理研究员。从事表面工程与再制造工程方面的教学与科研工作。
王海斗,研究员,博士研究生导师,中国人民解放军陆军装甲兵学院机械产品再制造国家工程研究中心主任。现在主要从事表面工程、再制造和摩擦学方面的研究。

作者简介: 李雪伍,清华大学摩擦学国家重点实验室博士后,教授,博士研究生导师。主要研究方向:涂层表界面行为与调控、表面工程与摩擦学、金属腐蚀与防护。在Journal of Magnesium and Alloys、Carbon、Applied Surface Science、Materials & Design、Ceramics International等期刊发表SCI检索论文30余篇,其中ESI Hot Paper(前0.1%)及ESI Highly Cited Paper(前1%)6篇。申请国家发明专利10余项,授权5项。

引用本文:

李雪伍, 王红星, 郭伟玲, 邢志国, 黄艳斐, 王海斗. 红外抗反射微纳结构刻蚀制备研究进展[J]. 材料导报, 2024, 38(6): 22110062-10.
LI Xuewu, WANG Hongxing, GUO Weiling, XING Zhiguo, HUANG Yanfei, WANG Haidou. Research Progress on the Preparation of Infrared Anti-reflection Micro-Nano Structure by Etching Process. Materials Reports, 2024, 38(6): 22110062-10.

链接本文:

http://www.mater-rep.com/CN/10.11896/cldb.22110062 或 http://www.mater-rep.com/CN/Y2024/V38/I6/22110062

