钨基合金靶材的粉末冶金制备工艺及其磁控溅射薄膜的研究进展

doi:10.11896/cldb.24060122

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Abstract Tungsten alloy materialhas become an important material in magnetron sputtering technology for its advantages such as high density, high purity, high melting point and excellent mechanical properties. Its preparation methods includes powder metallurgy, smelting, etc. Among which the powder metallurgy method is wide concerned with its good composition uniformity and fine microstructure. As an advanced film deposition technology, magnetron sputtering is widely used for the preparation of tungsten-based alloy films due to its high efficiency and precise control ability. The thin films of W-Mo, W-Cu, W-Ti and W-B are prepared by magnetron sputtering with tungsten base alloy as the raw material, which have been widely used in electronic devices, carbide coating and plasma physics research. In this paper, several preparation methods of tungsten-based alloy targets were introduced in detail, such as hot pressing, hot isostatic pressing, discharge plasma sintering technology. And then anti-diffusion properties, friction and wear properties, corrosion and oxidation properties of tungsten base alloy target magnetron sputtering film were analyzed, its application im many fields was introduced such as the non-diffusion barrier materials, superconducting materials, plasma-oriented materials, hard coating materials. Finally future broad development prospects in various fields was prospected.

Key words： tungsten base alloy target magnetron sputtering thin film diffusion impedance frictional wear oxidation corrosion

Published: Online: 2025-08-28

CLC number:

TG146

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	Articles by authors
	LI Rui
	LI Ruijian
	JIANG Hongqu
	LUO Yuan
	ZHAO Qi
	YI Jianhong
	LIU Yichun

Cite this article:

LI Rui,LI Ruijian,JIANG Hongqu, et al. Research Progress in Powder Metallurgy Preparation of Tungsten-based Alloy Targets and Magnetron Sputtering Films[J]. Materials Reports, 2025, 39(17): 24060122-7.

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https://www.mater-rep.com/EN/10.11896/cldb.24060122 OR https://www.mater-rep.com/EN/Y2025/V39/I17/24060122

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