1 Wu J H, Tu J L, Li L, et al. Surfaces and Interfaces, 2022, 30, 101918.
2 Joshya R S, Carrère H, Ibarra-sierra V G, et al. Advanced Functional Materials, 2021, 31(27), 2102003.
3 Kim K, Ki B, Bong H, et al. Advanced Optical Materials, 2020, 15(8), 2000143.
4 Quan C, Gu S, Zou J L, et al. Optics Express, 2023, 30(24),43741.
5 Lin S H, Zhang J, Ai L, et al. Materials Reports, 2019, 33(21), 3588(in Chinese).
林昇华, 张景, 艾玲, 等. 材料导报, 2019, 33(21), 3588.
6 Hao T, Zheng W, Wang W Q, et al. Journal of Applied Physics, 2019, 126(2), 025303.
7 Bae S I, Lee Y, Seo Y H. Nanoscale, 2019, 11(3), 856.
8 Guo S, Yang L, Dai B, et al. Physica Status Solidi A-applications and Materials Science, 2020, 217(16), 2000149.
9 Busse L E, Frantz J A, Shaw L B, et al. Applied Optics, 2015, 54(31), F303.
10 Chan L W, Morse D E, Gordon M J. Bioinspiration & Biomimetics, 2018, 13(4), 041001.
11 Zhou L, Li X, He D, et al. Actuators, 2022, 11(2), 28.
12 Wang S D, Wang J Y. Applied Surface Science, 2019, 476, 1035.
13 Navarro-baena I, Jacobo-martin A, Hernandez J J, et al. Nanoscale, 2018, 10(33), 15496.
14 Shanmugam N, Pugazhendhi R, Elavarasan R M, et al. Energies, 2020, 13(10), 2631.
15 Dong T T, Chen C, Xiong T, et al. Optics and Optoelectronic Technology, 2017, 3(15), 57(in Chinese).
董亭亭, 陈驰, 熊涛, 等. 光学与光电技术, 2017, 3(15), 57.
16 Chuang S Y, Chen H L, Shieh J, et al. Nanoscale, the Royal Society of Chemistry, 2010, 2(5), 799.
17 Choi J S, An J H, Lee J K, et al. Polymers, Multidisciplinary Digital Publishing Institute, 2020, 12(2), 296.
18 Huang Z, Shi X, Wang G, et al. Solar Energy, 2020, 204, 738.
19 Liu Y, Song Y, Niu S, et al. RSC Advances, 2016, 6(110), 108974.
20 Yu X, Ohta M, Takizawa N, etal. Applied Optic, 2019, 58(35), 9595.
21 Kaufmann P, Chrzanowski H M, Vanselow A, et al. Optics Express, 2022, 30(4), 5926.
22 Cameron D G, Escolar D, Goplen T G, et al. Applied Spectroscopy, 1980, 34(6), 646.
23 Schardt M, Murr P J, Rauscher M S, et al. Optics Express, Optica Publishing Group, 2016, 24(7), 7767.
24 Lafargue T T, Vaucelle R, Caliot C, et al. Scientific Reports, Nature Publishing Group, 2022, 12(1), 7814.
25 Kim K, Song G Y, Kim Y T, et al. Surface and Coatings Technology, 2017, 332, 262.
26 Kesmez Ö, Akarsu E, Çamurlu H E, et al. Ceramics International, 2018, 44(3), 3183.
27 Lotz M R, Petersen C R, Markos C, et al. Optica, 2018, 5(5), 557.
28 Wang G G, Lin Z Q, Zhao D D, et al. Langmuir, 2018, 34(30), 8898.
29 Liu W F, Zhao Z C, Zhou Z Y, et al. Journal of Materials Science and Engineering, 2020, 38(6), 880(in Chinese).
刘文峰, 赵增超, 周子游, 等. 材料科学与工程学报, 2020, 38(6), 880.
30 Papadopoulos A, Skoulas E, Mimidis A, et al. Advanced Materials, 2019, 31(32), 1901123.
31 Luo B W, Liu D B, Luo F, et al. Materials Reports, 2018, 32(3), 398(in Chinese).
罗炳威, 刘大博, 罗飞, 等. 材料导报, 2018, 32(3), 398.
32 Guo W, Dong L H, Wang H D, et al. China Surface Engineering, 2018, 31(3), 168(in Chinese).
郭伟, 董丽虹, 王海斗, 等. 中国表面工程, 2018, 31(3), 168.
33 Wang D T, Zhou H, Fan T Y. Materials Reports, 2018, 32(19), 3465.
王丹彤, 周涵, 范同祥. 材料导报, 2018, 32(19), 3465.
34 An Z Y, Zhang N. Journal of the Chinese Ceramic Society, 2022, 50(3), 661(in Chinese).
安哲毅, 张楠. 硅酸盐学报, 2022, 50(3), 661.
35 Kompanets V, Dormidonov A, Chekalin S, et al. Optics Letters, 2021, 46(13), 3187.
36 Han Z W, Jiao Z B, Niu S C, et al. Progress in Materials Science, 2019, 103, 1.
37 Fathima M I, Wilson K S J. International Journal of Modern Physics C, 2020, 31(5), 2050076.
38 Li X. Research on femtosecond laser fabrication of micro/nano structure and its anti-reflection. Ph.D. Thesis, Properties University of Chinese Academy of Sciences, China, 2021 (in Chinese).
李珣. 微纳结构飞秒激光制备技术及其抗反射特性研究, 博士学位论文, 中国科学院大学, 2021.
39 Zheng B X, Wang W J, Jiang G D, et al. Applied Physics B-Lasers and Optics, 2016, 122(6), 180.
40 Kim D M, Park J S, Jung S W, et al. Sensors, 2021, 21(9), 3191.
41 Yang S, Ge P, Zhang L, et al. Solar Energy, 2016, 134, 392.
42 Hua X S, Zhang Y J, Wang H W. Solar Energy Materials & Solar Cells, 2010, 94(2), 258.
43 He Z J. Study on the preparation of wide-band antireflective micro/nano composite metal surface by nanosecond laser. Master's Thesis, Guangdong University of Technology, China, 2019(in Chinese).
何志键. 纳秒激光制备宽波段抗反射微纳复合结构金属表面. 硕士学位论文, 广东工业大学, 2019.
44 Ikhsanov R S, Protsenko I E, Smetanin I V, et al. Optics Letters, 2020, 45(9), 26442647.
45 Chylek P, Zhan J. Applied Optics, 1980, 29(28), 3984.
46 Panahpour A, Mahmoodpoor A, Lavrinenko A V. Hysical Review B, 2019, 100(7), 075427.
47 Zhan C, Chen X J, Yi J, et al. Nature Reviews Chemistry, 2018, 2(9), 216.
48 Zhao J L, Qi H J, Wang H, et al. Optics Letters, 2015, 40(22), 5168.
49 Rizza C, Palange E, Alecci M, et al. Physical Review Applied, 2020, 14(3), 034040.
50 Lertvachirapaiboon C, Baba A, Ekgasit S, et al. Sensors and Actuators B: Chemical, 2017, 249, 39.
51 Chen T, Wang W, Tao T, et al. Applied Surface Science, 2020, 509, 145182.
52 Tan X, Tao Z, Yu M, et al. Scientific Reports, Nature Publishing Group, 2018, 8(1), 7863.
53 Lan D J, Zhao Z H, Gao Z G, et al. Journal of Magnetism and Magnetic Materials, 2020, 512, 167065.
54 Rebigan R, Kusko M, Sorohan G, et al. Journal of Optoelectronics and Advanced Materials, 2020, 22(3-4), 136.
55 Lin Y K, Chen Y S, Hsueh C H. Results in Physics, 2019, 12, 244.
56 Shin S H, Liao Y, Son B, et al. Journal of Materials Chemistry C, 2021, 9(31), 9884.
57 Zhang Y Y, Shin S H, Kang H J, et al. Applied Surface Science, 2021, 546, 149083.
58 Gonchar K A, Osminkina L A, Galkin R A, et al. Journal of Nanoelectronics and Optoelectronics, 2012, 7(6), 602.
59 Sullivan J, Ferrer-argemi L, Yu Z Q, et al. IEEE, 2019, 857.
60 Zhong H, Guo, A R, Guo G H, et al. Nanoscale Research Letters, 2016, 11(322), 1.
61 Dutta A, Alam M S, Maiti P, et al. Solar Energy, 2021, 221, 185.
62 Lova P, Soci C. Micromachines, 2020, 11(6), 573.
63 Lai W X, Liao G L, Shi T L, et al. Semiconductor Technology, 2006(6), 414(in Chinese).
来五星, 廖广兰, 史铁林, 等. 半导体技术, 2006(6), 414.
64 Hao H J, Zhang Y L, Lu W J. Equipment for Electronic Products Manufacturing, 2005(7), 48(in Chinese).
郝慧娟, 张玉林, 卢文娟. 电子工业专用设备, 2005(7), 48.
65 Zhou C, Dong J P, Zhang B B, et al. Superlattices and Microstructures, 2020, 137, 106353.
66 Wu J J, Ye X, Sun L X, et al. Optics Express, 2018, 26(2), 1361.
67 Sun H, Liu J X, Zhou C, et al. ACS Applied Materials and Interfaces, 2021.
68 Fei L, Cui Y, Wan D, et al. Optical Materials, 2018, 84, 722.
69 Lin Z Q, Wang G G, Li L H, et al. Applied Surface Science, 2019, 470, 395.
70 Cheng H J, Dong M, Tan Q W, et al. Chinese Optics Letters, 2020, 17(12), 122401.
71 Steglich M, Käsebier T, Schrempel F, et al. Infrared Physics & Techno-logy, 2015, 69, 218.
72 Dong L T, Zhang Z A, Wang , et al. Applied Optics, 2019, 58(24), 6706.
73 Li X, Li M, Liu H J, et al. Molecules, 2021, 26(14), 4278.
74 Zhang F, Wang H R, Wang C, et al. Optics and Lasers in Engineering, 2020, 129, 106062.
75 Wang H R, Zhang F, Wang C, et al. Optics & Laser Technology, 2022, 149, 107931.
76 Zhang F, Duan J A, Zhou X F, et al. Optics Express, 2018, 26(26), 34016.
77 Parmar V, Shin Y C. Applied Surface Science, 2018, 459, 86.
78 Li X, Li M, Liu H J. Chinese Optics Letters, 2021, 19(9), 091404.
79 Liu H L, Hu J, Jiang L, et al. Applied Surface Science, 2020, 528, 146804.
80 Lou R, Zhang G D, Li G Y, et al. Micromachines, 2020, 11(1), 20.
81 Zhai Y, Li Y, Ji J, et al. ACS Applied Nano Materials, 2020, 3(1), 149.
82 Huang M, Chen J, Xu J, et al. Infrared Physics & Technology, 2018, 90, 110.
83 Zhou W, Li R, Li M, et al. Ceramics International, 2022, 48(13), 18983.
84 Rebigan R, Avram A, Tudor R, et al. Romanian Journal of Information Science and Technology, 2021, 24(2), 233.
85 Wang J, Li Y, Cui J, et al. Nanoscale Research Letters, 2018, 13(1), 361.
86 An Z, Li Y, Luo X, et al. Matter, 2022, 5(6), 1937.
87 Liu J L, Zhang L M, Wu H J, et al. Chemical Engineering Journal, 2021, 411, 128601.
88 Ma X, Du B, Tan S, et al. Nanomaterials, Multidisciplinary Digital Publishing Institute, 2021, 11(10), 2622.
89 Gou J, Cansizoglu H, Bartolo-Perez C, et al. Nanophotonics, 2019, 8(10), 1747.
90 Honkanen A P, Ferrero C, Guigay J P, et al. Journal of Applied Crystallography, 2018, 51, 514.
91 Qin G, Dong Y, Zhang P, et al. Optics and Lasers in Engineering, 2023, 160, 107288.
92 Falster V, Jarabo A, Frisvad J R. Computer Graphics Forum, 2021, 39(7), 231.
93 Chen L, Jing X, Wang L, et al. Optics & Laser Technology, 2014, 62, 95.
94 Zhao Z H, Lan D, Zhang L M, et al. Advanced Functional Materials, 2022, 32(15), 2111045.

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